-
1.发明申请公开(公告)号：US20080193880A1
公开(公告)日：2008-08-14
申请号：US11547707
申请日：2005-04-08
申请人： Takeshi Nishibe , Sung Eun Hong , Yusuke Takano , Tetsuo Okayasu
发明人： Takeshi Nishibe , Sung Eun Hong , Yusuke Takano , Tetsuo Okayasu
IPC分类号： G03F7/004
CPC分类号： G03F7/40 , H01L21/0273 , Y10S430/106 , Y10S430/11 , Y10S430/115 , Y10S430/162 , Y10S430/165
摘要： In the present invention, in a water soluble resin composition for use in a method for pattern formation in which a covering layer is provided on a resist pattern formed of a radiation-sensitive resin composition capable of coping with ArF exposure to increase the width of the resist pattern and thus to realize effective formation of higher density trench or hole pattern, the size reduction level of the resist pattern layer can be further increased as compared with that in the prior art technique, and, in addition, the size reduction level dependency of the coarse-and-fine resist pattern can be reduced. A method for pattern formation using the water soluble resin composition is also provided. The water soluble resin composition which is usable for the method for pattern formation applicable to ArF excimer laser irradiation comprises a water soluble resin, an acid generating agent capable of generating an acid upon heating, a surfactant, a crosslinking agent, and a water-containing solvent.
摘要翻译： 在本发明中，在用于图案形成方法的水溶性树脂组合物中，其中在由能够应对ArF曝光的辐射敏感性树脂组合物形成的抗蚀剂图案上设置覆盖层以增加其宽度 抗蚀剂图案，从而实现有效形成更高密度的沟槽或孔图案，与现有技术相比，抗蚀剂图案层的尺寸减小水平可以进一步提高，另外，尺寸缩小级依赖性 可以减少粗细和抗蚀剂图案。 还提供了使用水溶性树脂组合物的图案形成方法。 可用于适用于ArF准分子激光照射的图案形成方法的水溶性树脂组合物包括水溶性树脂，加热时能产生酸的酸产生剂，表面活性剂，交联剂和含水的 溶剂。
-
2.发明授权公开(公告)号：US07745093B2
公开(公告)日：2010-06-29
申请号：US11547707
申请日：2005-04-08
申请人： Takeshi Nishibe , Sung Eun Hong , Yusuke Takano , Tetsuo Okayasu
发明人： Takeshi Nishibe , Sung Eun Hong , Yusuke Takano , Tetsuo Okayasu
CPC分类号： G03F7/40 , H01L21/0273 , Y10S430/106 , Y10S430/11 , Y10S430/115 , Y10S430/162 , Y10S430/165
摘要： In the present invention, in a water soluble resin composition for use in a method for pattern formation in which a covering layer is provided on a resist pattern formed of a radiation-sensitive resin composition capable of coping with ArF exposure to increase the width of the resist pattern and thus to realize effective formation of higher density trench or hole pattern, the size reduction level of the resist pattern layer can be further increased as compared with that in the prior art technique, and, in addition, the size reduction level dependency of the coarse-and-fine resist pattern can be reduced. A method for pattern formation using the water soluble resin composition is also provided. The water soluble resin composition which is usable for the method for pattern formation applicable to ArF excimer laser irradiation comprises a water soluble resin, an acid generating agent capable of generating an acid upon heating, a surfactant, a crosslinking agent, and a water-containing solvent.
