公开(公告)号：US20210143033A1

公开(公告)日：2021-05-13

申请号：US17084934

申请日：2020-10-30

Applicant: Tokyo Electron Limited

Inventor： Shota KANEKO ,  Shigemi OONO ,  Norihide SAGARA

IPC: H01L21/67 ,  G05B19/406 ,  H04N7/18

Abstract: A monitoring system for a sealing apparatus, the sealing apparatus configured to seal a substrate treatment apparatus by a housing and fill a space sealed by the housing with a predetermined gas atmosphere, the monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller configured to output a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or output a notification signal based on the detection result.