Optical transmitter-receiver
    1.
    发明授权
    Optical transmitter-receiver 失效
    光收发器

    公开(公告)号:US5500754A

    公开(公告)日:1996-03-19

    申请号:US974997

    申请日:1992-11-12

    CPC分类号: H04B10/40

    摘要: A two-way optical transmitter in which optical transmitters each having light projecting means and light receiving means on an optical axis intersecting the optical axis of the light projecting means are disposed in opposed relationship with each other with a predetermined distance interposed therebetween and which effects two-way optical transmission, wherein a polarizing beam splitter, having a cemented surface forming a certain angle with respect to the optical axes of the light projecting means and the light receiving means is installed near the point of intersection between the two optical axes, linearly polarized light from the light projecting means is reflected by the cemented surface of the polarizing beam splitter to thereby provide transmission light, and an optical axis leading from the polarizing beam splitter to the light projecting means or an optical axis leading from the polarizing beam splitter to the light receiving means is set at an angle of approximately 45.degree. with respect to the vertical direction when the apparatus is seen from on the optical axis of the transmitted light.

    摘要翻译: 一种双向光发射机,其中在与光投射装置的光轴相交的光轴上具有光投射装置和光接收装置的光发射器以彼此间隔开的预定距离彼此相对设置, 其中具有相对于所述光投射装置和所述光接收装置的光轴形成一定角度的胶合表面的偏振光束分离器安装在所述两个光轴之间的相交点附近,线偏振 来自光投射装置的光被偏振分束器的胶合表面反射,从而提供透射光,以及从偏振分束器引导到光投射装置的光轴或从偏振分束器引导到光轴的光轴 光接收装置设置成大约45°的角度 当从透射光的光轴上观察装置时,相对于垂直方向。

    Optical space communication
    2.
    发明授权
    Optical space communication 失效
    光学空间通信

    公开(公告)号:US5680241A

    公开(公告)日:1997-10-21

    申请号:US614263

    申请日:1996-03-12

    IPC分类号: H04B10/10 H04B10/00

    CPC分类号: H04B10/1121

    摘要: An optical space communication method is for communication with a laser as a radiative source and with a light signal therefrom propagating in the atmosphere. In the method, the communication is performed under the following conditions. In case a transmission distance of optical space communication is between 100 m inclusive and 200 m, the laser is a laser with an oscillation wavelength L (nm) in a wavelength range of between 967 run inclusive and 1110 nm or in a wavelength range of between 1165 nm inclusive and 1315 nm, whereas in case the transmission distance is not less than 200 m, the laser is a laser with an oscillation wavelength L (run) in a wavelength range of between 986 nm inclusive and 1090 nm or in a wavelength range of between 1225 nm inclusive and 1295 nm. At any position in a transmission path between a transmitter exit and a receiver entrance, an irradiance is set to at most 6.47.multidot.10.sup.(L-700)/500 (W/m.sup.2) where the oscillation wavelength L (nm) of the laser is in a wavelength range of 950 nm to 1050 nm while to at most 32.3 (W/m.sup.2) where the oscillation wavelength L is in a wavelength range of 1050 nm to 1400 nm.

    摘要翻译: 光学空间通信方法用于与激光作为辐射源通信,并且其光信号在大气中传播。 在该方法中,在以下条件下进行通信。 在光学空间通信的传输距离在100微米到200微米之间的情况下,激光器是在波长范围为967nm至1110nm之间或在波长范围内的振荡波长L(nm)的激光器 1165nm和1315nm,而在传输距离不小于200μm的情况下,激光是在986nm至1090nm之间或在波长范围内具有振荡波长L(游程)的激光器 在1225nm和1295nm之间。 在发射器出口和接收器入口之间的传输路径中的任何位置,辐射度被设定为激光器的振荡波长L(nm)为至多6.47×10(L-700)/ 500(W / m 2) 波长范围为950nm至1050nm,而至多32.3(W / m 2),其中振荡波长L在1050nm至1400nm的波长范围内。

    Optical transmitter-receiver
    3.
    发明授权
    Optical transmitter-receiver 失效
    光收发器

