公开(公告)号：US11914298B2

公开(公告)日：2024-02-27

申请号：US17016643

申请日：2020-09-10

Applicant: Tokyo Electron Limited

Inventor： Yuichiro Kunugimoto ,  Takafumi Hayama ,  Hidehiro Suzuki

IPC: G03F7/16 ,  H01L21/67 ,  B05B15/50

CPC classification number: G03F7/162 ,  B05B15/50 ,  H01L21/6715 ,  H01L21/67253

Abstract: There is provided a liquid processing apparatus comprising: a stage on which a substrate is placed; a nozzle configured to supply a processing liquid to the substrate placed on the stage and perform a processing on the substrate; a capturing part configured to capture an image of the nozzle so as to acquire image data; and a detector configured to detect a liquid level based on a plurality of the image data acquired by the capturing part at different timings within a period in which a supply of the processing liquid from the nozzle is not performed, wherein the liquid level is formed by the processing liquid or a liquid other than the processing liquid in a processing liquid flow path provided inside the nozzle.