Method of manufacturing semiconductor device including air space formed around gate electrode
    1.
    发明申请
    Method of manufacturing semiconductor device including air space formed around gate electrode 有权
    制造半导体器件的方法,包括围绕栅电极形成的空气空间

    公开(公告)号:US20060199322A1

    公开(公告)日:2006-09-07

    申请号:US11295663

    申请日:2005-12-07

    IPC分类号: H01L21/8234 H01L21/4763

    CPC分类号: H01L27/0605 H01L21/764

    摘要: After a HEMT is formed, side walls are formed on a semiconductor substrate. Next, a sacrificial layer is formed to cover the HEMT. Next, contact holes are formed in the sacrificial layer to expose upper surfaces of source electrodes. Next, a metal interconnect line is formed by patterning a metal film formed on the entire top surface. Next, slits are formed in the metal interconnect line to partially expose an upper surface of the sacrificial layer. After the sacrificial layer is dissolved, the dissolved sacrificial layer is discharged through the slits to the outside. An air space is formed as a result of the removal of the sacrificial layer.

    摘要翻译: 在形成HEMT之后,在半导体衬底上形成侧壁。 接下来,形成牺牲层以覆盖HEMT。 接下来,在牺牲层中形成接触孔以暴露源电极的上表面。 接下来,通过图案化形成在整个顶表面上的金属膜来形成金属互连线。 接下来,在金属互连线中形成狭缝以部分地暴露牺牲层的上表面。 在牺牲层溶解之后,将溶解的牺牲层通过狭缝排出到外部。 作为去除牺牲层的结果形成空气空间。

    Method of manufacturing semiconductor device including air space formed around gate electrode
    2.
    发明授权
    Method of manufacturing semiconductor device including air space formed around gate electrode 有权
    制造半导体器件的方法,包括围绕栅电极形成的空气空间

    公开(公告)号:US07358179B2

    公开(公告)日:2008-04-15

    申请号:US11295663

    申请日:2005-12-07

    IPC分类号: H01L21/4763 H01L21/44

    CPC分类号: H01L27/0605 H01L21/764

    摘要: After a HEMT is formed, side walls are formed on a semiconductor substrate. Next, a sacrificial layer is formed to cover the HEMT. Next, contact holes are formed in the sacrificial layer to expose upper surfaces of source electrodes. Next, a metal interconnect line is formed by patterning a metal film formed on the entire top surface. Next, slits are formed in the metal interconnect line to partially expose an upper surface of the sacrificial layer. After the sacrificial layer is dissolved, the dissolved sacrificial layer is discharged through the slits to the outside. An air space is formed as a result of the removal of the sacrificial layer.

    摘要翻译: 在形成HEMT之后,在半导体衬底上形成侧壁。 接下来,形成牺牲层以覆盖HEMT。 接下来,在牺牲层中形成接触孔以暴露源电极的上表面。 接下来,通过图案化形成在整个顶表面上的金属膜来形成金属互连线。 接下来,在金属互连线中形成狭缝以部分地暴露牺牲层的上表面。 在牺牲层溶解之后,将溶解的牺牲层通过狭缝排出到外部。 作为去除牺牲层的结果形成空气空间。

    Fuel cell system
    3.
    发明授权

    公开(公告)号:US09941528B2

    公开(公告)日:2018-04-10

    申请号:US14342821

    申请日:2012-08-23

    申请人: Tetsuya Ogawa

    发明人: Tetsuya Ogawa

    摘要: A fuel cell system includes a fuel cell module for generating electrical energy by electrochemical reactions of a fuel gas and an oxygen-containing gas, and a condenser for condensing water vapor in an exhaust gas discharged from the fuel cell module by heat exchange between the exhaust gas and a coolant to collect the condensed water and supplying the collected condensed water to the fuel cell module. The condenser includes an air cooling condenser using the oxygen-containing gas as the coolant and a water cooling condenser using hot water stored in a hot water tank as the coolant. A thermoelectric conversion mechanism for performing thermoelectric conversion by a temperature difference between the exhaust gas and the oxygen-containing gas is provided between the air cooling condenser and the water cooling condenser.

    Fuel cell module
    4.
    发明授权
    Fuel cell module 有权
    燃料电池模块

    公开(公告)号:US09362575B2

    公开(公告)日:2016-06-07

    申请号:US14115673

    申请日:2012-04-12

    摘要: A fuel cell module includes a fuel cell stack, a partial oxidation reformer for reforming a mixed gas of a raw fuel and an oxygen-containing gas, an exhaust gas combustor for combusting a fuel exhaust gas and an oxygen-containing exhaust gas discharged from the fuel cell stack thereby to produce a combustion gas, and a heat exchanger for raising the temperature of the oxygen-containing gas by heat exchange with the combustion gas. The heat exchanger is provided on one side of the fuel cell stack, and the partial oxidation reformer and the exhaust gas combustor are provided on the other side of the fuel cell stack. The partial oxidation reformer is provided so as to surround the exhaust gas combustor.

