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公开(公告)号：US07365323B2
公开(公告)日：2008-04-29
申请号：US11354067
申请日：2006-02-15
IPC分类号： H01J37/28
CPC分类号： H01J37/265 , G01N23/04 , H01J37/09 , H01J37/18 , H01J37/28 , H01J2237/1825 , H01J2237/188 , H01J2237/2608
摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.
摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。
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公开(公告)号：US20060219912A1
公开(公告)日：2006-10-05
申请号：US11354067
申请日：2006-02-15
CPC分类号： H01J37/265 , G01N23/04 , H01J37/09 , H01J37/18 , H01J37/28 , H01J2237/1825 , H01J2237/188 , H01J2237/2608
摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.
摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。
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