公开(公告)号：US20220178994A1

公开(公告)日：2022-06-09

申请号：US17539951

申请日：2021-12-01

Applicant: TOKYO ELECTRON LIMITED

Inventor： Hiroaki AGAWA ,  Masahito KOBAYASHI ,  Shigeru KASAI

IPC: G01R31/28

Abstract: There is provided a control method of a test device, the test device comprising a chuck on which an object to be tested is mounted, a tester configured to supply electric power to the object to be tested to test the object to be tested, and a controller configured to control a temperature of the chuck. The control method comprises: when an actual temperature of the object to be tested cannot be fed back, estimating a temperature difference between the temperature of the chuck and the temperature of the object to be tested on the basis of a heat amount of the object to be tested; correcting a target temperature of the chuck on the basis of a target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck on the basis of the corrected target temperature of the chuck and an actual temperature of the chuck.

公开(公告)号：US20220104326A1

公开(公告)日：2022-03-31

申请号：US17447457

申请日：2021-09-13

Applicant: Tokyo Electron Limited

Inventor： Hiroaki AGAWA

IPC: H05B45/40 ,  G01R31/28 ,  H05B45/12

Abstract: A control method of an inspection apparatus including a stage on which a substrate having an inspection object to be inspected is mounted and a plurality of light sources configured to emit light to heat the substrate includes: individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate; obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions; obtaining one or more correction values for correcting an amount of light output from at least one or more light sources of the plurality of light sources based on the second temperature distribution; and correcting the amount of light output from each of the at least one or more light sources using the one or more correction values.

公开(公告)号：US20230110797A1

公开(公告)日：2023-04-13

申请号：US17932752

申请日：2022-09-16

Applicant: Tokyo Electron Limited

Inventor： Masahito KOBAYASHI ,  Hiroto KOBAYASHI ,  Hiroaki AGAWA

IPC: H01L21/677 ,  H01L21/68

Abstract: A stage includes a base on which an object to be transported or tested is placed, four movable bodies configured to support the base in a manner so that the base can be raised and lowered, four driving motors, provided in correspondence with the four movable bodies, and configured to independently raise and lower the four movable bodies, respectively, four guides configured to guide the four movable bodies, respectively, and a support frame, having wall surfaces parallel to a raising and lowering direction of the base and continuous along a direction perpendicular to the raising and lowering direction of the base, and the four guides fixed to the wall surfaces.