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公开(公告)号：US10533833B2
公开(公告)日：2020-01-14
申请号：US15309012
申请日：2015-04-27
发明人： Shaojun Xiao
摘要： A method for characterising instrument error in a surface measurement instrument, comprising obtaining first calibration measurement data representing a known surface form of a first reference object and obtaining second calibration measurement data representing a known surface form of a second reference object. At least a portion of the second calibration measurement data represents a measurement range that overlaps with at least a portion of a measurement range of the first calibration measurement data. A common error function is obtained that characterises the instrument error.
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公开(公告)号：US20150012245A1
公开(公告)日：2015-01-08
申请号：US14378152
申请日：2013-02-13
发明人： Shaojun Xiao
CPC分类号： G01M11/025 , G01B11/2441 , G01B11/255 , G01B21/04 , G01B21/20
摘要： A computer implemented method of determining the surface shape of an aspheric object using a metrological apparatus includes positioning the object on a support surface of a turntable so that an axis of the object is tilted with respect to the axis of rotation of the turntable; using a measurement probe to make a first measurement of the object; rotating the turntable; after rotation of the turntable, using a measurement probe to make a second measurement of the object, diametrically opposite the first measurement, estimating a first angle based on fitting the first measurement data using a surface model including: a dependency on the axis tilt angle and a dependency on the radius of the base of the object; estimating a second angle based on fitting the second measurement data to the surface model; and determining the tilt angle based on the first angle and the second angle.
摘要翻译： 使用计量装置确定非球面物体的表面形状的计算机实现方法包括将物体定位在转台的支撑表面上，使得物体的轴线相对于转台的旋转轴线倾斜; 使用测量探头对物体进行第一次测量; 旋转转盘; 在所述转台旋转之后，使用测量探针对所述物体进行第二测量，与所述第一测量完全相反，基于使用表面模型拟合所述第一测量数据来估计第一角度，所述表面模型包括：对所述轴倾斜角的依赖性，以及 依赖于对象的基础的半径; 基于将所述第二测量数据拟合到所述表面模型来估计第二角度; 以及基于所述第一角度和所述第二角度确定所述倾斜角度。
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