公开(公告)号：US20240182293A1

公开(公告)日：2024-06-06

申请号：US18287721

申请日：2022-04-12

Applicant: Technische Universität Wien

Inventor： Daniel PLATZ ,  Ulrich SCHMID ,  Jonas HAFNER

IPC: B81B3/00 ,  G01C19/5712 ,  G01Q60/24 ,  H10N30/30

CPC classification number: B81B3/0081 ,  G01C19/5712 ,  G01Q60/24 ,  H10N30/302 ,  H10N30/304 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0285

Abstract: A micro-electromechanical system (1) comprising: a sensor device (2), with a measuring deformer (3) exhibiting an effective temperature T1; a high-frequency resonator (4) that is mechanically coupled to the sensor device (2) and can interact with the measuring deformer (3); an energy converter (7) that is operatively connected to the high-frequency resonator (4) and is configured to excite the high-frequency resonator (4) into a vibration state, wherein, through the interaction of the vibrating high-frequency resonator (4) with the measuring deformer (3), energy can be transferred from the measuring deformer (3) to the high-frequency resonator (4) in such a manner that the measuring deformer (3) after the energy transfer exhibits an effective temperature T2 lower than T1.