公开(公告)号：US20070199377A1

公开(公告)日：2007-08-30

申请号：US11653344

申请日：2007-01-16

申请人： Takashi Katsumata ,  Takeshi Ito ,  Hirofumi Higuchi ,  Mitsuhito Ogino ,  Tetsuya Morishima

发明人： Takashi Katsumata ,  Takeshi Ito ,  Hirofumi Higuchi ,  Mitsuhito Ogino ,  Tetsuya Morishima

IPC分类号： G01P15/125

CPC分类号： G01C19/5719

摘要： An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

摘要翻译： 角速度传感器包括第一振动器和第二振动器，该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个，交流电压之一或第一和第二驱动电压的占空比中的一个，使得第一振动器与第二振动器相反地振动。