公开(公告)号：US20020148815A1

公开(公告)日：2002-10-17

申请号：US10172532

申请日：2002-06-13

申请人： Toshiba Tec Kabushiki Kaisha

发明人： Isao Suzuki ,  Masahi Shimosato ,  Hiroshi Ito

IPC分类号： B23K026/38 ,  B23K026/067

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/384 ,  B41J2/162

摘要： The present invention comprises an array lens illumination system for shaping laser light in a band-like beam, a mask which is arranged in an optical path of the laser light from the array lens illumination system and on which a plurality of circular apertures are formed in a staggered shape in accordance with an arranged state of orifices formed on an orifice plate, a shift member which is arranged at the incident side of the laser light rather than the mask, and which splits the laser light incident on the mask into a plurality of beams in accordance with the number of circular apertures and irradiates the split beams onto the respective circular apertures of the mask, and a projecting lens for forming an image of the laser light passing through the mask on the orifice plate.

摘要翻译： 本发明包括一种阵列透镜照明系统，用于在带状光束中成形激光，掩模被布置在来自阵列透镜照明系统的激光的光路中，并且其上形成有多个圆形孔 根据形成在孔板上的孔口的布置状态的交错形状，布置在激光的入射侧而不是掩模的移动构件，并且将入射在掩模上的激光分成多个 根据圆形孔的数量的光束，将分割光束照射到掩模的各个圆形孔上，以及用于形成通过孔板上的掩模的激光的图像的投影透镜。