公开(公告)号：US20050160552A1

公开(公告)日：2005-07-28

申请号：US10855340

申请日：2004-05-28

申请人： Takashi Yoshida ,  Osayasu Kikuchi ,  Motoaki Iwasaki ,  Kurao Habaya ,  Tatsuro Yano ,  Takahiro Shiroma

发明人： Takashi Yoshida ,  Osayasu Kikuchi ,  Motoaki Iwasaki ,  Kurao Habaya ,  Tatsuro Yano ,  Takahiro Shiroma

IPC分类号： G11B5/84 ,  A47L5/14 ,  B08B3/00 ,  B08B5/00 ,  B08B5/02 ,  B08B7/00 ,  B08B7/02 ,  B08B7/04 ,  B24C1/00 ,  G11B23/50 ,  H01L21/00 ,  H01L21/304

CPC分类号： H01L21/67051 ,  B08B5/02 ,  B08B7/0021 ,  B08B7/02 ,  B24C1/003

摘要： A cleaning apparatus cleans an object to be cleaned by ejecting a cleaning agent from a nozzle. The cleaning apparatus includes a gas ejecting device for ejecting heated gas to a surface of the object to be cleaned. The gas ejecting device is configured to move to a position above the object to be cleaned when cleaning is performed, and retract from the object to be cleaned when cleaning is not performed. An ejection quantity of the heated gas is controlled when cleaning is performed and when cleaning is not performed.

摘要翻译： 清洁装置通过从喷嘴喷射清洁剂来清洁待清洁的物体。 清洁装置包括用于将加热气体喷射到待清洁物体的表面的气体喷射装置。 气体喷射装置被配置为当执行清洁时移动到待清洁物体上方的位置，并且当不执行清洁时从待清洁物体缩回。 当执行清洁并且不执行清洁时，控制加热气体的喷射量。

公开(公告)号：US06899110B2

公开(公告)日：2005-05-31

申请号：US10177789

申请日：2002-06-20

申请人： Takashi Yoshida ,  Motoaki Iwasaki ,  Tatsuro Yano ,  Kurao Habaya ,  Takahiro Shiroma

发明人： Takashi Yoshida ,  Motoaki Iwasaki ,  Tatsuro Yano ,  Kurao Habaya ,  Takahiro Shiroma

IPC分类号： G02F1/13 ,  B08B3/02 ,  B08B5/02 ,  B08B7/00 ,  B24C1/00 ,  G11B23/50 ,  H01L21/00 ,  H01L21/304 ,  H05F3/06

CPC分类号： B24C3/322 ,  B08B3/02 ,  B08B5/02 ,  B08B7/0092 ,  B24C1/003 ,  G11B23/505 ,  H01L21/67051 ,  Y10S134/902

摘要： The present invention can remove particles such as dust by flowing solvent gas such as CO2 through a line filter and eject it from a nozzle so as to be converted to solid particles or liquid droplets and eject to a workpiece to be cleaned so as to clean particles or organic materials. It is possible to make the solvent to a solid particle or liquid droplet by adjusting a gap between the nozzle and the workpiece to be cleaned; thus, it is possible to select the most preferable state according to the extent of the adhesion of organic material to the workpiece to be cleaned. Also, it is possible to remove particles such dust in the solvent by a line filter; thus, it is not necessary to use highly pure expensive solvent, and it is possible to reduce the running cost of the apparatus.

摘要翻译： 本发明可以通过线路过滤器将诸如CO 2的溶剂气体流过管线过滤器，从喷嘴中除去灰尘等颗粒，并将其从喷嘴中排出，以便转化为固体颗粒或液滴并喷射到工件 以清洁颗粒或有机材料。 可以通过调节喷嘴和要清洁的工件之间的间隙将溶剂制成固体颗粒或液滴; 因此，可以根据有机材料对待清洁工件的粘附程度来选择最优选的状态。 此外，可以通过线路滤波器去除溶剂中的这些灰尘的颗粒; 因此，不需要使用高纯度的昂贵的溶剂，并且可以降低装置的运行成本。