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公开(公告)号：US20240329381A1
公开(公告)日：2024-10-03
申请号：US18295206
申请日：2023-04-03
发明人： Shiou-jyh Ja
CPC分类号： G02B21/362 , G02B21/16 , G02B21/18 , G02B21/244 , G02B21/367 , G06T7/0002 , G06T7/80 , H04N17/002 , G06T2207/10056 , G06T2207/10148 , G06T2207/30168
摘要： Methods and systems are provided for a microscope system. In one example, a method for image-based detection of optical alignment for the microscope system comprises acquiring a plurality of contrast samples of a field of view of a subject, determining a contrast distribution for a plurality of divided sub-regions for the field of view based on the plurality of contrast samples, and generating an amount of angular discrepancy based on an in-focus position derived from the contrast distribution for each of the plurality of divided sub-regions. In one example, the method further comprises adjusting the microscope system based on the amount of angular discrepancy.
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公开(公告)号：US12013525B2
公开(公告)日：2024-06-18
申请号：US17574590
申请日：2022-01-13
申请人： Keyence Corporation
发明人： Shingo Matsumura , Suguru Sekiya
CPC分类号： G02B21/367 , G02B21/025 , G02B21/244 , G02B21/245 , G02B21/26 , G02B21/368 , H04N23/635 , H04N23/67
摘要： A magnified observation apparatus includes an FOV changer, an in-focus degree evaluator, and a focus sequence executor. The in-focus degree evaluator calculates in-focus degree feature quantities, which represent in-focus degrees of image data corresponding to images to be displayed by a display controller on a display. The focus sequence executor executes an FOV-moving focus sequence in which a focusing device adjusts a relative distance between a focus position of the objective lens and an observation object in accordance with in-focus degree feature quantities of image data that are successively calculated by the in-focus degree evaluator corresponding to images of the observation object that are captured during movement of an observation FOV by the FOV changer so that a live image of the observation object is displayed on the display based on image data that is obtained during the movement of an observation FOV by the display controller.
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公开(公告)号：US11947185B2
公开(公告)日：2024-04-02
申请号：US17521230
申请日：2021-11-08
申请人： Carl Zeiss SMT GmbH
发明人： Dirk Seidel
CPC分类号： G02B7/28 , G02B21/244 , G03F1/70 , G03F9/7026 , H04N23/671
摘要： The invention relates to an autofocusing method for an imaging device (for semiconductor lithography) comprising an imaging optical unit, an object to be measured and an autofocusing device having a reflective illumination, comprising the following method steps:
a) defining at least three basis measurement points M(xj, yj) on a surface of the object,
b) determining the deviation Az(M)j of a nominal position of the surface of the object from the focal plane of the autofocusing device at the defined basis measurement points M(xj, yj),
c) storing the deviations Az(M)j from at least three basis measurement points M(xj, yj),
d) using the stored deviation Az(M)j for determining a deviation Az(P)k at an arbitrary point P(xk, Yk) of the surface, and
e) using the deviation Az(P)k for focusing onto the point P(xk, Yk).-
公开(公告)号：US20240064400A1
公开(公告)日：2024-02-22
申请号：US18500231
申请日：2023-11-02
发明人： Allen H. OLSON , Yunlu ZOU , Bharat ANNALDAS , Leng-Chun CHEN
CPC分类号： H04N23/67 , G02B21/002 , G02B21/244 , G02B21/367 , H04N3/06 , H04N23/90 , H04N23/56
摘要： Real-time focusing in a slide-scanning system. In an embodiment, focus points are added to 500 an initialized focus map while acquiring a plurality of image stripes of a sample on a glass slide. For each image stripe, a plurality of frames, collectively representing the image stripe, may be acquired using both an imaging line-scan camera and a tilted focusing line-scan camera. Focus points, representing positions of best focus for trusted frames, are added to the focus map. Outlying focus points are removed from the focus map. In some cases, one or more image stripes may be reacquired. Finally, the image stripes are assembled into a composite image of the sample.
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5.发明公开公开(公告)号：US20230359012A1
公开(公告)日：2023-11-09
申请号：US18042624
申请日：2021-08-19
发明人： Roger SPINK
CPC分类号： G02B21/244 , H04N23/675 , H04N23/13
摘要： An embodiment of an autofocus system (100, 400) is configured to receive a first signal (102a, 402a) corresponding to a first wavelength range and to receive a second signal (102b, 402b) corresponding to a second wavelength range. The autofocus system (100, 400) is further con-5 figured to determine an output signal (106, 406) comprising a focus setting information using the first signal (102a, 402a) and the second signal (102b, 402b).