    摘要翻译: 燃料电池模块包括燃料电池堆,用于重整原燃料和含氧气体的混合气体的部分氧化重整器,用于燃烧燃料废气的废气燃烧器和从燃料排出的含氧废气 燃料电池堆,从而产生燃烧气体;以及热交换器,用于通过与燃烧气体的热交换来提高含氧气体的温度。 热交换器设置在燃料电池堆的一侧,部分氧化重整器和排气燃烧器设置在燃料电池堆的另一侧。 部分氧化重整器被设置成围绕废气燃烧器。

    FUEL CELL STACK
    7.
    发明申请
    FUEL CELL STACK 有权
    燃料电池堆

    公开(公告)号:US20120100452A1

    公开(公告)日:2012-04-26

    申请号:US13380264

    申请日:2010-09-01

    IPC分类号: H01M8/24

    摘要: The present invention provides a fuel cell stack that has a separator arranged between fuel cells, the separator including: a sandwiching section which sandwiches an electrolyte electrode assembly and includes a fuel gas channel and a separately provided oxygen-containing gas channel; a bridge which is connected to the sandwiching section and includes a reactant gas supply channel; a reactant gas supply section which is connected to the bridge and includes a reactant gas supply passage; and a connecting section that connects the sandwiching section to the bridge.

    摘要翻译: 本发明提供一种燃料电池堆,其具有布置在燃料电池之间的隔板,所述隔板包括:夹持电解质电极组件并包括燃料气体通道和单独设置的含氧气体通道的夹持部分; 连接到所述夹持部并且包括反应气体供给通道的桥; 反应气体供给部,其连接到所述桥并且包括反应气体供给通路; 以及将夹持部连接到桥上的连接部。

    FUEL CELL MODULE
    8.
    发明申请
    FUEL CELL MODULE 有权
    燃料电池模块

    公开(公告)号:US20120045703A1

    公开(公告)日:2012-02-23

    申请号:US13266716

    申请日:2010-04-20

    IPC分类号: H01M8/24 H01M8/06

    摘要: In a fuel cell stack constituting a fuel cell module, electrolyte/electrode assemblies and separators are alternately laminated. An electrolyte/electrode assembly is arranged on one end of the fuel cell stack in the lamination direction, while a separator is arranged on the other end of the fuel cell stack in the lamination direction. A terminal separator is arranged adjacent to the electrolyte/electrode assembly, while a load relaxation member is arranged adjacent to the separator. The terminal separator controls the supply of a fuel gas to a fuel gas channel, and the load relaxation member is configured of a laminate of a plurality of flat metal plates.

    摘要翻译: 在构成燃料电池模块的燃料电池堆中,电解质/电极组件和隔板交替层叠。 电解质/电极组件沿着层叠方向设置在燃料电池堆的一端,同时在层叠方向上在燃料电池堆的另一端设置隔板。 端子隔板布置成与电解质/电极组件相邻,而负载松弛构件被布置成与隔板相邻。 端子分离器控制向燃料气体通道供应燃料气体,并且负载松弛部件由多个平板状金属板的叠层构成。

    FUEL CELL
    9.
    发明申请
    FUEL CELL 失效
    燃料电池

    公开(公告)号:US20120003561A1

    公开(公告)日:2012-01-05

    申请号:US13256546

    申请日:2010-03-24

    IPC分类号: H01M8/24 H01M8/10 H01M8/04

    摘要: A fuel cell comprises an electrolyte electrode assembly which includes an anode electrode, a cathode electrode, and an electrolyte; a separator which includes a sandwiching portion; a fuel gas channel which is formed at a first surface of the sandwiching portion, and is covered by the anode electrode; fuel gas outlets which are formed around the fuel gas channel; an oxygen-containing gas channel which is formed at a second surface of the sandwiching portion, and is covered by the cathode electrode; and oxygen-containing gas outlets which are formed around the oxygen-containing gas channel, in which the oxygen-containing gas outlets are formed at phases different from phases of the fuel gas outlets in a thickness direction of the separator.

    摘要翻译: 燃料电池包括电解质电极组件,其包括阳极电极,阴极电极和电解质; 分隔件,其包括夹持部; 燃料气体通道,其形成在所述夹持部的第一表面,并被所述阳极电极覆盖; 形成在燃料气体通道周围的燃料气体出口; 含氧气体通道,其形成在所述夹持部的第二表面,并被所述阴极电极覆盖; 以及在含氧气体通道周围形成的含氧气体出口,其中,所述含氧气体出口形成在所述分离器的厚度方向上与所述燃料气体出口的相位不同的相。

    FUEL CELL SYSTEM
    10.
    发明申请
    FUEL CELL SYSTEM 有权
    燃油电池系统

    公开(公告)号:US20110143239A1

    公开(公告)日:2011-06-16

    申请号:US13057928

    申请日:2009-07-16

    IPC分类号: H01M8/06 H01M8/04

    摘要: A casing of a fuel cell system is divided into a first fluid supply section, a second fluid supply section, a module section, and an electrical equipment section. A water supply apparatus, a fuel gas supply apparatus, and a detector are provided in the first fluid supply section. An oxygen-containing gas supply apparatus is provided in the second fluid supply section. A fuel cell module and a combustor are provided in the module section. A power converter and a control device are provided in the electrical equipment section. The module section is interposed between the first fluid supply section and the electrical equipment section. The second fluid supply section is disposed on the lower surface of the module section.

    摘要翻译: 燃料电池系统的壳体被分为第一流体供应部分,第二流体供应部分,模块部分和电气设备部分。 在第一流体供给部中设置有供水装置,燃料气体供给装置和检测器。 在第二流体供给部中设置含氧气体供给装置。 燃料电池模块和燃烧器设置在模块部分中。 在电气设备部分中提供电力转换器和控制装置。 模块部分介于第一流体供应部分和电气设备部分之间。 第二流体供给部设置在模块部的下表面。