公开(公告)号：US20230417797A1

公开(公告)日：2023-12-28

申请号：US18459132

申请日：2023-08-31

Applicant: Tokyo Seimitsu Co., Ltd.

Inventor： Natsumi HAYASHI ,  Hideki MORII ,  Tetsuo YOSHIDA ,  Toshiyuki KIMURA

IPC: G01R1/067 ,  G01R1/073

CPC classification number: G01R1/06711 ,  G01R1/07314

Abstract: The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.