公开(公告)号：US20100281976A1

公开(公告)日：2010-11-11

申请号：US12863639

申请日：2008-11-26

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosNθ, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

摘要翻译： 振动陀螺仪包括环形振动体（11），柔性地支撑主体（11）并具有固定端的腿部（15），固定电位电极（16）和多个电极（13a-13d） 其中压电薄膜夹在上下金属薄膜的厚度方向上。 当N为2以上的自然数时，多个电极（13a-13d）包括用于主要振动的驱动电极（13a），其以cosN＆amp;θ的振动模式分别设置（360 / N）° 第一检测电极（13b）和第二检测电极（13d），用于检测当对体（11）施加角速度时产生的二次振动，所述二次振动分别设置在与 驱动电极（13a）每个电极也设置在主体（11）的某个区域中。

公开(公告)号：US08601872B2

公开(公告)日：2013-12-10

申请号：US12934620

申请日：2009-02-20

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56 ,  H01L41/08 ,  H01L41/047

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

摘要翻译： 根据本发明的振动陀螺仪包括具有均匀平面的环形振动体11，柔性地支撑环形振动体并具有固定端的腿部15，固定电位电极16和多个电极13a ，13b，。 。 。 ，13h，在其上方具有夹在上层金属膜和下层金属膜之间的压电膜的厚度方向。 在这种情况下，在图1所示的代表例中， 如图1所示，当以cosNθ的振动模式激励环状振动体11的主振动的驱动电极13a中的一个被设定为基准驱动电极时，多个剩余电极13b， 。 。 ，13h处于特定位置。 这种配置允许该振动陀螺仪通过采用包括平面内振动模式的二次振动检测器来检测单轴至三轴角速度。

公开(公告)号：US08375792B2

公开(公告)日：2013-02-19

申请号：US12934005

申请日：2009-02-20

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions. Such disposition allows this vibrating gyroscope to excite a primary vibration in an out-of-plane vibration mode of cos 2θ as well as detect a uniaxial or biaxial angular velocity by adopting a secondary vibration detector in an in-plane vibration mode of cos 3θ.

摘要翻译： 根据本发明的振动陀螺仪包括具有均匀平面的环形振动体11，柔性地支撑环形振动体并具有固定端的腿部15，固定电位电极16和多个电极13a ，13b，。 。 。 ，13f，其在厚度方向上夹在上层金属膜和下层金属膜之间的压电膜在平面上形成。 在这种情况下，在图1所示的代表例中， 如图1所示，当振动模式为cos N＆amp; t s时，激励环状振动体11的主振动的驱动电极13a中的一个; 设置为基准驱动电极，多个剩余电极13b， 。 。 ，13f设置在特定位置。 这种配置允许这种振动陀螺仪在cos 2＆thetas的平面外振动模式下激发主振动; 以及通过采用cos 3的平面内振动模式的二次振动检测器来检测单轴或双轴角速度。

公开(公告)号：US20110041606A1

公开(公告)日：2011-02-24

申请号：US12934620

申请日：2009-02-20

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56 ,  H01L41/08 ,  H01L41/047

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

摘要翻译： 根据本发明的振动陀螺仪包括具有均匀平面的环形振动体11，柔性地支撑环形振动体并具有固定端的腿部15，固定电位电极16和多个电极13a ，13b，。 。 。 ，13h，在其上方具有夹在上层金属膜和下层金属膜之间的压电膜的厚度方向。 在这种情况下，在图1所示的代表例中， 如图1所示，当振动模式为cos N＆amp; t s时，激励环状振动体11的主振动的驱动电极13a中的一个; 设置为基准驱动电极，多个剩余电极13b， 。 。 ，13h处于特定位置。 这种配置允许该振动陀螺仪通过采用包括平面内振动模式的二次振动检测器来检测单轴至三轴角速度。

公开(公告)号：US08381590B2

公开(公告)日：2013-02-26

申请号：US12863639

申请日：2008-11-26

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosNθ, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

摘要翻译： 振动陀螺仪包括环形振动体（11），柔性地支撑主体（11）并具有固定端的腿部（15），固定电位电极（16）和多个电极（13a-13d） 其中压电薄膜夹在上下金属薄膜的厚度方向上。 当N为2以上的自然数时，多个电极（13a-13d）包括用于主要振动的驱动电极（13a），其以cosN＆amp;θ的振动模式分别设置（360 / N）° 第一检测电极（13b）和第二检测电极（13d），用于检测当对体（11）施加角速度时产生的二次振动，所述二次振动分别设置在与 驱动电极（13a）每个电极也设置在主体（11）的某个区域中。

公开(公告)号：US20110023601A1

公开(公告)日：2011-02-03

申请号：US12934005

申请日：2009-02-20

申请人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

发明人： Takashi Ikeda ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Mitsuhiko Takemura ,  Tsuyoshi Fujimura ,  Ryuta Araki ,  Takafumi Moriguchi ,  Nobutaka Teshima ,  Yasuyuki Hirata

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions. Such disposition allows this vibrating gyroscope to excite a primary vibration in an out-of-plane vibration mode of cos 2θ as well as detect a uniaxial or biaxial angular velocity by adopting a secondary vibration detector in an in-plane vibration mode of cos 3θ.

