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公开(公告)号：US20240393104A1
公开(公告)日：2024-11-28
申请号：US18795866
申请日：2024-08-06
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Yoshiyuki KAWATA , Katsufumi MORIYAMA , Hideki MORII
IPC: G01B11/24 , G01D5/347 , H04N23/695
Abstract: A surface shape measuring device includes a camera that captures the observation image acquired by the optical head, a drive unit that causes the optical head to scan relatively in a scanning direction perpendicular to the measurement target, an encoder for detecting a position of the optical head in the scanning direction with respect to the measurement target, an imaging instructing unit that instructs the camera to capture the observation image based on a position signal output from the encoder for each predetermined interval, a frame dropping occurrence rate calculating unit that calculates a frame dropping occurrence rate indicating an occurrence rate of frame dropping of the camera, and a measurement condition setting unit that sets a measurement condition for measuring a surface shape of the measurement target based on the frame dropping occurrence rate.
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公开(公告)号：US20230064860A1
公开(公告)日：2023-03-02
申请号：US17985006
申请日：2022-11-10
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hikaru MASUTA , Hideki MORII
Abstract: A shape measurement device includes: a displacement detector configured to detect displacement of a contact; a relative movement mechanism configured to relatively move the displacement detector with respect to the measurement object, and allow the contact to trace a surface to be measured of the measurement object; a position detecting sensor configured to detect a relative position of the displacement detector with respect to the measurement object; a camera configured to image the contact, and output a captured image of the contact; and a synchronization controller configured to repetitively execute three actions in synchronization together while the relative movement is being performed by the relative movement mechanism, the actions including detection of the relative position by the position detecting sensor, detection of the displacement by the displacement detector, and imaging by the camera.
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公开(公告)号：US20190360793A1
公开(公告)日：2019-11-28
申请号：US16535936
申请日：2019-08-08
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki MORII
Abstract: The detector for a surface measuring device includes: an arm including a contact at a tip end of the arm; a rotation shaft configured to rotatably support the arm; a transmission part having one end connected to the arm at a position on a side opposite to the contact with respect to the rotation shaft; an elastic part having one end connected to another end of the transmission part and configured to generate a measuring force to be applied to the contact; a position adjusting part connected to another end of the elastic part and configured to move a position of the another end of the elastic part in a moving direction; and a tilt adjusting part connected to the arm and including a contact part arranged at position where the contact part can be brought into contact with the transmission part.
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公开(公告)号：US20240393097A1
公开(公告)日：2024-11-28
申请号：US18795599
申请日：2024-08-06
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Yoshiyuki KAWATA , Katsufumi MORIYAMA , Hideki MORII
IPC: G01B9/02055 , G01B11/24
Abstract: A three-dimensional shape measuring device includes a holder that changes the reference light path length in response to temperature change, and a temperature adjusting unit that adjusts a temperature of the holder to a target temperature, so as to make a measurement light path length equal to a reference light path length with high accuracy at low cost regardless of a temperature of an installation environment. A three-dimensional shape measuring device includes a temperature adjusting unit that adjusts the temperature of the holder and a temperature control unit that controls the temperature adjusting unit so as to selectively switch a measurement mode between a first measurement mode in which the reference light path length is made equal to a measurement light path length and a second measurement mode in which the reference light path length is made different from the measurement light path length.
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公开(公告)号：US20230028748A1
公开(公告)日：2023-01-26
申请号：US17939226
申请日：2022-09-07
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki MORII , Katsufumi MORIYAMA , Hiroaki KIMURA
Abstract: The following are observed using a camera: a first position of a small hole of a workpiece, which is fixed to a linear-and-tilting-motion stage and rotating with a rotating body, and a second position thereof different from the first position, at a first rotation angle of the rotating body; and the first position and the second position of the small hole of the workpiece at a second rotation angle different from the first rotation angle of the rotating body. A position and a tilt of the small hole are calculated from coordinates of the respective observed positions, and small hole information, which includes the position and the tilt of the small hole, is outputted.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20210285751A1
公开(公告)日：2021-09-16
申请号：US17336794
申请日：2021-06-02
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki MORII
Abstract: Provided are a displacement detector, a surface shape measuring apparatus, and a roundness measuring apparatus capable of measuring displacement in a plurality of directions, having a simple configuration, and capable of highly accurate measurement. A displacement measurer includes: a detector body; a substantially L-shaped stylus having a contactor to be in contact with a measuring surface of an object to be measured; a stylus holding part that is provided in the detector body and holds the stylus in a swingable manner, with a swing plane being a plane including a first direction and a second direction that are perpendicular to each other; and a displacement detecting unit that is provided in the detector body and detects displacement of the contactor associated with contact between the contactor and the measuring surface.
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公开(公告)号：US20190368855A1
公开(公告)日：2019-12-05
申请号：US16544609
申请日：2019-08-19
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki MORII
Abstract: There are provided a detector, a surface property measuring machine and a roundness measuring machine for automatically measuring a plurality of surfaces to shorten the time necessary for measurement. This problem is solved by a detector provided with a stylus for supporting a contact coming in contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to hold the holder to be capable of swinging by a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, wherein the holder holds the stylus such that a stylus axis as an axis of the stylus and a body axis as an axis of the body are in parallel, and the stylus axis and the body axis are offset in a first direction perpendicular to the body axis and the rotating shaft.
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公开(公告)号：US20240393098A1
公开(公告)日：2024-11-28
申请号：US18795910
申请日：2024-08-06
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Yoshiyuki KAWATA , Katsufumi MORIYAMA , Hideki MORII
IPC: G01B9/02055 , G01B11/24
Abstract: An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method including; measuring the master for adjustment in an adjusted state in which a focus position matches an interference position and calculating and storing a matching degree parameter indicating a matching degree between the focus position and the interference position as an adjustment matching degree parameter; when the measurement target is measured, measuring the master for adjustment, calculating the matching degree parameter and comparing the matching degree parameter with the adjustment matching degree parameter, to confirm the matching degree.
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公开(公告)号：US20230417797A1
公开(公告)日：2023-12-28
申请号：US18459132
申请日：2023-08-31
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Natsumi HAYASHI , Hideki MORII , Tetsuo YOSHIDA , Toshiyuki KIMURA
CPC classification number: G01R1/06711 , G01R1/07314
Abstract: The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.
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公开(公告)号：US20230052870A1
公开(公告)日：2023-02-16
申请号：US17976612
申请日：2022-10-28
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki MORII , Takuya INOUE
Abstract: A measurement device includes: a probe part including a probe configured to measure a surface of an object to be measured and is attached so as to swing around a swing center according to a shape of the surface of the object to be measured; a scale configured to measure displacement by swinging of the probe part; a scale head configured to read a scale mark of the scale; and an arm part to which the probe part is attached, the arm part is attached so as to swing around the swing center integrally with the probe part, and the scale is attached to the arm part. When thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, the measurement device satisfies a condition of α
+
γ −
1
/
2
α
≤
β
≤
α
+
γ +
1
/
2
α
.
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