公开(公告)号：US20220238359A1

公开(公告)日：2022-07-28

申请号：US17581248

申请日：2022-01-21

Applicant: Tokyo Electron Limited

Inventor： Hiroto Sato ,  Takahiro Miki ,  Mitsuru Obara

IPC: H01L21/67 ,  G05D7/06

Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.

公开(公告)号：US12300525B2

公开(公告)日：2025-05-13

申请号：US17581248

申请日：2022-01-21

Applicant: Tokyo Electron Limited

Inventor： Hiroto Sato ,  Takahiro Miki ,  Mitsuru Obara

IPC: H01L21/67 ,  G05D7/06

Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.