公开(公告)号：US20100206845A1

公开(公告)日：2010-08-19

申请号：US12397447

申请日：2009-03-04

申请人： Takahisa Hashimoto ,  Hideki Kihara ,  Muneo Furuse

发明人： Takahisa Hashimoto ,  Hideki Kihara ,  Muneo Furuse

IPC分类号： H01L21/465 ,  C23C16/00 ,  C23C16/50

CPC分类号： H01L21/67069 ,  H01J37/3244 ,  H01J37/32449 ,  H01L21/67017

摘要： The invention provides a plasma processing apparatus and a method for purging the apparatus, capable of preventing damage of components caused by pressure difference during purging operation of a vacuum reactor, and capable of preventing residual processing gas from remaining in the vacuum reactor. Inert gas is introduced through an inert gas feed port 233 on a side wall of a depressurized processing chamber (V1) 226 of a plasma processing apparatus, and the interior of the processing chamber (V1) 226 is brought to predetermined pressure by the inert gas, and thereafter, the inert gas is supplied to processing gas supply paths 213 and 216 (V2) communicated to a plurality of through holes 224 for introducing processing gas, so as to introduce the inert gas through the plurality of through holes 224 into the processing chamber (V1) 226.

摘要翻译： 本发明提供一种等离子体处理装置和一种清洗装置的方法，能够防止在真空反应器的净化操作期间由压力差引起的部件的损坏，并且能够防止残留的处理气体残留在真空反应器中。 惰性气体通过等离子体处理装置的减压处理室（V1）226的侧壁上的惰性气体供给口233引入，处理室（V1）226的内部被惰性气体 然后将惰性气体供给到与多个用于引入处理气体的通孔224连通的处理气体供给路径213,216（V2），以将惰性气体通过多个通孔224引入到处理 室（V1）226。

公开(公告)号：US08197704B2

公开(公告)日：2012-06-12

申请号：US12397447

申请日：2009-03-04

申请人： Takahisa Hashimoto ,  Hideki Kihara ,  Muneo Furuse

发明人： Takahisa Hashimoto ,  Hideki Kihara ,  Muneo Furuse

IPC分类号： C03C15/00

CPC分类号： H01L21/67069 ,  H01J37/3244 ,  H01J37/32449 ,  H01L21/67017

摘要： The invention provides a plasma processing apparatus and a method for purging the apparatus, capable of preventing damage of components caused by pressure difference during purging operation of a vacuum reactor, and capable of preventing residual processing gas from remaining in the vacuum reactor. Inert gas is introduced through an inert gas feed port 233 on a side wall of a depressurized processing chamber (V1) 226 of a plasma processing apparatus, and the interior of the processing chamber (V1) 226 is brought to predetermined pressure by the inert gas, and thereafter, the inert gas is supplied to processing gas supply paths 213 and 216 (V2) communicated to a plurality of through holes 224 for introducing processing gas, so as to introduce the inert gas through the plurality of through holes 224 into the processing chamber (V1) 226.

摘要翻译： 本发明提供一种等离子体处理装置和一种清洗装置的方法，能够防止在真空反应器的净化操作期间由压力差引起的部件的损坏，并且能够防止残留的处理气体残留在真空反应器中。 惰性气体通过等离子体处理装置的减压处理室（V1）226的侧壁上的惰性气体供给口233引入，处理室（V1）226的内部被惰性气体 然后将惰性气体供给到与多个用于引入处理气体的通孔224连通的处理气体供给路径213,216（V2），以将惰性气体通过多个通孔224引入到处理 室（V1）226。

公开(公告)号：US08612082B2

公开(公告)日：2013-12-17

申请号：US13812729

申请日：2011-06-29

申请人： Takahisa Hashimoto ,  Yoshitaka Kinoshita

发明人： Takahisa Hashimoto ,  Yoshitaka Kinoshita

IPC分类号： B60L9/00

CPC分类号： B60L11/1861 ,  G01C21/3469 ,  G01C21/3476 ,  G09B29/007

摘要： Information providing device has: travelling route searching section searching for a travelling route; and power consumption amount calculating section calculating a total power consumption amount. The power consumption amount calculating section has: first calculating section that refers to travel information correlated with a first unit area that belongs to the searched travelling route and calculates each first power consumption amount consumed to travel in the first unit area; second calculating section that refers to weather information forecasted for each second unit area that belongs to the searched travelling route, predicts setting temperature of an air conditioner and calculates each second power consumption amount consumed when the air conditioner into which the predicted setting temperature is inputted is operated during the travel in the second unit area; and totalizing section that calculates the total power consumption amount on the basis of the first and second power consumption amounts.

摘要翻译： 信息提供装置具有：行驶路线搜索部，搜索行驶路线; 和功耗量计算部分，计算总功耗量。 所述电力消耗量计算部具有：第一计算部，其涉及与属于所述搜索行驶路线的第一单位区域相关联的行驶信息，并计算在所述第一单位区域中行驶消耗的所述第一消耗电力量; 第二计算部，涉及对属于所搜索的行进路线的每个第二单位区域预测的天气信息，预测空调的设定温度，并且计算当输入预测设定温度的空调器消耗的每个第二功耗量为 在第二单位地区旅行期间经营; 以及基于第一和第二功耗量计算总功耗量的累计部分。

公开(公告)号：US20130131892A1

公开(公告)日：2013-05-23

申请号：US13812729

申请日：2011-06-29

申请人： Takahisa Hashimoto ,  Yoshitaka Kinoshita

发明人： Takahisa Hashimoto ,  Yoshitaka Kinoshita

IPC分类号： B60L11/18

CPC分类号： B60L11/1861 ,  G01C21/3469 ,  G01C21/3476 ,  G09B29/007

摘要： Information providing device has: travelling route searching section searching for a travelling route; and power consumption amount calculating section calculating a total power consumption amount. The power consumption amount calculating section has: first calculating section that refers to travel information correlated with a first unit area that belongs to the searched travelling route and calculates each first power consumption amount consumed to travel in the first unit area; second calculating section that refers to weather information forecasted for each second unit area that belongs to the searched travelling route, predicts setting temperature of an air conditioner and calculates each second power consumption amount consumed when the air conditioner into which the predicted setting temperature is inputted is operated during the travel in the second unit area; and totalizing section that calculates the total power consumption amount on the basis of the first and second power consumption amounts.

摘要翻译： 信息提供装置具有：行驶路线搜索部，搜索行驶路线; 和功耗量计算部分，计算总功耗量。 所述电力消耗量计算部具有：第一计算部，其涉及与属于所述搜索行驶路线的第一单位区域相关联的行驶信息，并计算在所述第一单位区域中行驶消耗的所述第一消耗电力量; 第二计算部，涉及对属于所搜索的行进路线的每个第二单位区域预测的天气信息，预测空调的设定温度，并且计算当输入预测设定温度的空调器消耗的每个第二功耗量为 在第二单位地区旅行期间经营; 以及基于第一和第二功耗量计算总功耗量的累计部分。