公开(公告)号：US20250076232A1

公开(公告)日：2025-03-06

申请号：US18950924

申请日：2024-11-18

Applicant: Tokyo Electron Limited

Inventor： Shigeru KASAI ,  Naoki AKIYAMA ,  Fumiya TAKASE ,  Hiroyuki NAKAYAMA ,  Hajime KUMASAKA

IPC: G01N25/72 ,  G01R31/26 ,  G01R31/265

Abstract: An inspection apparatus for inspecting an inspection target device is presented. The inspection apparatus comprises a placing table that supports the inspection target object while facing the back surface of the imaging device, and the placing table includes: a ceiling plate made of a light transmitting material and having a placing surface on which the inspection target object is placed, an irradiation part that is disposed at a position facing the inspection target object with the ceiling plate interposed therebetween and that irradiates light toward the inspection target object placed on the placing surface; and a temperature controller configured to adjusts a temperature of the inspection target device of the inspection target object placed on the placing surface.