公开(公告)号：US12253838B2

公开(公告)日：2025-03-18

申请号：US17584712

申请日：2022-01-26

Applicant: Tokyo Electron Limited

Inventor： Yuto Noda ,  Shota Yamazaki ,  Yuichi Takenaga ,  Toshiyuki Fukumoto

IPC: G05B13/04 ,  G05B13/02 ,  G05B23/02

Abstract: An information processing device includes: a machine learning model selection part configured to select a machine learning model appropriate for a data set used for learning of the machine learning model; a calculation part configured to perform an optimization calculation by using the selected machine learning model to calculate process conditions that can achieve a target process result, predicted values of a process result corresponding to each of the process conditions, and reliability of the predicted values; a process condition selection part configured to select, among the process conditions that can achieve the target process result, one or more process conditions according to the predicted values of the process result and the reliability of the predicted values; and a display controller configured to display the selected process conditions, the predicted values of the process result corresponding to each of the selected process conditions, and the reliability of the predicted values.

公开(公告)号：US20160363373A1

公开(公告)日：2016-12-15

申请号：US15172368

申请日：2016-06-03

Applicant: Tokyo Electron Limited

Inventor： Yuto Noda ,  Tatsuya Yamaguchi ,  Masayoshi Masunaga ,  Koji Yoshii

IPC: F27D19/00 ,  G06N3/12 ,  G05B13/04 ,  F27B1/10 ,  F27B1/02

CPC classification number: F27D19/00 ,  F27B1/02 ,  F27B1/10 ,  F27B17/0025 ,  F27D2019/0096 ,  G05B13/042 ,  G06N3/126 ,  H01L21/67109 ,  H01L21/67248

Abstract: The controller receives information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values, and performs a simulation based on the received information. Then, the controller calculates a value of an evaluation function based on a result of the simulation, and determines whether the calculated value of the evaluation function is minimum, to update parameters when it is determined that the value of the evaluation function is minimum. In the calculation of a value of the evaluation function, a value of the evaluation function is calculated again based on the number of times for calculating a value of an evaluation function. The controller generates new parameters by a genetic algorithm when a value of an evaluation function is calculated again.

Abstract translation: 控制器接收包括多个评价指标的信息，各评价指标的权重，用于计算评价函数的值的次数和初始参数值，并且基于接收到的信息进行模拟。 然后，控制器基于模拟结果计算评估函数的值，并且确定评估函数的计算值是否最小，以便在确定评估函数的值最小时更新参数。 在计算评价函数的值时，基于计算评价函数的值的次数再次计算评价函数的值。 当再次计算评估函数的值时，控制器通过遗传算法生成新参数。