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    Method for manufacturing perpendicular magnetic recording head
    1.
    发明授权
    Method for manufacturing perpendicular magnetic recording head 有权
    制造垂直磁记录头的方法

    公开(公告)号：US08137571B2

    公开(公告)日：2012-03-20

    申请号：US12381972

    申请日：2009-03-17

    申请人： Tomohiro Okada ,  Hisashi Kimura ,  Taku Shintani ,  Tadashi Umezawa

    发明人： Tomohiro Okada ,  Hisashi Kimura ,  Taku Shintani ,  Tadashi Umezawa

    IPC分类号： B44C1/22

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

    摘要： Embodiments of the present invention help to provide a method for manufacturing a perpendicular magnetic recording head including a main magnetic pole having a width that does not generally vary. According to one embodiment, a magnetic film, a first inorganic mask film, an organic film, a second inorganic mask film, and a resist pattern are formed in this order. Reactive ion etching (RIE) is performed using the resist pattern as a mask to etch the second inorganic mask film and the organic film and form a mask for the subsequent step. A flow rate of an Ar gas is then controlled, and ion milling is performed, to correct a difference between the width of the mask located at the central portion of the wafer and the width of the mask located at the outer peripheral portion of the wafer. The magnetic film is processed to have a uniform track width. Ion milling is then performed to form the main magnetic pole having an inverted trapezoidal shape.

    摘要翻译： 本发明的实施例有助于提供一种用于制造垂直磁记录头的方法，所述垂直磁记录头包括具有通常不变化的宽度的主磁极。 根据一个实施例，依次形成磁性膜，第一无机掩模膜，有机膜，第二无机掩模膜和抗蚀剂图案。 使用抗蚀剂图案作为掩模进行反应离子蚀刻（RIE），以蚀刻第二无机掩模膜和有机膜并形成用于后续步骤的掩模。 然后控制Ar气体的流量，进行离子铣削，以校正位于晶片中心部分的掩模的宽度与位于晶片外周部分的掩模的宽度之间的差异 。 磁膜被处理成具有均匀的轨迹宽度。 然后进行离子铣削以形成具有倒梯形形状的主磁极。

    Method for manufacturing perpendicular magnetic recording head
    2.
    发明申请
    Method for manufacturing perpendicular magnetic recording head 有权
    制造垂直磁记录头的方法

    公开(公告)号：US20090236307A1

    公开(公告)日：2009-09-24

    申请号：US12381972

    申请日：2009-03-17

    申请人： Tomohiro Okada ,  Hisashi Kimura ,  Taku Shintani ,  Tadashi Umezawa

    发明人： Tomohiro Okada ,  Hisashi Kimura ,  Taku Shintani ,  Tadashi Umezawa

    IPC分类号： B44C1/22

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

    摘要： Embodiments of the present invention help to provide a method for manufacturing a perpendicular magnetic recording head including a main magnetic pole having a width that does not generally vary. According to one embodiment, a magnetic film, a first inorganic mask film, an organic film, a second inorganic mask film, and a resist pattern are formed in this order. Reactive ion etching (RIE) is performed using the resist pattern as a mask to etch the second inorganic mask film and the organic film and form a mask for the subsequent step. A flow rate of an Ar gas is then controlled, and ion milling is performed, to correct a difference between the width of the mask located at the central portion of the wafer and the width of the mask located at the outer peripheral portion of the wafer. The magnetic film is processed to have a uniform track width. Ion milling is then performed to form the main magnetic pole having an inverted trapezoidal shape.

