摘要:
To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.
摘要:
To provide a microscope system capable of automatically detecting a position of a focus of an optical system relative to an observing object. A light emitted from a laser light source is irradiated on an observing object, and the light reflected by the observing object is guided to a light receiving element. An evaluation value based on a plurality of pixel data is set so as to be smaller than an output upper limit value Emax and greater than a multiplication value En1 of a noise level. The evaluation value is calculated with the set gain while moving the objective lens in an upward direction from a current position zs1. The gain is reduced by a constant amount every time the evaluation value reaches the output upper limit value Emax. The position in the Z direction of the objective lens when the evaluation value becomes a peak is detected.
摘要:
To provide a microscope system capable of automatically detecting a position of a focus of an optical system relative to an observing object. A light emitted from a laser light source is irradiated on an observing object, and the light reflected by the observing object is guided to a light receiving element. An evaluation value based on a plurality of pixel data is set so as to be smaller than an output upper limit value Emax and greater than a multiplication value En1 of a noise level. The evaluation value is calculated with the set gain while moving the objective lens in an upward direction from a current position zs1. The gain is reduced by a constant amount every time the evaluation value reaches the output upper limit value Emax. The position in the Z direction of the objective lens when the evaluation value becomes a peak is detected.
摘要:
To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.