摘要:
After a HEMT is formed, side walls are formed on a semiconductor substrate. Next, a sacrificial layer is formed to cover the HEMT. Next, contact holes are formed in the sacrificial layer to expose upper surfaces of source electrodes. Next, a metal interconnect line is formed by patterning a metal film formed on the entire top surface. Next, slits are formed in the metal interconnect line to partially expose an upper surface of the sacrificial layer. After the sacrificial layer is dissolved, the dissolved sacrificial layer is discharged through the slits to the outside. An air space is formed as a result of the removal of the sacrificial layer.
摘要:
After a HEMT is formed, side walls are formed on a semiconductor substrate. Next, a sacrificial layer is formed to cover the HEMT. Next, contact holes are formed in the sacrificial layer to expose upper surfaces of source electrodes. Next, a metal interconnect line is formed by patterning a metal film formed on the entire top surface. Next, slits are formed in the metal interconnect line to partially expose an upper surface of the sacrificial layer. After the sacrificial layer is dissolved, the dissolved sacrificial layer is discharged through the slits to the outside. An air space is formed as a result of the removal of the sacrificial layer.
摘要:
A fuel cell system includes a fuel cell module for generating electrical energy by electrochemical reactions of a fuel gas and an oxygen-containing gas, and a condenser for condensing water vapor in an exhaust gas discharged from the fuel cell module by heat exchange between the exhaust gas and a coolant to collect the condensed water and supplying the collected condensed water to the fuel cell module. The condenser includes an air cooling condenser using the oxygen-containing gas as the coolant and a water cooling condenser using hot water stored in a hot water tank as the coolant. A thermoelectric conversion mechanism for performing thermoelectric conversion by a temperature difference between the exhaust gas and the oxygen-containing gas is provided between the air cooling condenser and the water cooling condenser.
摘要:
A fuel cell module includes a fuel cell stack, a partial oxidation reformer for reforming a mixed gas of a raw fuel and an oxygen-containing gas, an exhaust gas combustor for combusting a fuel exhaust gas and an oxygen-containing exhaust gas discharged from the fuel cell stack thereby to produce a combustion gas, and a heat exchanger for raising the temperature of the oxygen-containing gas by heat exchange with the combustion gas. The heat exchanger is provided on one side of the fuel cell stack, and the partial oxidation reformer and the exhaust gas combustor are provided on the other side of the fuel cell stack. The partial oxidation reformer is provided so as to surround the exhaust gas combustor.
摘要:
A catalyst particle is composed of an inner particle and an outermost layer that includes platinum and covers the inner particle. The inner particle includes on at least a surface thereof a first oxide having an oxygen defect.
摘要:
A casing of a fuel cell system is divided into a module area, a first fluid supply area, a second fluid supply area, and an electric parts area. The first fluid supply area is provided on a first side surface of the module area, and an electric parts area is provided on a second side surface of the module area. The second fluid supply area is provided under a bottom surface of the module area. A fuel cell module and a combustor are provided in the module area.
摘要:
The present invention provides a fuel cell stack that has a separator arranged between fuel cells, the separator including: a sandwiching section which sandwiches an electrolyte electrode assembly and includes a fuel gas channel and a separately provided oxygen-containing gas channel; a bridge which is connected to the sandwiching section and includes a reactant gas supply channel; a reactant gas supply section which is connected to the bridge and includes a reactant gas supply passage; and a connecting section that connects the sandwiching section to the bridge.
摘要:
In a fuel cell stack constituting a fuel cell module, electrolyte/electrode assemblies and separators are alternately laminated. An electrolyte/electrode assembly is arranged on one end of the fuel cell stack in the lamination direction, while a separator is arranged on the other end of the fuel cell stack in the lamination direction. A terminal separator is arranged adjacent to the electrolyte/electrode assembly, while a load relaxation member is arranged adjacent to the separator. The terminal separator controls the supply of a fuel gas to a fuel gas channel, and the load relaxation member is configured of a laminate of a plurality of flat metal plates.
摘要:
A fuel cell comprises an electrolyte electrode assembly which includes an anode electrode, a cathode electrode, and an electrolyte; a separator which includes a sandwiching portion; a fuel gas channel which is formed at a first surface of the sandwiching portion, and is covered by the anode electrode; fuel gas outlets which are formed around the fuel gas channel; an oxygen-containing gas channel which is formed at a second surface of the sandwiching portion, and is covered by the cathode electrode; and oxygen-containing gas outlets which are formed around the oxygen-containing gas channel, in which the oxygen-containing gas outlets are formed at phases different from phases of the fuel gas outlets in a thickness direction of the separator.
摘要:
A casing of a fuel cell system is divided into a first fluid supply section, a second fluid supply section, a module section, and an electrical equipment section. A water supply apparatus, a fuel gas supply apparatus, and a detector are provided in the first fluid supply section. An oxygen-containing gas supply apparatus is provided in the second fluid supply section. A fuel cell module and a combustor are provided in the module section. A power converter and a control device are provided in the electrical equipment section. The module section is interposed between the first fluid supply section and the electrical equipment section. The second fluid supply section is disposed on the lower surface of the module section.