摘要翻译： 在本发明中，在用于图案形成方法的水溶性树脂组合物中，其中在由能够应对ArF曝光的辐射敏感性树脂组合物形成的抗蚀剂图案上设置覆盖层以增加其宽度 抗蚀剂图案，从而实现有效形成更高密度的沟槽或孔图案，与现有技术相比，抗蚀剂图案层的尺寸减小水平可以进一步提高，另外，尺寸缩小级依赖性 可以减少粗细和抗蚀剂图案。 还提供了使用水溶性树脂组合物的图案形成方法。 可用于适用于ArF准分子激光照射的图案形成方法的水溶性树脂组合物包括水溶性树脂，加热时能产生酸的酸产生剂，表面活性剂，交联剂和含水的 溶剂。
-
公开(公告)号：US08274624B2
公开(公告)日：2012-09-25
申请号：US12602604
申请日：2008-05-27
IPC分类号： G02F1/1335
CPC分类号： G02F1/133528 , G02B5/3083 , G02B27/28 , G02F1/133634 , G02F2001/133531 , G02F2001/133607 , G02F2201/50 , G02F2202/40 , G02F2413/02 , G02F2413/07 , G02F2413/11 , G02F2413/12
摘要： The present invention provides a liquid crystal panel that can provide a neutral display that is free from coloring in every direction. The liquid crystal panel includes a first polarizer 14a, a second polarizer 14b, and a liquid crystal cell 13. The first polarizer 14a is arranged on the visible side of the liquid crystal cell 13 and the second polarizer 14b is arranged on the backlight side of the liquid crystal cell 13. The liquid crystal panel further includes a first retardation layer 11 and a second retardation layer 12. A refractive index ellipsoid of the first retardation layer 11 has a relationship of nx=ny>nz, and a refractive index ellipsoid of the second retardation layer 12 has a relationship of nx>ny≧nz. The first retardation layer 11 and the second retardation layer 12 are arranged between the liquid crystal cell 13 and the second polarizer 14b.
摘要翻译： 本发明提供一种能够提供在各个方向上不着色的中性显示器的液晶面板。 液晶面板包括第一偏振片14a，第二偏振片14b和液晶单元13.第一偏振片14a配置在液晶单元13的可视侧，第二偏振片14b配置在 液晶面板还包括第一延迟层11和第二延迟层12.第一延迟层11的折射率椭圆体的关系为nx = ny> nz，折射率椭圆体的折射率椭圆体 第二延迟层12具有nx>ny≥nz的关系。 第一延迟层11和第二延迟层12布置在液晶单元13和第二偏振器14b之间。
-
公开(公告)号：US20100165264A1
公开(公告)日：2010-07-01
申请号：US12602604
申请日：2008-05-27
IPC分类号： G02F1/13363
CPC分类号： G02F1/133528 , G02B5/3083 , G02B27/28 , G02F1/133634 , G02F2001/133531 , G02F2001/133607 , G02F2201/50 , G02F2202/40 , G02F2413/02 , G02F2413/07 , G02F2413/11 , G02F2413/12
摘要： The present invention provides a liquid crystal panel that can provide a neutral display that is free from coloring in every direction. The liquid crystal panel includes a first polarizer 14a, a second polarizer 14b, and a liquid crystal cell 13. The first polarizer 14a is arranged on the visible side of the liquid crystal cell 13 and the second polarizer 14b is arranged on the backlight side of the liquid crystal cell 13. The liquid crystal panel further includes a first retardation layer 11 and a second retardation layer 12. A refractive index ellipsoid of the first retardation layer 11 has a relationship of nx=ny>nz, and a refractive index ellipsoid of the second retardation layer 12 has a relationship of nx>ny≧nz. The first retardation layer 11 and the second retardation layer 12 are arranged between the liquid crystal cell 13 and the second polarizer 14b.
摘要翻译： 本发明提供一种能够提供在各个方向上不着色的中性显示器的液晶面板。 液晶面板包括第一偏振片14a，第二偏振片14b和液晶单元13.第一偏振片14a配置在液晶单元13的可视侧，第二偏振片14b配置在 液晶面板还包括第一延迟层11和第二延迟层12.第一延迟层11的折射率椭圆体的关系为nx = ny> nz，折射率椭圆体的折射率椭圆体 第二延迟层12具有nx>ny≥nz的关系。 第一延迟层11和第二延迟层12布置在液晶单元13和第二偏振器14b之间。
-
-
-
搜索结果
4 条记录 (耗时 0.022 秒)