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6.发明公开公开(公告)号：US20230185071A1
公开(公告)日：2023-06-15
申请号：US18074553
申请日：2022-12-05
发明人： Marcus SCHECHTER , Tobias HESSLER
CPC分类号： G02B21/244 , G01N21/6458 , G02B7/36 , H04N23/50 , H04N23/67 , H04N23/667
摘要： A method for controlling microscopic imaging of a microscope includes providing a microscope control arrangement configured for receiving a focusing request and for receiving sample information on a sample to be imaged, wherein the microscope control arrangement activates, upon receipt of a focusing request and after having received the sample information, a predefined focusing setting depending on the sample information received for controlling focusing of the microscope for microscopic imaging of the sample.
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公开(公告)号：US20190208108A1
公开(公告)日：2019-07-04
申请号：US15562556
申请日：2017-08-25
发明人： Nadav GUTMAN , Boris GOLOVANEVSKY , Noam GLUZER
CPC分类号： H04N5/23212 , G02B21/0016 , G02B21/244 , G02B21/245 , G02B21/36 , G03B13/36 , G03F7/20 , G03F7/70641
摘要： Focusing methods and modules are provided for metrology tools and systems. Methods comprise capturing image(s) of at least two layers of a ROI in an imaging target, binning the captured image(s), deriving a focus shift from the binned captured image(s) by comparing the layers, and calculating a focus position from the derived focus shift. Disclosed methods are direct, may be carried out in parallel to a part of the overlay measurement process and provide fast and simple focus measurements that improve metrology performance.
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公开(公告)号：US20190101739A1
公开(公告)日：2019-04-04
申请号：US16147465
申请日：2018-09-28
发明人： Leng-Chun CHEN , Allen OLSON , Yunlu ZOU , Peyman NAJMABADI , Greg CRANDALL
CPC分类号： G02B21/244 , G02B21/006 , G02B21/0076 , G02B21/008 , G06T7/50 , G06T2207/10061 , G06T2207/10064 , H04N5/37206
摘要： Real-time autofocus. In an embodiment, a scanning apparatus includes an imaging sensor, a focusing sensor, an objective lens, and processor(s) configured to analyze image data captured by the imaging and focusing sensors, and move the objective lens. Real-time autofocus during scanning of a sample is achieved by determining a true-Z value for the objective lens for a point on a sample and for each of a plurality of regions on the sample. The true-Z values and/or surfaces calculated therefrom are used to determine a predicted-Z value for an unscanned region of the sample. The objective lens is adjusted to the predicted-Z value at the beginning of the unscanned region. After scanning the region, a true-Z value is determined for the region and compared to the predicted-Z value. A rescan of the region is initiated if the comparison exceeds a predetermined threshold.
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公开(公告)号：US20180188520A1
公开(公告)日：2018-07-05
申请号：US15844419
申请日：2017-12-15
申请人： OLYMPUS CORPORATION
发明人： Toshiyuki HATTORI
CPC分类号： G02B21/367 , G02B21/06 , G02B21/244 , G06K9/00134 , G06K9/3216 , G06T7/0012 , G06T7/50 , G06T11/40 , G06T2207/10056 , G06T2207/10064 , G06T2207/30024 , G06T2210/41
摘要： Provided is a microscope parameter setting method including step of setting a focal point position relative to a specimen, step of adjusting a microscope parameter, step of acquiring an image of the specimen at the set focal point position, step of recognizing the shape of an observation object, steps of displaying the recognized shape of the observation object such that the recognized shape is superimposed on the image, step of determining whether or not the microscope parameter is appropriate, and step of storing the microscope parameter that has been determined to be appropriate, such that the microscope parameter is associated with the focal point position.
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公开(公告)号：US20180027173A1
公开(公告)日：2018-01-25
申请号：US15723788
申请日：2017-10-03
发明人： Michael Zahniser
CPC分类号： H04N5/23212 , G02B21/244 , G06T2207/10148
摘要： The disclosure relates to methods and systems for automatically focusing multiple images of one or more objects on a substrate. The methods include obtaining, by a processor, a representative focal distance for a first location on the substrate based on a set of focal distances at known locations on the substrate. The methods also include acquiring, by an image acquisition device, a set of at least two images of the first location. The images are each acquired using a different focal distance at an offset from the representative focal distance. The methods further include estimating, by a processor, an ideal focal distance corresponding to the first location based on comparing a quality of focus for each of the images, and storing the estimated ideal focal distance and the first location in the set of focal distances at known locations.
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