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公开(公告)号:US20240420359A1
公开(公告)日:2024-12-19
申请号:US18820492
申请日:2024-08-30
Applicant: Tokyo Electron Limited
Inventor: Toshihiro KITAO , Jun SHINAGAWA , Masato KAZUI , Makoto IGARASHI , Toshihiro OHNO
Abstract: The profile detecting method includes: detecting a specific shape included in a detection target image from the detection target image including the specific shape using a model that has learned a learning image including the specific shape and information regarding the specific shape included in the learning image; and outputting shape information of the detected specific shape.