公开(公告)号：US06687456B1

公开(公告)日：2004-02-03

申请号：US10196595

申请日：2002-07-15

申请人： Tien-Hsing Woo ,  Ruei-Hung Jang ,  Chih-Lin Ying ,  Ming-Kuo Yu ,  Shih-Shiung Chen

发明人： Tien-Hsing Woo ,  Ruei-Hung Jang ,  Chih-Lin Ying ,  Ming-Kuo Yu ,  Shih-Shiung Chen

IPC分类号： F21V700

CPC分类号： H01L21/67115

摘要： An in-line fluid heater including a heater housing that contains a parabolic lamp vessel which houses an infrared lamp. A parabolic reflection vessel in the heater housing is separated from the parabolic lamp vessel by a convex lens. A quartz plate seals the heater housing, and at least one, and typically, multiple leak detectors may be provided in the heater housing. The interior reflective surface of the reflection vessel reflects the heat energy in parallel rays through the quartz plate and to the fluid to be heated. The leak detectors may be connected to an RC circuit which operates a controller to actuate a buzzer or alarm and terminate operation of the heater upon leakage of fluid into the heater housing.

摘要翻译： 一种在线流体加热器，其包括加热器壳体，该加热器壳体包含容纳红外灯的抛物面灯管。 加热器壳体中的抛物面反射容器通过凸透镜与抛物线灯容器分离。 石英板密封加热器壳体，并且可以在加热器壳体中提供至少一个，并且通常多个泄漏检测器。 反射容器的内部反射表面将平行射线中的热能反射通过石英板和待加热的流体。 泄漏检测器可以连接到RC电路，RC电路操作控制器来致动蜂鸣器或报警器，并且在将流体泄漏到加热器壳体中时终止加热器的操作。

公开(公告)号：US06752897B2

公开(公告)日：2004-06-22

申请号：US10278969

申请日：2002-10-22

申请人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Tsung-Chi Hsieh ,  Shih-Shiung Chen

发明人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Tsung-Chi Hsieh ,  Shih-Shiung Chen

IPC分类号： C23F102

CPC分类号： H01L21/67086

摘要： A wet etch system including a process tank having an inner etch bath chamber and an outer overflow chamber surrounding the etch bath chamber. A frame which is removably mounted on the process tank defines a diversion channel between the upper ends of the etch bath chamber and overflow chamber. The etch bath chamber receives a wafer-containing cassette, which displaces etchant from the etch bath chamber, through the diversion channel and into the overflow chamber, where the etchant is drained from the process tank. Particulate impurities leave the etch bath chamber, enter the overflow chamber and drain from the process tank with the overflow etchant. Fresh etchant is poured into the etch bath chamber prior to a subsequent etch cycle. A water spray loop may be provided in the overflow chamber for removing etch particles from the interior wall surfaces of the overflow chamber.

摘要翻译： 湿式蚀刻系统，其包括具有内部蚀刻浴室和围绕蚀刻浴室的外部溢流室的处理罐。 可移除地安装在处理罐上的框架在蚀刻槽室的上端和溢流室之间形成分流通道。 蚀刻浴室接收含晶片的盒，其将来自蚀刻浴室的蚀刻剂移动通过引流通道并进入溢流室，其中蚀刻剂从处理罐排出。 颗粒杂质离开蚀刻槽室，进入溢流室，并从溢流蚀刻液从处理槽排出。 在随后的蚀刻循环之前，将新的蚀刻剂倒入蚀刻槽室中。 可以在溢流室中设置喷水回路，以从溢流室的内壁表面去除蚀刻颗粒。

公开(公告)号：US06685842B2

公开(公告)日：2004-02-03

申请号：US10039477

申请日：2001-12-31

申请人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Shan-Hua Wu ,  Ming-Kuo Yu

发明人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Shan-Hua Wu ,  Ming-Kuo Yu

IPC分类号： B01D1709

CPC分类号： B01D21/009

摘要： A method and apparatus for carrying out a method for thermophoretically removing particles from a particulate containing liquid the method including providing a heated turbulent flowing particulate contain liquid through a first conduit; redirecting a portion of the particulate containing liquid through a second conduit to provide laminar flow having a flow direction substantially parallel to the first conduit; forming a thermal gradient in said second conduit substantially perpendicular to the flow direction; concentrating particles in the particulate containing liquid in a portion of the second conduit aided at least in part by thermophoretic forces; and, separating the particulate containing liquid into at least a relatively concentrated particle containing portion and a relatively unconcentrated particle containing portion.

摘要翻译： 一种用于实施用于从含颗粒的液体中热去除颗粒的方法的方法和装置，该方法包括提供加热的紊流流动的颗粒通过第一导管容纳液体; 通过第二导管将含部分颗粒的液体重新定向以提供具有基本上平行于第一导管的流动方向的层流; 在所述第二导管中基本上垂直于所述流动方向形成热梯度; 在第二导管的一部分中将颗粒聚集在含微粒的液体中至少部分地通过热电解力来辅助; 并且将含微粒的液体分离成至少相对浓缩的含有颗粒的部分和相对不浓缩的含颗粒的部分。

公开(公告)号：US06601986B2

公开(公告)日：2003-08-05

申请号：US09941532

申请日：2001-08-29

申请人： Ruei-Hung Jang ,  Tien-Hsing Woo ,  Chih-Lin Ying ,  Tsung-Chi Hsieh ,  Ming-Kuo Yu

发明人： Ruei-Hung Jang ,  Tien-Hsing Woo ,  Chih-Lin Ying ,  Tsung-Chi Hsieh ,  Ming-Kuo Yu

IPC分类号： B04C300

CPC分类号： B01F5/0057 ,  B01F5/0256 ,  B01F5/064

摘要： A static mixer comprises a mixing chamber with an inlet mixing module, fluids to be mixed being fed into the module to undergo swirling and jet collision, at least one intermediate mixing module connected to the inlet mixing module and provided with means for splitting liquid flow into a plurality of jet flows with subsequent recombination of said jets and mixing action of vortices formed around the jet flows, and an outlet mixing module connected to the intermediate mixing module and provided with means for further swirling premixed fluids.

公开(公告)号：US06571607B2

公开(公告)日：2003-06-03

申请号：US09881389

申请日：2001-06-13

申请人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Ming-Kuo Yu

发明人： Ruei-Hung Jang ,  Chih-Lin Ying ,  Tien-Hsing Woo ,  Ming-Kuo Yu

IPC分类号： G01N1700

CPC分类号： G01M3/002

摘要： Fluid leak detection through thermal sensing is disclosed. A sensor includes one or more flexible, thermally conductive, fluid isolating layers, and a thermally sensitive detector situated within the flexible, thermally conductive, fluid isolating layers. The detector is responsive to a temperature change resulting from leaking fluid coming in contact with the sensor. The sensor may also including an affixing mechanism, such as glue, on the isolating layers, to affix the sensor to a potential fluid leak source, such as a tank or a piping line. The sensor may further include connectors located at its ends. The detector may be a thermally sensitive resistor, such as platinum or nickel, and the, fluid isolating layers may be capton.

摘要翻译： 公开了通过热感测的流体泄漏检测。 传感器包括一个或多个柔性的，导热的流体隔离层，以及位于柔性导热的流体隔离层内的热敏检测器。 检测器响应于与传感器接触的泄漏流体导致的温度变化。 传感器还可以在隔离层上包括诸如胶水的固定机构，以将传感器固定到潜在的流体泄漏源，例如罐或管道。 传感器还可以包括位于其端部的连接器。 检测器可以是热敏电阻器，例如铂或镍，并且流体隔离层可以是卡顿的。