    公开(公告)号:US5627669A

    公开(公告)日:1997-05-06

    申请号:US975018

    申请日:1992-11-12

    IPC分类号: H04B10/118 H04B10/00

    CPC分类号: H04B10/118

    摘要: This specification discloses a communication apparatus provided with light emitting means for generating transmission light modulated by an information signal, light receiving means for receiving modulated reception light, an optical member for reflecting one of the transmission light and the reception light and transmitting the other therethrough, a reflecting member for reflecting the transmission light emerging from the optical member to the transmission side and reflecting the reception light to the optical member, light splitting means for splitting part of the reception light obtained through the optical member, detecting means for detecting the positional state of the light obtained from the light splitting means, and driving means for rotatively driving the reflecting member about two axes in accordance with the positional state of the light detected by the detecting means. The specification further discloses an apparatus which has a lens unit having positive refractive power disposed between the light emitting means and the light splitting means and in which at least one lens constituting the lens unit is moved to thereby vary the state of the light beam.

    摘要翻译: 本说明书公开了一种通信装置,其具备发送装置,用于产生由信息信号调制的透射光,用于接收调制的接收光的光接收装置,用于反射发射光和接收光之一的光学部件, 用于将从光学构件出射的透射光反射到发射侧并将接收光反射到光学构件的反射构件,用于分离通过光学构件获得的接收光的一部分的分光装置,用于检测位置状态的检测装置 以及驱动装置,用于根据由检测装置检测的光的位置状态围绕两个轴旋转地驱动反射部件。 本说明书还公开了一种装置,其具有设置在发光装置和分光装置之间的具有正折射力的透镜单元,其中构成透镜单元的至少一个透镜被移动,从而改变光束的状态。

    Two-way optical communication apparatus
    4.
    发明授权
    Two-way optical communication apparatus 失效
    双向光通信装置

    公开(公告)号:US5530577A

    公开(公告)日:1996-06-25

    申请号:US325141

    申请日:1994-10-21

    IPC分类号: H04B10/00 H04B10/118

    CPC分类号: H04B10/1125 H04B10/40

    摘要: An optical communication apparatus that includes a polarization beam splitter which synthesizes an optical axis of a light emitting optical system having a light emission element for emitting a linearly polarized light and an optical axis of a light receiving optical axis to make the optical axis for reception coincide with the optical axis for transmission. A phase plate is provided in such a manner as to be rotatable by a predetermined angle about the common axis. An optical axis of the phase plate of each of the associated communication apparatuses is set at an adequate angle before installation thereof.

    摘要翻译: 一种光通信装置,其包括:合成具有用于发射线偏振光的发光元件和受光光轴的光轴的发光光学系统的光轴以使接收光轴重合的偏振分束器 光轴用于传输。 以相对于公共轴线旋转预定角度的方式设置相位板。 每个相关联通信设备的相位板的光轴在安装之前被设定为足够的角度。

    Illumination optical system and exposure apparatus having the same
    5.
    发明授权
    Illumination optical system and exposure apparatus having the same 有权
    照明光学系统和具有该光学系统的曝光装置

    公开(公告)号:US07499145B2

    公开(公告)日:2009-03-03

    申请号:US10959350

    申请日:2004-10-06

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    IPC分类号: G03B27/54

    CPC分类号: G03F7/70183

    摘要: An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.

    摘要翻译: 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。

    Illumination optical system, exposure apparatus, and device manufacturing method using the same
    6.
    发明申请
    Illumination optical system, exposure apparatus, and device manufacturing method using the same 失效
    照明光学系统,曝光装置和使用其的装置制造方法

    公开(公告)号:US20050230599A1

    公开(公告)日:2005-10-20

    申请号:US11105866

    申请日:2005-04-13

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    CPC分类号: G03F7/70058

    摘要: Disclosed is an illumination optical system having an imaging optical system for imaging a predetermined object plane upon an image plane, by use of light supplied from an integrator that functions to produce a plurality of light sources using light from a light source. In one preferred form of the invention, the imaging optical system includes, in an order from a light incidence side thereof, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, wherein the second lens group includes a concave lens at a light exit side thereof and wherein the third lens group includes a convex lens at a light entrance side thereof. The position of intersection between an optical axis of the imaging optical system and a principal ray of abaxial light is defined between the second lens group and the third lens group.

