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    DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME
    3.
    发明申请
    DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME 有权

    公开(公告)号：US20220166301A1

    公开(公告)日：2022-05-26

    申请号：US17543671

    申请日：2021-12-06

    申请人： The University of British Columbia

    发明人： Xiaodong LU ,  Irfan-Ur-Rab USMAN

    IPC分类号： H02K41/02 ,  H02K21/24 ,  H02K41/03 ,  H02K1/2793 ,  H02K3/28 ,  H02K7/09 ,  H01L21/67 ,  H02K1/26

    摘要： Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

    DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME
    5.
    发明申请
    DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME 有权
    位移装置及其制造，使用和控制方法

    公开(公告)号：US20160065043A1

    公开(公告)日：2016-03-03

    申请号：US14920885

    申请日：2015-10-23

    申请人： The University of British Columbia

    发明人： Xiaodong LU ,  Irfan-Ur-Rab USMAN

    IPC分类号： H02K41/02 ,  H02K3/28 ,  H02K1/26

    CPC分类号： H02K41/02 ,  H01L21/67 ,  H02K1/26 ,  H02K1/2793 ,  H02K3/28 ,  H02K7/09 ,  H02K21/24 ,  H02K41/031 ,  H02K2201/18

    摘要： Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

    摘要翻译： 位移装置包括定子和可移动台。 定子包括多个线圈，其被成形为在一个或多个层中提供多个大致线性细长的线圈迹线。 线圈层可能在Z方向上重叠。 可移动台包括多个磁体阵列。 每个磁体阵列可以包括通常在相应方向线性延长的多个磁化段。 每个磁化段具有大致正交于其被拉长的方向的磁化方向，并且至少两个磁化方向彼此不同。 可以连接一个或多个放大器以选择性地驱动线圈轨迹中的电流，从而实现定子和可移动台之间的相对运动。