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    Printing apparatus with inflatable means for advancing a substrate towards the stamping surface
    1.
    发明授权
    Printing apparatus with inflatable means for advancing a substrate towards the stamping surface 失效
    具有用于将基板推向冲压表面的可充气装置的打印设备

    公开(公告)号：US5947027A

    公开(公告)日：1999-09-07

    申请号：US149011

    申请日：1998-09-08

    申请人： Timothy P. Burgin ,  Vi-en Choong ,  George N. Maracas ,  Thomas M. Mance

    发明人： Timothy P. Burgin ,  Vi-en Choong ,  George N. Maracas ,  Thomas M. Mance

    IPC分类号： G03F7/00 ,  B41F1/32 ,  B41F1/34

    CPC分类号： B82Y30/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    摘要： A micro-contact printing apparatus includes a pressure chamber with a micro-contact printing stamp, a vacuum chuck, elastomeric membrane and mechanical stops attached to the vacuum chuck and positioned within the chamber. An extractor pin is attached to the chamber and accessible externally. The micro-contact printing stamp includes a flexible layer made from an elastomer with a stamping surface and attached to a support structure. A method for micro-contact printing a substrate surface includes advancing the substrate surface toward the stamping surface and contacting mechanical stops with support structure before the substrate surface physically contacts the stamping surface. Springs of members adjust the position of the substrate surface to be parallel with the stamping surface. The membrane is inflated to physically contact the substrate surface with the stamping surface, in such a manner that complete adhesion of the stamping surface to the substrate surface is achieved. The extractor pin is used to disengage the substrate surface from the stamping surface at the chamber pressure used in micro-contact printing, so that distortion of the printing pattern is minimized.

    摘要翻译： 微接触式印刷装置包括具有微接触印刷印版的压力室，真空卡盘，弹性体膜片和连接到真空卡盘并位于腔室内的机械止动件。 提取器销连接到室并可从外部访问。 微接触印刷印模包括由弹性体制成的柔性层，该弹性体具有冲压表面并附接到支撑结构。 用于微接触印刷衬底表面的方法包括将衬底表面朝向冲压表面前进，并且在衬底表面物理接触冲压表面之前使机械止动件与支撑结构接触。 构件的弹簧将衬底表面的位置调整为与冲压表面平行。 膜被充气以与冲压表面物理接触基板表面，使得实现冲压表面完全粘合到基板表面上。 提取器销用于在微接触印刷中使用的室压力下将基板表面与冲压表面分离，使得印刷图案的变形最小化。