    摘要翻译： 本发明的实施例有助于提供一种用于制造垂直磁记录头的方法，所述垂直磁记录头包括具有通常不变化的宽度的主磁极。 根据一个实施例，依次形成磁性膜，第一无机掩模膜，有机膜，第二无机掩模膜和抗蚀剂图案。 使用抗蚀剂图案作为掩模进行反应离子蚀刻（RIE），以蚀刻第二无机掩模膜和有机膜并形成用于后续步骤的掩模。 然后控制Ar气体的流量，进行离子铣削，以校正位于晶片中心部分的掩模的宽度与位于晶片外周部分的掩模的宽度之间的差异 。 磁膜被处理成具有均匀的轨迹宽度。 然后进行离子铣削以形成具有倒梯形形状的主磁极。

    Magnetic head with electro lapping guide
    3.
    发明授权
    Magnetic head with electro lapping guide 失效
    磁头与电动研磨导轨

    公开(公告)号：US08351162B2

    公开(公告)日：2013-01-08

    申请号：US11192532

    申请日：2005-07-29

    申请人： Kimitoshi Etoh ,  Hisashi Kimura ,  Isao Nunokawa ,  Tomohiro Okada

    发明人： Kimitoshi Etoh ,  Hisashi Kimura ,  Isao Nunokawa ,  Tomohiro Okada

    IPC分类号： G11B5/33 ,  G11B5/147

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3967 ,  Y10T29/49041

    摘要： Embodiments of the invention reduce the throat height of a single pole type head with high accuracy. In one embodiment, a head with an electro lapping guide for controlling a write head's throat height during air bearing surface processing is made. Air bearing surface processing is performed using the electro lapping guide. For a read head, processing is performed using the read head itself or an electro lapping guide for the read head so that both the throat height of write head and the element height of read head are controlled.

    摘要翻译： 本发明的实施例以高精度降低单极型头部的喉部高度。 在一个实施例中，制造具有用于在空气轴承表面处理期间控制写头的喉部高度的电研磨引导件的头部。 使用电动研磨导轨执行空气轴承表面处理。 对于读头，使用读头本身或读头的电研磨引导件进行处理，以便控制写头的喉部高度和读头的元件高度。

    Optically assisted magnetic recording head having a waveguide core with a plate-shaped portion protruding from an air bearing surface side of the core
    5.
    发明授权
    Optically assisted magnetic recording head having a waveguide core with a plate-shaped portion protruding from an air bearing surface side of the core 有权
    光辅助磁记录头具有波导芯，其具有从芯的空气轴承表面侧突出的板状部分

    公开(公告)号：US08270260B2

    公开(公告)日：2012-09-18

    申请号：US12636672

    申请日：2009-12-11

    申请人： Tomohiro Okada ,  Hisashi Kimura ,  Tutomu Yasuda ,  Kimitoshi Etoh

    发明人： Tomohiro Okada ,  Hisashi Kimura ,  Tutomu Yasuda ,  Kimitoshi Etoh

    IPC分类号： G11B11/00

    CPC分类号： G11B5/314 ,  G11B5/4866 ,  G11B2005/001 ,  G11B2005/0021

    摘要： An optically assisted magnetic recording head causes light to be efficiently incident on a near-field light generating element and is thereby capable of efficiently generating near-field light. The optically assisted magnetic recording head, according to one embodiment, has a waveguide and a thin metal film. The waveguide has a core and a clad at least partially surrounding the core and serves as near-field light generating device. The core has a plate-shaped portion that has a small width and protrudes from an edge of the core. The edge of the core is located on the air bearing surface side. The thin metal film is provided on an upper portion and side portions of the plate-shaped portion to cover the edge of the core at the air bearing surface side. Other systems and methods are disclosed as well to achieve efficient incident light on a near-field light generating element.

    摘要翻译： 光辅助磁记录头使光有效地入射到近场光产生元件上，从而能够有效地产生近场光。 根据一个实施例的光辅助磁记录头具有波导和薄金属膜。 波导具有至少部分地围绕芯并且用作近场光产生装置的芯和包层。 芯具有板状部分，其具有小的宽度并且从芯的边缘突出。 芯的边缘位于空气轴承表面侧。 该薄金属膜设置在板状部分的上部和侧部，以覆盖空气轴承表面侧的芯的边缘。 还公开了其它系统和方法以实现近场光产生元件上的有效入射光。

