公开(公告)号：US20100134116A1

公开(公告)日：2010-06-03

申请号：US12294888

申请日：2007-03-09

申请人： Toru Ikeda ,  Junji Aoki ,  Kotaro Takijiri

发明人： Toru Ikeda ,  Junji Aoki ,  Kotaro Takijiri

IPC分类号： G01N27/62

CPC分类号： G01N27/62 ,  H01J49/00

摘要： Provided is an excellent residual gas analyzer, which can perform measurement by being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurement to display of measurement results without an external personal computer. The analyzer is provided with a sensor unit (1) having a sensor section (11) for detecting a residual gas; an operating section for receiving operation for controlling the sensor section (11); a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section (11); and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body (2) which can be in a mounted status (P1) wherein the sensor unit (1) is mounted or in a removed status (P2) wherein the sensor unit is removed.

摘要翻译： 提供了一种优异的残留气体分析器，其可以通过适当地布置在诸如半导体设备中的小区域中来进行测量，并且可以在没有外部个人计算机的情况下进行测量以显示测量结果。 该分析仪具有传感器单元（1），该传感器单元具有用于检测残余气体的传感器部分（11） 用于接收用于控制传感器部分（11）的操作的操作部分; 残留气体分析处理部，其基于所述传感器部（11）的输出来进行所述残留气体的分析处理。 以及分析处理结果画面显示部，用于在画面上显示从残留气体分析处理部得到的分析处理结果。 分析仪还设置有可以处于其中安装传感器单元（1）的安装状态（P1）的装置主体（2）或其中传感器单元被移除的去除状态（P2）。

公开(公告)号：US08054081B2

公开(公告)日：2011-11-08

申请号：US12294888

申请日：2007-03-09

申请人： Toru Ikeda ,  Junji Aoki ,  Kotaro Takijiri

发明人： Toru Ikeda ,  Junji Aoki ,  Kotaro Takijiri

IPC分类号： G01N27/62

CPC分类号： G01N27/62 ,  H01J49/00

摘要： Provided is an excellent residual gas analyzer, which can perform measurements while being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurements for display of measurement results without an external personal computer. The analyzer is provided with a sensor unit having a sensor section for detecting a residual gas; an operating section for receiving operation for controlling the sensor section; a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section; and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body which can be in a mounted status wherein the sensor unit is mounted or in a removed status wherein the sensor unit is removed.

摘要翻译： 本发明提供了一种优良的残留气体分析装置，即使在半导体装置等的小区域中也能适当地进行测量，并且可以在没有外部个人计算机的情况下进行测量结果的显示的测量。 分析仪设置有具有用于检测残留气体的传感器部分的传感器单元; 用于接收用于控制传感器部分的操作的操作部分; 残留气体分析处理部，其基于来自所述传感器部的输出来对所述残留气体进行分析处理; 以及分析处理结果画面显示部，用于在画面上显示从残留气体分析处理部得到的分析处理结果。 分析仪还设置有可以处于安装状态的装置主体，其中安装传感器单元或处于去除状态，其中传感器单元被移除。

公开(公告)号：US20100108154A1

公开(公告)日：2010-05-06

申请号：US12610019

申请日：2009-10-30

申请人： Masakazu Minami ,  Daisuke Hayashi ,  Yuhei Sakaguchi ,  Katsumi Nishimura ,  Masaki Inoue ,  Kotaro Takijiri

发明人： Masakazu Minami ,  Daisuke Hayashi ,  Yuhei Sakaguchi ,  Katsumi Nishimura ,  Masaki Inoue ,  Kotaro Takijiri

IPC分类号： G05D11/08

CPC分类号： G05D11/132 ,  Y10T137/0396 ,  Y10T137/2499 ,  Y10T137/2509 ,  Y10T137/2708

摘要： A material gas concentration control system for keeping a concentration of a material gas in a mixed gas constant comprising a tank to accommodate the material, an inlet line to input a carrier gas for evaporating the accommodated material into the tank, and an outlet line to output the mixed gas consisting of the material gas evaporated in the tank and the carrier gas, and further comprising a first valve arranged in the inlet line, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a concentration control part that controls an open degree of the first valve so as to make the measured concentration of the material gas measured by the concentration measuring part become the previously determined set concentration.

摘要翻译： 一种材料气体浓度控制系统，用于保持包含罐的混合气体中的材料气体的浓度恒定以容纳材料，输入用于将所容纳的材料蒸发到罐中的载气的输入管线和输出的出口管线 所述混合气体由在所述罐中的所述原料气体和所述载气组成，还包括配置在所述入口管路中的第一阀，测量所述混合气体中的原料气体的浓度的浓度测定部，以及浓度控制 控制第一阀的开度的部分，使得由浓度测量部测量的材料气体的测量浓度变为预先确定的设定浓度。

公开(公告)号：US08459290B2

公开(公告)日：2013-06-11

申请号：US12610019

申请日：2009-10-30

申请人： Masakazu Minami ,  Daisuke Hayashi ,  Yuhei Sakaguchi ,  Katsumi Nishimura ,  Masaki Inoue ,  Kotaro Takijiri

发明人： Masakazu Minami ,  Daisuke Hayashi ,  Yuhei Sakaguchi ,  Katsumi Nishimura ,  Masaki Inoue ,  Kotaro Takijiri

IPC分类号： B05C11/00

CPC分类号： G05D11/132 ,  Y10T137/0396 ,  Y10T137/2499 ,  Y10T137/2509 ,  Y10T137/2708

摘要： A material gas concentration control system for keeping a concentration of a material gas in a mixed gas constant comprising a tank to accommodate the material, an inlet line to input a carrier gas for evaporating the accommodated material into the tank, and an outlet line to output the mixed gas consisting of the material gas evaporated in the tank and the carrier gas, and further comprising a first valve arranged in the inlet line, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a concentration control part that controls an open degree of the first valve so as to make the measured concentration of the material gas measured by the concentration measuring part become the previously determined set concentration.

摘要翻译： 一种材料气体浓度控制系统，用于保持包含罐的混合气体中的材料气体的浓度恒定以容纳材料，输入用于将所容纳的材料蒸发到罐中的载气的输入管线和输出的出口管线 所述混合气体由在所述罐中的所述原料气体和所述载气组成，还包括配置在所述入口管路中的第一阀，测量所述混合气体中的原料气体的浓度的浓度测定部， 控制第一阀的开度的部分，使得由浓度测量部测量的材料气体的测量浓度变为预先确定的设定浓度。