    摘要翻译: 公开了一种具有成像光学系统的照明光学系统,该成像光学系统通过使用从利用来自光源的光产生多个光源的积分器提供的光来在图像平面上成像预定物体平面。 在本发明的一个优选形式中,成像光学系统从其入射侧依次包括具有正光焦度的第一透镜组,具有负光焦度的第二透镜组和具有负光焦度的第三透镜组 功率,其中所述第二透镜组在其光出射侧包括凹透镜,并且其中所述第三透镜组在其光入射侧包括凸透镜。 在第二透镜组和第三透镜组之间限定成像光学系统的光轴与主轴之间的相交位置。

    Illumination optical system and exposure apparatus having the same
    7.
    发明申请
    Illumination optical system and exposure apparatus having the same 有权
    照明光学系统和具有该光学系统的曝光装置

    公开(公告)号:US20050094997A1

    公开(公告)日:2005-05-05

    申请号:US10959350

    申请日:2004-10-06

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    CPC分类号: G03F7/70183

    摘要: An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.

    摘要翻译: 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。

    Illumination optical system and exposure apparatus having the same
    8.
    发明授权
    Illumination optical system and exposure apparatus having the same 有权
    照明光学系统和具有该光学系统的曝光装置

    公开(公告)号:US08154707B2

    公开(公告)日:2012-04-10

    申请号:US12330910

    申请日:2008-12-09

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    IPC分类号: G03B27/54 G02B15/02

    CPC分类号: G03F7/70183

    摘要: An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.

    摘要翻译: 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。

    Illumination optical system, exposure apparatus, and device manufacturing method using the same
    9.
    发明授权
    Illumination optical system, exposure apparatus, and device manufacturing method using the same 失效
    照明光学系统,曝光装置和使用其的装置制造方法

    公开(公告)号:US07170686B2

    公开(公告)日:2007-01-30

    申请号:US11105866

    申请日:2005-04-13

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    CPC分类号: G03F7/70058

    摘要: Disclosed is an illumination optical system having an imaging optical system for imaging a predetermined object plane upon an image plane, by use of light supplied from an integrator that functions to produce a plurality of light sources using light from a light source. In one preferred form of the invention, the imaging optical system includes, in an order from a light incidence side thereof, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, wherein the second lens group includes a concave lens at a light exit side thereof and wherein the third lens group includes a convex lens at a light entrance side thereof. The position of intersection between an optical axis of the imaging optical system and a principal ray of abaxial light is defined between the second lens group and the third lens group.

    摘要翻译: 公开了一种具有成像光学系统的照明光学系统,该成像光学系统通过使用从利用来自光源的光产生多个光源的积分器提供的光来在图像平面上成像预定物体平面。 在本发明的一个优选形式中,成像光学系统从其入射侧依次包括具有正光焦度的第一透镜组,具有负光焦度的第二透镜组和具有负光焦度的第三透镜组 功率,其中所述第二透镜组在其光出射侧包括凹透镜,并且其中所述第三透镜组在其光入射侧包括凸透镜。 在第二透镜组和第三透镜组之间限定成像光学系统的光轴与主轴之间的相交位置。

    Optical space communication apparatus
    10.
    发明授权
    Optical space communication apparatus 失效
    光空间通信装置

    公开(公告)号:US5689354A

    公开(公告)日:1997-11-18

    申请号:US727214

    申请日:1996-10-08

    申请人: Kanjo Orino

    发明人: Kanjo Orino

    CPC分类号: H04B10/1125

    摘要: An optical space communication apparatus includes a light-emitting device for emitting an elliptic light beam, and a light-projecting optical system for converting the elliptic light beam into a transmission light beam. The light-projecting optical system shapes a cross section of the transmission light beam into an elliptic shape immediately after having left the light-projecting optical system and also shapes the cross section of the transmission light beam into a nearly circular shape at a receiving point being located at the farthest distance in a transmissible distance range.

    摘要翻译: 光学空间通信装置包括用于发射椭圆光束的发光装置和用于将椭圆光束转换成透射光束的投光光学系统。 投光光学系统在离开投光光学系统之后立即将透射光束的横截面形成为椭圆形状,并且还将透射光束的截面在接收点处形成为近似圆形的形状 位于可传播距离范围内最远的距离。