公开(公告)号：US20230064860A1

公开(公告)日：2023-03-02

申请号：US17985006

申请日：2022-11-10

Applicant: Tokyo Seimitsu Co., Ltd.

Inventor： Hikaru MASUTA ,  Hideki MORII

IPC: G06T7/62 ,  G06T7/00 ,  G01B11/25

Abstract: A shape measurement device includes: a displacement detector configured to detect displacement of a contact; a relative movement mechanism configured to relatively move the displacement detector with respect to the measurement object, and allow the contact to trace a surface to be measured of the measurement object; a position detecting sensor configured to detect a relative position of the displacement detector with respect to the measurement object; a camera configured to image the contact, and output a captured image of the contact; and a synchronization controller configured to repetitively execute three actions in synchronization together while the relative movement is being performed by the relative movement mechanism, the actions including detection of the relative position by the position detecting sensor, detection of the displacement by the displacement detector, and imaging by the camera.

公开(公告)号：US20180149457A1

公开(公告)日：2018-05-31

申请号：US15879395

申请日：2018-01-24

Applicant: Tokyo Seimitsu Co., Ltd.

Inventor： Hikaru MASUTA

IPC: G01B3/22 ,  G01B5/08 ,  G01B5/20

CPC classification number: G01B3/22 ,  G01B5/08 ,  G01B5/10 ,  G01B5/20 ,  G01B5/201

Abstract: There are provided a surface shape measuring method and a surface shape measuring device which can measure the diameter of a workpiece to be measured with high precision and high reproducibility and have excellent versatility. These method include: acquiring first shape data indicating a surface shape of the workpiece with a detector being disposed on one side across a workpiece while rotating the workpiece relatively to the detector around a rotational center; acquiring second shape data indicating the surface shape of the workpiece with the detector being disposed on the other side across the workpiece while rotating the workpiece relatively to the detector around the rotational center; and calculating a shape parameter defining the surface shape of the workpiece by collating the first shape data and second shape data. In calculating the shape parameter, a deviation of the detector from the reference line is calculated based on the collation result.