公开(公告)号：US06295866B1

公开(公告)日：2001-10-02

申请号：US09383990

申请日：1999-08-26

申请人： Takeshi Yamamoto ,  Takenori Akaike

发明人： Takeshi Yamamoto ,  Takenori Akaike

IPC分类号： G01B728

CPC分类号： G01B3/008 ,  G01B7/28 ,  G01B7/34

摘要： A surface-tracking measuring machine is provided, in which measurement range is enlarged while keeping a measuring force, responsivity, resolution thereof. For the object, the surface-tracking measuring machine has a frame (10), a probe (11) swingably supported by the frame (10) and having a tracer (15) at an end thereof, a measuring force controller (21) for controlling the measuring force applied to the probe, a displacement detector (31) for detecting a displacement of the probe, a measuring force detector (41) for detecting the measuring force applied to the probe, and a controller (51) for comparing a measuring force detected value detected by the measuring force detector and a previously commanded measuring force command value and to control the measuring force controller so that the measuring force detected value is equal to the measuring force command value.

摘要翻译： 提供了一种表面跟踪测量机，其中测量范围被放大，同时保持测量力，响应度，分辨率。 对于该目的，表面跟踪测量机具有框架（10），由框架（10）可摆动地支撑并在其端部具有示踪器（15）的探头（11），用于 控制施加在探头上的测量力;检测探针位移检测器;测量力检测器，用于检测施加在探头上的测量力;以及控制器， 由测量力检测器检测到的力检测值和先前指示的测量力指令值，并且控制测量力控制器，使得测量力检测值等于测量力指令值。

公开(公告)号：US07076883B2

公开(公告)日：2006-07-18

申请号：US10898830

申请日：2004-07-26

申请人： Takeshi Yamamoto ,  Takenori Akaike ,  Katsuhiko Mieda

发明人： Takeshi Yamamoto ,  Takenori Akaike ,  Katsuhiko Mieda

IPC分类号： G01B5/00

CPC分类号： G01B3/008 ,  F16F7/10 ,  F16F2230/0052 ,  G01B5/012 ,  G01B21/045

摘要： A scanning probe (1, 10) according to the present invention includes a measurement stylus (stylus) (6) movably supported via elastic members (5D, 5E, 5F) on a probe body (4), fine feeders (3, 7) for moving the probe body (4) and the measurement stylus (6) against a workpiece within a fine range, a contacting force detector (5G) for detecting a contacting force between the measurement stylus (6) and a surface of the workpiece, and a contacting force adjuster (8) for adjusting the contacting force by removing the inertial force acting to the measurement stylus (6) because of acceleration from the contacting force. Because of this feature, a measuring force can be adjusted by providing feedback controls to the fine feeders (3, 7), so that the tracking capability is ensured to provide a high response rate and high precision in measurement. Further by eliminating influence of the inertial force of the measurement stylus (6), a measurement error is corrected to obtain a correct measuring force, and high precision measurement can be executed.

摘要翻译： 根据本发明的扫描探针（1,10）包括通过探针体（4）上的弹性构件（5D，5E，5F）可移动地支撑的测量笔（触笔），精细馈线（3） ，7），用于将探针体（4）和测量笔（6）移动到精细范围内的工件;接触力检测器（5G），用于检测测量笔（6）与测量笔 工件以及接触力调节器（8），用于通过从接触力的加速度去除作用于测量触针（6）的惯性力来调节接触力。 由于该特征，通过向精细进给器（3,7）提供反馈控制，可以调节测量力，从而确保跟踪能力，以提供高响应率和高精度的测量。 此外，通过消除测量笔（6）的惯性力的影响，校正测量误差以获得正确的测量力，并且可以执行高精度测量。

公开(公告)号：US20050022409A1

公开(公告)日：2005-02-03

申请号：US10898830

申请日：2004-07-26

申请人： Takeshi Yamamoto ,  Takenori Akaike ,  Katsuhiko Mieda

发明人： Takeshi Yamamoto ,  Takenori Akaike ,  Katsuhiko Mieda

IPC分类号： G01B5/20 ,  F16F7/10 ,  G01B3/00 ,  G01B5/012 ,  G01B21/04 ,  G01B5/00

CPC分类号： G01B3/008 ,  F16F7/10 ,  F16F2230/0052 ,  G01B5/012 ,  G01B21/045

摘要： A scanning probe (1, 10) according to the present invention includes a measurement stylus (stylus) (6) movably supported via elastic members (5D, 5E, 5F) on a probe body (4), fine feeders (3, 7) for moving the probe body (4) and the measurement stylus (6) against a workpiece within a fine range, a contacting force detector (5G) for detecting a contacting force between the measurement stylus (6) and a surface of the workpiece, and a contacting force adjuster (8) for adjusting the contacting force by removing the inertial force acting to the measurement stylus (6) because of acceleration from the contacting force. Because of this feature, a measuring force can be adjusted by providing feedback controls to the fine feeders (3, 7), so that the tracking capability is ensured to provide a high response rate and high precision in measurement. Further by eliminating influence of the inertial force of the measurement stylus (6), a measurement error is corrected to obtain a correct measuring force, and high precision measurement can be executed.

摘要翻译： 根据本发明的扫描探针（1,10）包括通过探针主体（4）上的弹性构件（5D，5E，5F）可移动地支撑的测量触针（触笔），精细馈线（3,7） 用于将探针体（4）和测量笔（6）移动到精细范围内的工件;用于检测测量笔（6）与工件表面之间的接触力的接触力检测器（5G），以及 接触力调节器（8），用于通过从接触力的加速度去除作用于测量触针（6）的惯性力来调节接触力。 由于该特征，通过向精细进给器（3,7）提供反馈控制，可以调节测量力，从而确保跟踪能力，以提供高响应率和高精度的测量。 此外，通过消除测量笔（6）的惯性力的影响，校正测量误差以获得正确的测量力，并且可以执行高精度测量。