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公开(公告)号：US20210247786A1
公开(公告)日：2021-08-12
申请号：US17172655
申请日：2021-02-10
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masahito KOBAYASHI
Abstract: A temperature control device for controlling a temperature of a temperature control object is provided. The temperature control device includes a heating mechanism having a heating source configured to heat the temperature control object, a cooling mechanism having a cooling source configured to cool the temperature control object, an infrared sensor configured to measure the temperature of the temperature control object, and a temperature controller configured to allow a control system including a sliding mode control to control the heating mechanism and the cooling mechanism based on a measurement signal from the infrared sensor and perform a feedback control of the temperature of the temperature control object.
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公开(公告)号：US20210247248A1
公开(公告)日：2021-08-12
申请号：US17172686
申请日：2021-02-10
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masahito KOBAYASHI
Abstract: A lifetime estimation system for estimating a lifetime of a heating source is provided in an apparatus for heating a target object using the heating source and performing a feedback control of a target object temperature using a temperature controller based on a temperature measurement value of the target object measured by a temperature measuring device. The temperature controller controls a power supplied to the heating source and performs a temperature control using a state space model to perform the feedback control of the temperature of the target object. The lifetime estimation system includes a temperature monitor unit that monitors the temperature measurement value of the target object, a hunting amount detection unit that detects a hunting amount in a stable region of the monitored temperature of the target object, and a lifetime estimation unit that estimates a lifetime of the heating source from the detected hunting amount.
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公开(公告)号：US20230110797A1
公开(公告)日：2023-04-13
申请号：US17932752
申请日：2022-09-16
Applicant: Tokyo Electron Limited
Inventor： Masahito KOBAYASHI , Hiroto KOBAYASHI , Hiroaki AGAWA
IPC: H01L21/677 , H01L21/68
Abstract: A stage includes a base on which an object to be transported or tested is placed, four movable bodies configured to support the base in a manner so that the base can be raised and lowered, four driving motors, provided in correspondence with the four movable bodies, and configured to independently raise and lower the four movable bodies, respectively, four guides configured to guide the four movable bodies, respectively, and a support frame, having wall surfaces parallel to a raising and lowering direction of the base and continuous along a direction perpendicular to the raising and lowering direction of the base, and the four guides fixed to the wall surfaces.
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公开(公告)号：US20220262661A1
公开(公告)日：2022-08-18
申请号：US17627286
申请日：2020-05-19
Applicant: TOKYO ELECTRON LIMITED
Inventor： Shigeru KASAI , Masahito KOBAYASHI
Abstract: This temperature control device for controlling the temperature of an object that is subject to temperature control is provided with: a heating mechanism which has a heat source for heating said object subject to temperature control; a temperature measuring instrument for measuring the peripheral temperature of said object subject to temperature control; a temperature estimation unit for dynamically estimating the temperature of said object subject to temperature control on the basis of power inputted to the heat source, power supplied to said object subject to temperature control, and the peripheral temperature; and a temperature controller for performing control on the temperature of said object subject to temperature control by controlling the power inputted to the heat source on the basis of the estimated temperature of said object subject to temperature control.
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Patent Agency Ranking
公开(公告)号：US20220128603A1
公开(公告)日：2022-04-28
申请号：US17506372
申请日：2021-10-20
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masahito KOBAYASHI
Abstract: A test device for testing a substrate is provided. The device comprises: a mounting table for test on which the substrate under test is mounted; a transportation mechanism to transport the substrate under test; a mounting table for polishing on which a polishing substrate is mounted; a first forward or backward movement mechanism to move the mounting table for test with respect to a probe; and a second forward or backward movement mechanism to move the mounting table for polishing with respect to the probe, wherein the mounting table for polishing is provided separately from the mounting table for test, a retreat region of the mounting table for test is opposite to a retreat region of the mounting table for polishing, and the second forward or backward movement mechanism is configured such that a portion of the polishing substrate overlaps the probe while the other portion of the polishing substrate does not overlap the probe.
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公开(公告)号：US20220178994A1
公开(公告)日：2022-06-09
申请号：US17539951
申请日：2021-12-01
Applicant: TOKYO ELECTRON LIMITED
Inventor： Hiroaki AGAWA , Masahito KOBAYASHI , Shigeru KASAI
IPC: G01R31/28
Abstract: There is provided a control method of a test device, the test device comprising a chuck on which an object to be tested is mounted, a tester configured to supply electric power to the object to be tested to test the object to be tested, and a controller configured to control a temperature of the chuck. The control method comprises: when an actual temperature of the object to be tested cannot be fed back, estimating a temperature difference between the temperature of the chuck and the temperature of the object to be tested on the basis of a heat amount of the object to be tested; correcting a target temperature of the chuck on the basis of a target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck on the basis of the corrected target temperature of the chuck and an actual temperature of the chuck.
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公开(公告)号：US20210407829A1
公开(公告)日：2021-12-30
申请号：US17356939
申请日：2021-06-24
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masahito KOBAYASHI , Hiroyuki NAKAYAMA , Dai KOBAYASHI
IPC: H01L21/67 , G01R31/28 , G01R31/26 , H01L21/683
Abstract: A substrate support includes a supporting unit and a light irradiation mechanism. The supporting unit includes a plate member on which an inspection target is placed and a transparent member. The light irradiation mechanism is configured to irradiate light to increase a temperature of the inspection target. Each of the plate member and the transparent member is made of a low thermal expansion material having a linear expansion coefficient of 1.0×10−6/K or less.
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公开(公告)号：US20210405089A1
公开(公告)日：2021-12-30
申请号：US17350109
申请日：2021-06-17
Applicant: Tokyo Electron Limited
Inventor： Masahito KOBAYASHI
Abstract: An inspection apparatus includes: a probe card having a probe to be in contact with an object to be inspected; an upper module having a mounting portion on which the object to be inspected is mounted; a movement mechanism that is configured to support the upper module to be liftable and lowerable and that is able to move the upper module in a horizontal direction; and a lifting and lowering mechanism that is provided under the movement mechanism and that is able to push up the upper module toward the probe card, wherein an axis passing through a point of action of a pushing force when the lifting and lowering mechanism pushes up the upper module and an axis passing through a point of action of a load received by the probe card are arranged at positions to be common.
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公开(公告)号：US20200174066A1
公开(公告)日：2020-06-04
申请号：US16697486
申请日：2019-11-27
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masahito KOBAYASHI , Shigeru KASAI
IPC: G01R31/28
Abstract: A temperature control device for controlling a temperature of an object, the temperature control device includes a heater having a heating source configured to heat the object, a cooler having a cooling source configured to cool the object; and a temperature controller configured to control the heating source and the cooling source. The temperature controller includes a sliding mode controller configured to supply power to the heating source as an operation amount, a cooling mode controller configured to supply power to the cooling source as an operation amount, and a switching controller configured to determine whether an output of the sliding mode controller will be output to the heating source as a first operation amount, or an output of the cooling mode controller will be used as a second operation amount, based on a nonlinear term value of the output of the sliding mode controller.
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