公开(公告)号：US20190181031A1

公开(公告)日：2019-06-13

申请号：US16210364

申请日：2018-12-05

Applicant: Tokyo Electron Limited

Inventor： Toshiyuki KOBAYASHI ,  Ryu KITAHARA ,  Kazuya KOSHIISHI ,  Junya SATO ,  Shun SUTO ,  Toshimitsu CHIBA

IPC: H01L21/683 ,  H01L21/677 ,  H01L21/68 ,  H01L21/67

Abstract: A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.