Multi-dopant permeation tube
    1.
    发明授权
    Multi-dopant permeation tube 有权
    多掺杂剂渗透管

    公开(公告)号:US09275842B2

    公开(公告)日:2016-03-01

    申请号:US13698507

    申请日:2012-05-22

    IPC分类号: H01J49/00 H01J49/04 G01N27/62

    CPC分类号: H01J49/0422 G01N27/622

    摘要: Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

    摘要翻译: 本发明的方面和实施方案涉及光谱测定系统和用于将掺杂剂输送到其的装置和方法。 在一个示例中,提供了掺杂剂递送装置,其配置为向包含第一室和第二室的管,包括在第一室中的第一掺杂剂源和包含在第二室中的第二掺杂剂源的分光系统提供掺杂剂 房间。

    MULTI-DOPANT PERMEATION TUBE
    2.
    发明申请
    MULTI-DOPANT PERMEATION TUBE 有权
    多层渗透管

    公开(公告)号:US20130140455A1

    公开(公告)日:2013-06-06

    申请号:US13698507

    申请日:2012-05-22

    IPC分类号: H01J49/04

    CPC分类号: H01J49/0422 G01N27/622

    摘要: Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

    摘要翻译: 本发明的方面和实施方案涉及光谱测定系统和用于将掺杂剂输送到其的装置和方法。 在一个示例中,提供了掺杂剂递送装置,其配置为向包含第一室和第二室的管,包括在第一室中的第一掺杂剂源和包含在第二室中的第二掺杂剂源的分光系统提供掺杂剂 房间。

    MULTI-DOPANT PERMEATION TUBE
    3.
    发明申请
    MULTI-DOPANT PERMEATION TUBE 审中-公开
    多层渗透管

    公开(公告)号:US20120298856A1

    公开(公告)日:2012-11-29

    申请号:US13477990

    申请日:2012-05-22

    IPC分类号: B01D59/44

    CPC分类号: H01J49/0422 G01N27/622

    摘要: Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

    摘要翻译: 本发明的方面和实施方案涉及光谱测定系统和用于将掺杂剂输送到其的装置和方法。 在一个示例中,提供了掺杂剂递送装置,其配置为向包含第一室和第二室的管,包括在第一室中的第一掺杂剂源和包含在第二室中的第二掺杂剂源的分光系统提供掺杂剂 房间。