公开(公告)号：US07365323B2

公开(公告)日：2008-04-29

申请号：US11354067

申请日：2006-02-15

申请人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

发明人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

IPC分类号： H01J37/28

CPC分类号： H01J37/265 ,  G01N23/04 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2608

摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。

公开(公告)号：US20060219912A1

公开(公告)日：2006-10-05

申请号：US11354067

申请日：2006-02-15

申请人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

发明人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/265 ,  G01N23/04 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2608

摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。

公开(公告)号：US20090057558A1

公开(公告)日：2009-03-05

申请号：US12194141

申请日：2008-08-19

申请人： Toru Iwaya ,  Kenichi Hirane ,  Tomohisa Ohtaki

发明人： Toru Iwaya ,  Kenichi Hirane ,  Tomohisa Ohtaki

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J37/065 ,  H01J37/067 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/0835

摘要： An object of the invention is provide a scanning electron microscope including a permanent magnet forming a condenser lens with a variable value of probe current.To achieve the object, the scanning electron microscope including the permanent magnet forming the condenser lens as an embodiment of the invention, includes a mechanism for adjusting a distance between an electron source and an anode electrode. Further, the mechanism for adjusting the distance between the electron source and the anode electrode, includes a removable spacer arranged under a lower portion of the anode electrode.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括形成具有可变探头电流值的聚光透镜的永磁体。 为了实现该目的，包括形成聚光透镜的永磁体作为本发明的实施例的扫描电子显微镜包括用于调节电子源和阳极之间的距离的机构。 此外，用于调整电子源和阳极电极之间的距离的机构包括布置在阳极电极的下部下方的可移除间隔物。

公开(公告)号：US20080271001A1

公开(公告)日：2008-10-30

申请号：US11853058

申请日：2007-09-11

申请人： Yo Nonomura ,  Shunsuke Ota ,  Takashi Endo ,  Takashi Tsukamoto ,  Ichiro Kyushima ,  Hiromi Nagayama ,  Kenichi Hirane ,  Yoshiyuki Amanuma

发明人： Yo Nonomura ,  Shunsuke Ota ,  Takashi Endo ,  Takashi Tsukamoto ,  Ichiro Kyushima ,  Hiromi Nagayama ,  Kenichi Hirane ,  Yoshiyuki Amanuma

IPC分类号： G06F9/45

CPC分类号： G06F21/77 ,  G06F8/41 ,  G06F21/125

摘要： In programming in high-level language, a method of generating a program supporting external specifications for generating secure codes having high tamper-resistance and automatically generating an executable program having tamper-resistance with regard to a portion designated by a user is provided. A syntax analysis step, an intermediate representation generation step, a register allocation step, an optimization processing step, an assembly language generation step, a machine language generation step and a machine language program linkage step are executed. And between finish of reading of the source program and generating the executable program, a tamper-resistant code insertion step of automatically generating a code having tamper-resistance coping with unjust analysis of an operation content of the executable program is executed to the source program, the intermediate representation, the assembly language program or the machine language program based on an instruction of a user.

摘要翻译： 在高级语言编程中，提供一种产生支持用于生成具有高抗篡改性的安全代码的外部规范的程序的方法，并且自动生成关于由用户指定的部分具有防篡改的可执行程序。 执行语法分析步骤，中间表示生成步骤，寄存器分配步骤，优化处理步骤，汇编语言生成步骤，机器语言生成步骤和机器语言程序链接步骤。 并且在源程序的读取完成和生成可执行程序之间，对源程序执行防篡改代码插入步骤，其自动产生具有防篡改的代码，并对不可执行程序的操作内容进行不正确的分析， 中间表示，汇编语言程序或基于用户的指令的机器语言程序。

公开(公告)号：US20050218777A1

公开(公告)日：2005-10-06

申请号：US11137445

申请日：2005-05-26

申请人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

发明人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

IPC分类号： H01J37/06 ,  G09G1/04 ,  H01J37/065 ,  H01J37/24 ,  H01J37/248 ,  H01L21/027 ,  H05B39/04

CPC分类号： H01J37/241 ,  H01J2237/0206

摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.

公开(公告)号：US07274017B2

公开(公告)日：2007-09-25

申请号：US11137445

申请日：2005-05-26

申请人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

发明人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

IPC分类号： H01J37/00

CPC分类号： H01J37/241 ,  H01J2237/0206

摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.

摘要翻译： 公开了一种电子束装置和方法，其可以保持使高压电缆和高压引入绝缘体之间的间隙中含有的含水量最小化的状态，从而防止高压放电和电流泄漏的产生。 该装置包括用于向加速电极施加高电压同时消除电子从电子源的释放并且用于检测与此时加速电压的变化相对应的发射电流的变化的装置。 此外，该装置包括当该发射电流的变化超过预定值时发出警告通知或警告的装置。 此外，该装置包括用于使干燥气体在电子枪的高压电缆和高压引入绝缘体之间的间隙部分中流动从而对所述间隙部分进行除湿的装置。 通过这样的布置，可以防止由于间隙部分的水分含量增加引起的高压放电以及由于漏电流引起的电子束的不稳定性。

公开(公告)号：US06949752B2

公开(公告)日：2005-09-27

申请号：US10295951

申请日：2002-11-18

申请人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

发明人： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

IPC分类号： H01J37/06 ,  G09G1/04 ,  H01J37/065 ,  H01J37/24 ,  H01J37/248 ,  H01L21/027 ,  H05B39/04

CPC分类号： H01J37/241 ,  H01J2237/0206

摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.

摘要翻译： 公开了一种电子束装置和方法，其可以保持使高压电缆和高压引入绝缘体之间的间隙中含有的含水量最小化的状态，从而防止高压放电和电流泄漏的产生。 该装置包括用于向加速电极施加高电压同时消除电子从电子源的释放并且用于检测与此时加速电压的变化相对应的发射电流的变化的装置。 此外，该装置包括当该发射电流的变化超过预定值时发出警告通知或警告的装置。 此外，该装置包括用于使干燥气体在电子枪的高压电缆和高压引入绝缘体之间的间隙部分中流动从而对所述间隙部分进行除湿的装置。 通过这样的布置，可以防止由于间隙部分的水分含量增加引起的高压放电以及由于漏电流引起的电子束的不稳定性。

公开(公告)号：US5047647A

公开(公告)日：1991-09-10

申请号：US582083

申请日：1990-09-14

申请人： Hiroyuki Itoh ,  Kenichi Hirane

发明人： Hiroyuki Itoh ,  Kenichi Hirane

IPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/304 ,  H01J37/305 ,  H01L21/027

CPC分类号： H01J37/304

摘要： An electron beam lithography apparatus comprising an electron lens, a deflector, a reflective electron detector of marks on a stage or a specimen thereon when the deflector scans the marks, and a means for memorizing high order polynomial equations and calculating a correcting value of the deflector controlling means based on the high order polynomial equations, wherein all coefficients of the high order polynomial equation are calculated when the electron beam lithography apparatus starts up, and after then, coefficient of the first order term is calculated from the position signals of the marks frequently in a short cycle.

摘要翻译： 一种电子束光刻设备，当偏转器扫描标记时，包括电子透镜，偏转器，舞台上的标记的反射电子检测器或其上的标本，以及用于存储高阶多项式方程和计算偏转器的校正值的装置 基于高阶多项式方程式的控制装置，其中当电子束光刻设备启动时计算高阶多项式方程式的所有系数，然后根据标记的位置信号频繁地计算一阶项的系数 在一个短的周期。