公开(公告)号：US09649655B2

公开(公告)日：2017-05-16

申请号：US14277162

申请日：2014-05-14

Applicant: Tokyo Electron Limited

Inventor： Jun Yada ,  Shigeto Tsuruta

IPC: H04N7/18 ,  B05C5/02 ,  B05C11/10 ,  B05B15/02

CPC classification number: B05C5/0254 ,  B05B15/50 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1018

Abstract: Disclosed is a coating apparatus configured to properly detect a liquid surface of a coating liquid stored within a slit nozzle. The disclosed coating apparatus includes a slit nozzle, a moving mechanism, a storage portion illumination unit, and an imaging unit. The slit nozzle includes an elongated main body, a storage portion configured to store a coating liquid within the main body, and a slit-shaped ejecting port configured to eject the coating liquid fed from the storage portion through a slit-shaped flow path, wherein at least a part of each of a first wall and a second wall which face each other in the main body is formed of a transparent member. The moving mechanism is configured to move the slit nozzle with respect to a substrate. The storage portion illumination unit is configured to illuminate an inside of the storage portion through the transparent member of the first wall. The imaging unit is configured to image the inside of the storage portion through the transparent member of the second wall.

公开(公告)号：US20140347464A1

公开(公告)日：2014-11-27

申请号：US14277162

申请日：2014-05-14

Applicant: Tokyo Electron Limited

Inventor： Jun Yada ,  Shigeto Tsuruta

IPC: B05C9/12 ,  G06T7/00 ,  H04N7/18

CPC classification number: B05C5/0254 ,  B05B15/50 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1018

Abstract: Disclosed is a coating apparatus configured to properly detect a liquid surface of a coating liquid stored within a slit nozzle. The disclosed coating apparatus includes a slit nozzle, a moving mechanism, a storage portion illumination unit, and an imaging unit. The slit nozzle includes an elongated main body, a storage portion configured to store a coating liquid within the main body, and a slit-shaped ejecting port configured to eject the coating liquid fed from the storage portion through a slit-shaped flow path, wherein at least a part of each of a first wall and a second wall which face each other in the main body is formed of a transparent member. The moving mechanism is configured to move the slit nozzle with respect to a substrate. The storage portion illumination unit is configured to illuminate an inside of the storage portion through the transparent member of the first wall. The imaging unit is configured to image the inside of the storage portion through the transparent member of the second wall.

Abstract translation: 公开了一种被配置为适当地检测存储在狭缝喷嘴内的涂布液的液面的涂布装置。 公开的涂布装置包括狭缝喷嘴，移动机构，存储部照明单元和成像单元。 狭缝喷嘴包括细长主体，被配置为在主体内存储涂布液的存储部，以及狭缝状排出口，其配置为喷射通过狭缝状流路从储存部供给的涂布液，其中， 在主体中彼此面对的第一壁和第二壁中的每一个的至少一部分由透明构件形成。 移动机构构造成相对于基板移动狭缝喷嘴。 存储部照明单元通过第一壁的透明构件照射存储部的内部。 成像单元构造成通过第二壁的透明构件对储存部分的内部进行成像。