    OPTICALLY ASSISTED MAGNETIC RECORDING HEAD HAVING A WAVEGUIDE CORE WITH A PLATE-SHAPED PORTION AND METHOD OF MANUFACTURE THEREOF
    7.
    发明申请
    OPTICALLY ASSISTED MAGNETIC RECORDING HEAD HAVING A WAVEGUIDE CORE WITH A PLATE-SHAPED PORTION AND METHOD OF MANUFACTURE THEREOF 有权
    具有板形部分的波导磁芯的光学辅助磁记录头及其制造方法

    公开(公告)号：US20100157745A1

    公开(公告)日：2010-06-24

    申请号：US12636672

    申请日：2009-12-11

    申请人： Tomohiro Okada ,  Hisashi Kimura ,  Tutomu Yasuda

    发明人： Tomohiro Okada ,  Hisashi Kimura ,  Tutomu Yasuda

    IPC分类号： G11B11/00 ,  G11B5/127

    CPC分类号： G11B5/314 ,  G11B5/4866 ,  G11B2005/001 ,  G11B2005/0021

    摘要： An optically assisted magnetic recording head causes light to be efficiently incident on a near-field light generating element and is thereby capable of efficiently generating near-field light. The optically assisted magnetic recording head, according to one embodiment, has a waveguide and a thin metal film. The waveguide has a core and a clad at least partially surrounding the core and serves as near-field light generating device. The core has a plate-shaped portion that has a small width and protrudes from an edge of the core. The edge of the core is located on the air bearing surface side. The thin metal film is provided on an upper portion and side portions of the plate-shaped portion to cover the edge of the core at the air bearing surface side. Other systems and methods are disclosed as well to achieve efficient incident light on a near-field light generating element.

    摘要翻译： 光辅助磁记录头使光有效地入射到近场光产生元件上，从而能够有效地产生近场光。 根据一个实施例的光辅助磁记录头具有波导和薄金属膜。 波导具有至少部分地围绕芯并且用作近场光产生装置的芯和包层。 芯具有板状部分，其具有小的宽度并且从芯的边缘突出。 芯的边缘位于空气轴承表面侧。 该薄金属膜设置在板状部分的上部和侧部，以覆盖空气轴承表面侧的芯的边缘。 还公开了其它系统和方法以实现近场光产生元件上的有效入射光。

    Manufacturing method of a perpendicular recording magnetic head
    8.
    发明申请
    Manufacturing method of a perpendicular recording magnetic head 失效
    垂直记录磁头的制造方法

    公开(公告)号：US20070186409A1

    公开(公告)日：2007-08-16

    申请号：US11645104

    申请日：2006-12-21

    申请人： Kimitoshi Etoh ,  Kikuo Kusukawa ,  Hisashi Kimura ,  Tomohiro Okada

    发明人： Kimitoshi Etoh ,  Kikuo Kusukawa ,  Hisashi Kimura ,  Tomohiro Okada

    IPC分类号： G11B5/147

    CPC分类号： G11B5/1278 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： Embodiments in accordance with the present invention relate to methods wherein when a main pole is processed by using an ion milling technique, a re-adhesion layer created on the side face of the resist mask is removed with certainty. In one embodiment, an inorganic insulator from 5 nm to 100 nm which is soluble in an alkaline is arranged between the main pole material and a mask for processing the main pole material, and the main pole is processed by ion milling. After this process, the mask is peeled off, a surface treatment is performed by using an alkaline solution, resulting in the re-deposition film being removed.

    摘要翻译： 根据本发明的实施例涉及其中当通过使用离子铣削技术处理主极时，确定地去除在抗蚀剂掩模的侧面上产生的再粘附层的方法。 在一个实施例中，在主极材料和用于加工主极材料的掩模之间布置有可溶于碱的5nm至100nm的无机绝缘体，并且通过离子铣削处理主极。 在该方法之后，将掩模剥离，通过使用碱溶液进行表面处理，导致再沉积膜被除去。