摘要翻译： 根据本发明的振动陀螺仪包括具有均匀平面的环形振动体11，柔性地支撑环形振动体并具有固定端的腿部15，固定电位电极16和多个电极13a ，13b，。 。 。 ，13f，其在厚度方向上夹在上层金属膜和下层金属膜之间的压电膜在平面上形成。 在这种情况下，在图1所示的代表例中， 如图1所示，当振动模式为cos N＆amp; t s时，激励环状振动体11的主振动的驱动电极13a中的一个; 设置为基准驱动电极，多个剩余电极13b， 。 。 ，13f设置在特定位置。 这种配置允许这种振动陀螺仪在cos 2＆thetas的平面外振动模式下激发主振动; 以及通过采用cos 3的平面内振动模式的二次振动检测器来检测单轴或双轴角速度。

公开(公告)号：US20110308315A1

公开(公告)日：2011-12-22

申请号：US13147280

申请日：2010-01-06

申请人： Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

发明人： Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

IPC分类号： G01P15/08

CPC分类号： G01C19/5677 ,  H01L41/08

摘要： A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

摘要翻译： 具有环形振动体的振动陀螺仪，柔性地支撑环形振动体的腿部，具有夹在上层金属膜和下层金属膜之间的压电膜形成的多个电极 在厚度方向和固定电位电极。 多个电极包括用于激发主振动的驱动电极组，用于检测二次振动的检测电极，以及基于来自检测电极的电压信号抑制二次振动的抑制电极。 驱动电极，检测电极和抑制电极设置在从环形振动体的外周边缘到外周缘附近和/或从其内周边缘到附近的区域中 的内周边缘。

公开(公告)号：US09151612B2

公开(公告)日：2015-10-06

申请号：US13147280

申请日：2010-01-06

申请人： Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

发明人： Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

IPC分类号： G01C19/56 ,  G01C19/5677 ,  H01L41/08

CPC分类号： G01C19/5677 ,  H01L41/08

摘要： A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

摘要翻译： 具有环形振动体的振动陀螺仪，柔性地支撑环形振动体的腿部，具有夹在上层金属膜和下层金属膜之间的压电膜形成的多个电极 在厚度方向和固定电位电极。 多个电极包括用于激发主振动的驱动电极组，用于检测二次振动的检测电极，以及基于来自检测电极的电压信号抑制二次振动的抑制电极。 驱动电极，检测电极和抑制电极设置在从环形振动体的外周边缘到外周缘附近和/或从其内周边缘到附近的区域中 的内周边缘。

公开(公告)号：US20120125100A1

公开(公告)日：2012-05-24

申请号：US13387165

申请日：2010-05-13

申请人： Ryuta Araki ,  Takafumi Moriguchi ,  Takashi Ikeda ,  Hiroshi Nishida ,  Yasuyuki Hirata

发明人： Ryuta Araki ,  Takafumi Moriguchi ,  Takashi Ikeda ,  Hiroshi Nishida ,  Yasuyuki Hirata

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, leg portions 15 flexibly supporting the ring-shaped vibrating body, a plurality of electrodes 13a, 13b, . . . , 13h that are disposed on the plane of or above the ring-shaped vibrating body and are formed with one of an upper-layer metallic film and a lower-layer metallic film, and a piezoelectric film being sandwiched between the upper-layer metallic film and the lower-layer metallic film in a thickness direction thereof. When one of the driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is referred to as a reference driving electrode, the remaining plurality of electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a secondary vibration inclusive of an out-of-plane vibration mode. A voltage for suppressing the secondary vibration is applied to a suppression electrode 13j.

摘要翻译： 根据本发明的振动陀螺仪包括具有均匀平面的环形振动体11，柔性地支撑环形振动体的腿部15，多个电极13a，13b。 。 。 ，13h，其设置在环状振动体的平面上方，形成有上层金属膜和下层金属膜中的一层，压电膜夹在上层金属膜 和下层金属膜的厚度方向。 在振动模式为cos N＆amp; t s的情况下激励环状振动体11的主振动的驱动电极13a之一; 被称为参考驱动电极，剩余的多个电极13b，。 。 。 ，13h处于特定位置。 这种配置允许该振动陀螺仪检测包括平面内振动模式的二次振动。 用于抑制二次振动的电压被施加到抑制电极13j。

公开(公告)号：US07696622B2

公开(公告)日：2010-04-13

申请号：US12147197

申请日：2008-06-26

申请人： Tsuyoshi Takemoto ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Takashi Ikeda ,  Ryuta Araki

发明人： Tsuyoshi Takemoto ,  Hiroshi Nishida ,  Osamu Torayashiki ,  Takashi Ikeda ,  Ryuta Araki

IPC分类号： H01L23/06

CPC分类号： B81B7/0038

摘要： A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.

摘要翻译： 包括形成在密封室内的吸气膜的MEMS装置通过电气稳定吸气膜来提供MEMS装置的稳定性能。 MEMS器件包括形成在密封室内部的可移动部分和固定部分。 密封室由MEMS装置的基材和玻璃基板形成，并具有在其中制成的空腔和空腔。 形成在密封室内的任何连续的吸气剂膜的一部分仅通过MEMS装置的基底材料连接固定部分的任何一个或多个预定电位中的一个以及固定部分的接地电位。