公开(公告)号：US10256127B2

公开(公告)日：2019-04-09

申请号：US15278155

申请日：2016-09-28

Applicant: Tokyo Electron Limited

Inventor： Tokutarou Hayashi ,  Yuichi Douki ,  Hiromitsu Maejima

IPC: G05D3/12 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  G05B19/418

Abstract: A substrate transfer apparatus to transfer a circular substrate provided with a cutout at an edge portion thereof, includes: a sensor part including three light source parts applying light to positions different from one another at the edge portion, and three light receiving parts paired with the light source parts; and a drive part for moving the substrate holding part, wherein the three light source parts apply light to the light receiving parts so that whether or not a detection range of the sensor part overlaps with the cutout of the substrate is determined on the basis of an amount of received light by each light receiving part, and when it is determined that there is an overlap at any position, positions of the edge portion of the substrate are further detected with the position of the substrate displaced with respect to the sensor part.

公开(公告)号：US09507349B2

公开(公告)日：2016-11-29

申请号：US13752440

申请日：2013-01-29

Applicant: Tokyo Electron Limited

Inventor： Tokutarou Hayashi ,  Yuichi Douki ,  Hiromitsu Maejima

IPC: G05D3/12 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68

CPC classification number: H01L21/67259 ,  G05B19/4189 ,  G05B2219/45032 ,  G05B2219/45051 ,  G05D3/125 ,  H01L21/67742 ,  H01L21/681

Abstract: A substrate transfer apparatus to transfer a circular substrate provided with a cutout at an edge portion thereof, includes: a sensor part including three light source parts applying light to positions different from one another at the edge portion, and three light receiving parts paired with the light source parts; and a drive part for moving the substrate holding part, wherein the three light source parts apply light to the light receiving parts so that whether or not a detection range of the sensor part overlaps with the cutout of the substrate is determined on the basis of an amount of received light by each light receiving part, and when it is determined that there is an overlap at any position, positions of the edge portion of the substrate are further detected with the position of the substrate displaced with respect to the sensor part.

Abstract translation: 一种用于在其边缘部分传送设置有切口的圆形基板的基板传送装置，包括：传感器部分，包括三个光源部分，该光源部分将光施加到边缘部分处彼此不同的位置，以及三个光接收部分 光源部件; 以及用于移动所述基板保持部的驱动部，其中，所述三个光源部向所述受光部施加光，使得所述传感器部的检测范围是否与所述基板的切口重叠，基于 每个光接收部分的接收光量，并且当确定在任何位置处存在重叠时，基板的边缘部分的位置被进一步检测到基板相对于传感器部分移位的位置。