公开(公告)号：US20220013402A1

公开(公告)日：2022-01-13

申请号：US17363401

申请日：2021-06-30

Applicant: Tokyo Electron Limited

Inventor： Melvin VERBAAS ,  Einosuke TSUDA ,  Kentaro ASAKURA

IPC: H01L21/687 ,  H05B3/22

Abstract: A stage device includes: a stage having a pin hole provided therein and a placement surface on which a substrate is placed; and at least one lift pin configured to move up and down through the pin hole; and a lifter configured to raise and lower the at least one lift pin, wherein the stage includes a first heating part provided therein and configured to heat the stage, and the at least one lift pin includes a second heating part provided therein or therearound and configured to heat the at least one lift pin.