公开(公告)号：US11858086B2

公开(公告)日：2024-01-02

申请号：US16901588

申请日：2020-06-15

申请人： Taiwan Semiconductor Manufacturing Company Limited

发明人： Chi-Wei Chiu ,  Yung-Long Chen ,  Bo-Zhang Chen ,  Chong-Cheng Su ,  Yu-Chun Chen ,  Ching-Jung Hsu ,  Chi-Tung Lai

IPC分类号： B24B37/04 ,  B24B57/02 ,  H01L21/306 ,  B01F23/50

CPC分类号： B24B37/04 ,  B24B57/02 ,  H01L21/30625 ,  B01F23/56

摘要： A slurry blending tool may include a blending tank to receive and blend one or more materials into a slurry, and at least one inlet pipe connected to the blending tank and to provide the one or more materials to the blending tank. The at least one inlet pipe may vertically enter the blending tank and may not contact the blending tank. The slurry blending tool may include a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry. The slurry blending tool may include an outlet pipe connected to the blending pump and to remove the slurry from the blending tank.

公开(公告)号：US11817329B2

公开(公告)日：2023-11-14

申请号：US16887647

申请日：2020-05-29

申请人： Taiwan Semiconductor Manufacturing Company Limited

发明人： Ming-Chieh Hsu ,  Yung-Long Chen ,  Fang-Pin Chiang ,  Feng-An Yang ,  Ching-Jung Hsu ,  Chi-Tung Lai

IPC分类号： H01L21/67 ,  H01L21/306

CPC分类号： H01L21/67017 ,  H01L21/306

摘要： A chemical dispensing system is capable of simultaneously supplying a semiconductor processing chemical for production and testing through the use of independent chemical supply lines, which reduces production downtime of an associated semiconductor process, increases throughput and capability of the semiconductor process, and/or the like. Moreover, the capability to simultaneously supply the semiconductor processing chemical for production and testing allows for an increased quantity of semiconductor processing chemical batches to be tested with minimal impact to production, which increases quality control over the semiconductor processing chemical. In addition, the independent chemical supply lines may be used to supply the semiconductor processing chemical to production while independently filtering semiconductor processing chemical directly from a storage drum through a filtration loop.