公开(公告)号：US20220013367A1

公开(公告)日：2022-01-13

申请号：US17483052

申请日：2021-09-23

Applicant: Toshiba Memory Corporation

Inventor： Yasuhito YOSHIMIZU ,  Hiroyuki YASUI ,  Yuya AKEBOSHI ,  Fuyuma ITO

IPC: H01L21/306 ,  H01J37/32 ,  H01L21/67 ,  H01L21/02 ,  H01L21/311

Abstract: A plasma treatment apparatus includes a discharge device generating plasma under atmospheric pressure, and a nonmetallic tube capable of advancing the plasma generated in the discharge device. The discharge device includes a discharge body with an internal space, and the plasma being generated in the internal space. The nonmetallic tube is connected to the discharge body, and includes a material different from a material of the discharge body. The plasma is released from the nonmetallic tube to an environment under atmospheric pressure.