Microscope system, surface state observing method, and surface state observing program
    1.
    发明授权
    Microscope system, surface state observing method, and surface state observing program 有权
    显微镜系统,表面状态观察方法和表面状态观测程序

    公开(公告)号:US08994808B2

    公开(公告)日:2015-03-31

    申请号:US13346304

    申请日:2012-01-09

    IPC分类号: H04N7/18 G02B21/36

    CPC分类号: G02B21/365

    摘要: To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.

    摘要翻译: 提供使用户能够在短时间内精确地观察观察目标表面的显微镜系统。 设置用于调整与多个像素对应的像素数据的值的灵敏度参数。 以设置为灵敏度参数的第一灵敏度值获取像素数据,并且检测像素数据的峰值小于或等于阈值的像素数量。 计算检测到的像素数相对于像素总数的区域的比例,其中当比率大于或等于参考值时,通过与第一灵敏度值不同的第二灵敏度值来获取像素数据, 并且当比值小于参考值时,不由第二灵敏度值获取像素数据。

    Microscope system, focus position detection method, and focus position detection program
    2.
    发明授权
    Microscope system, focus position detection method, and focus position detection program 有权
    显微镜系统,焦点位置检测方法和对焦位置检测程序

    公开(公告)号:US09140887B2

    公开(公告)日:2015-09-22

    申请号:US13346056

    申请日:2012-01-09

    申请人: Takuya Karube

    发明人: Takuya Karube

    IPC分类号: G02B21/00 G02B7/04 G02B21/24

    摘要: To provide a microscope system capable of automatically detecting a position of a focus of an optical system relative to an observing object. A light emitted from a laser light source is irradiated on an observing object, and the light reflected by the observing object is guided to a light receiving element. An evaluation value based on a plurality of pixel data is set so as to be smaller than an output upper limit value Emax and greater than a multiplication value En1 of a noise level. The evaluation value is calculated with the set gain while moving the objective lens in an upward direction from a current position zs1. The gain is reduced by a constant amount every time the evaluation value reaches the output upper limit value Emax. The position in the Z direction of the objective lens when the evaluation value becomes a peak is detected.

    摘要翻译: 提供能够自动检测光学系统相对于观察对象的焦点的位置的显微镜系统。 从激光源射出的光被照射在观察对象上,被观察对象反射的光被引导到受光元件。 基于多个像素数据的评估值被设定为小于输出上限值Emax并且大于噪声电平的乘法值En1。 在从当前位置zs1向上方移动物镜时,利用设定的增益计算评价值。 每当评估值达到输出上限值Emax时,增益减小恒定量。 当评估值变为峰值时,检测物镜在Z方向上的位置。

    Microscope System, Focus Position Detection Method, And Focus Position Detection Program
    3.
    发明申请
    Microscope System, Focus Position Detection Method, And Focus Position Detection Program 有权
    显微镜系统,聚焦位置检测方法和聚焦位置检测程序

    公开(公告)号:US20120188359A1

    公开(公告)日:2012-07-26

    申请号:US13346056

    申请日:2012-01-09

    申请人: Takuya Karube

    发明人: Takuya Karube

    IPC分类号: H04N7/18

    摘要: To provide a microscope system capable of automatically detecting a position of a focus of an optical system relative to an observing object. A light emitted from a laser light source is irradiated on an observing object, and the light reflected by the observing object is guided to a light receiving element. An evaluation value based on a plurality of pixel data is set so as to be smaller than an output upper limit value Emax and greater than a multiplication value En1 of a noise level. The evaluation value is calculated with the set gain while moving the objective lens in an upward direction from a current position zs1. The gain is reduced by a constant amount every time the evaluation value reaches the output upper limit value Emax. The position in the Z direction of the objective lens when the evaluation value becomes a peak is detected.

    摘要翻译: 提供能够自动检测光学系统相对于观察对象的焦点的位置的显微镜系统。 从激光源射出的光被照射在观察对象上,被观察对象反射的光被引导到受光元件。 基于多个像素数据的评估值被设定为小于输出上限值Emax并且大于噪声电平的乘法值En1。 在从当前位置zs1向上方移动物镜时,利用设定的增益计算评价值。 每当评估值达到输出上限值Emax时,增益减小恒定量。 当评估值变为峰值时,检测物镜在Z方向上的位置。

    Microscope System, Surface State Observing Method, And Surface State Observing Program
    4.
    发明申请
    Microscope System, Surface State Observing Method, And Surface State Observing Program 有权
    显微镜系统,表面状态观测方法和表面状态观测程序

    公开(公告)号:US20120188360A1

    公开(公告)日:2012-07-26

    申请号:US13346304

    申请日:2012-01-09

    IPC分类号: H04N7/18

    CPC分类号: G02B21/365

    摘要: To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.

    摘要翻译: 提供使用户能够在短时间内精确地观察观察目标表面的显微镜系统。 设置用于调整与多个像素对应的像素数据的值的灵敏度参数。 以设置为灵敏度参数的第一灵敏度值获取像素数据,并且检测像素数据的峰值小于或等于阈值的像素数量。 计算检测到的像素数相对于像素总数的区域的比例,其中当比率大于或等于参考值时,通过与第一灵敏度值不同的第二灵敏度值来获取像素数据, 并且当比值小于参考值时,不由第二灵敏度值获取像素数据。