公开(公告)号：US20240256919A1

公开(公告)日：2024-08-01

申请号：US18425060

申请日：2024-01-29

Applicant: Tokyo Electron Limited

Inventor： Yusuke TSUCHIYA ,  Masakazu YAMAMOTO ,  Hiroyuki KARASAWA

IPC: G06N5/022

CPC classification number: G06N5/022

Abstract: An information processing apparatus that identifies a machine difference in a heat treatment apparatus for heat-treating a processing target substrate includes a time series data acquisition unit that acquires time series data regarding temperature behavior of heat treatment apparatuses that have executed a recipe, a time series data prediction unit that predicts time series data regarding temperature behavior of the heat treatment apparatuses that have executed the recipe, using an ideal virtual model of the heat treatment apparatuses, a difference data calculation unit that calculates difference data between the acquired time series data and the predicted time series data for each of the heat treatment apparatuses, an adjustment unit that adjusts a parameter of the virtual model for each heat treatment apparatus, using the difference data, and a machine difference identification unit that identifies the machine difference candidate parameter based on a change in the parameter before and after adjustment.