公开(公告)号：US20240429041A1

公开(公告)日：2024-12-26

申请号：US18340201

申请日：2023-06-23

Applicant: The Boeing Company

Inventor： Shanying Cui ,  Samuel J. Whiteley ,  Jason A. Graetz ,  John J. Vajo ,  Adam E. Sorensen

IPC: H01L21/02 ,  H01L21/311

Abstract: A method for producing a planar semiconductor surface includes forming a workpiece that has a carrier substrate, one or more insulating layers, a semiconductor layer, a first etch stop layer, and a second etch stop layer; forming a contact on the workpiece; biasing the workpiece to a second voltage through the contact; etching the second etch stop layer and part of the first etch stop layer with a photo-electrochemical etching and the second voltage that selectively removes the second etch stop layer faster than the first etch stop layer; biasing the workpiece to a first voltage through the contact; and etching the first etch stop layer and part of the semiconductor layer with the photo-electrochemical etching and the first voltage that selectively removes the first etch stop layer faster than the semiconductor layer to produce a semiconductor device with a planar surface on the semiconductor layer.

公开(公告)号：US12152306B2

公开(公告)日：2024-11-26

申请号：US16239312

申请日：2019-01-03

Applicant: THE BOEING COMPANY

Inventor： John J. Vajo ,  Alain A. Adjorlolo ,  Jason A. Graetz

IPC: C23C22/34

Abstract: Aspects of the present disclosure provide titanium-based coatings and methods for making titanium-based coatings on surfaces. In at least one aspect, a coating includes an oxygen content, a fluorine content, a titanium content, and a sodium content. In one or more additional aspects, a coating includes titanium dioxide and Na5Ti3F14. In one or more additional aspects, a method of making a titanium-based coating includes contacting a substrate with a composition that includes from about 0.01 M to about 0.8 M of a titanium fluoride, from about 0.01 M to about 2 M of a sodium salt, and from about 0.1 M to about 1.5 M of a fluorine scavenger.