公开(公告)号：US20040200813A1

公开(公告)日：2004-10-14

申请号：US10491909

申请日：2004-04-08

发明人： Philippe Alips ,  Francois Dubrulle ,  Gabriel Vergniez

IPC分类号： B23K026/24 ,  B23K026/067

CPC分类号： B23K26/0608 ,  B23K15/0046 ,  B23K26/067 ,  B23K26/142 ,  B23K26/1438 ,  B23K26/147 ,  B23K26/244 ,  B23K2101/34 ,  B23K2103/04 ,  B23K2103/08

摘要： The invention concerns a method for overlapping welding of two coated metal sheets (1, 2) with a beam of high energy density (11), characterized in that it consists in splitting the beam (11) into a first sub-beam (12) passing through both coated metal sheets (1, 2) and forming in said zone a first molten metal bath (18) and into a non-through second sub-beam (13) forming a second molten metal bath (19) whereof the depth is less than the thickness of the upper coated metal sheet (1) and overlapping at least part of the first molten metal bath (18) for promoting evacuation of vapour from the coating material and directing on the second molten metal bath (19) a neutral gas jet with high ejection speed to form at the surface of the second molten metal bath a sink (22).

摘要翻译： 本发明涉及一种用于将两个涂覆的金属板（1,2）与高能量密度束（11）重叠焊接的方法，其特征在于它包括将梁（11）分成第一子梁（12） 穿过两个涂覆的金属板（1,2）并且在所述区域中形成第一熔融金属浴（18）并形成形成第二熔融金属浴（19）的非直通第二子梁（13），其中深度为 小于上部涂覆的金属板（1）的厚度并与第一熔融金属浴（18）的至少一部分重叠，用于促进蒸气从涂层材料中排出并引导第二熔融金属浴（19）上的中性气体 以高喷射速度喷射，以在第二熔融金属浴槽的表面形成水槽（22）。

公开(公告)号：US20040056009A1

公开(公告)日：2004-03-25

申请号：US10652688

申请日：2003-09-02

申请人： ORBOTECH LTD

发明人： Abraham Gross ,  Zvi Kotler ,  Eliezer Lipman

IPC分类号： B23K026/06 ,  B23K026/067

CPC分类号： B23K26/073 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/42 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  G02B26/0833 ,  G02B27/106 ,  G02B27/143 ,  G02B27/145 ,  H01S3/005 ,  H05K3/0026

摘要： A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

摘要翻译： 一种用于向衬底递送能量的系统，包括能够提供多个辐射束的动态可定向辐射能源，每个辐射束均以动态可选方向传播。 多个光束操纵元件中的独立定位的光束操纵元件可操作以接收光束并将其引导到基板上的可选位置。

公开(公告)号：US20030150847A1

公开(公告)日：2003-08-14

申请号：US10075018

申请日：2002-02-14

发明人： Igor Troitski

IPC分类号： B23K026/067

CPC分类号： B23K26/0608 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/361 ,  B23K26/53 ,  B23K2103/42 ,  B44B7/007

摘要： The system for high-speed production of high quality laser-induced damage images inside transparent materials is disclosed. One or more embodiments of the invention disclose a system, which produces the said images by the combination of an electro-optical deflector and means for moving the article or focusing optical system. The combination of the said devices together with using of two laser beams allows increase the image production speed substantially, without the image deterioration. One or more embodiments of the invention disclose a system for creation of a laser-induced damage by generation of breakdowns at several separate centers by using the computing phase hologram, the phase structure of which is calculated so that the laser beam, passing through the hologram, is focused at several spots. One or more embodiments of the invention disclose a system for creation of a laser-induced damage by generation of breakdowns at area where two laser beams intersect. This decreases the image deterioration conditioned by the use of a deflector and allows to create etch points with different brightness for different directions.

摘要翻译： 公开了高透明材料内高质量激光损伤图像系统。 本发明的一个或多个实施例公开了一种系统，其通过电光偏转器和用于移动物品或聚焦光学系统的装置的组合产生所述图像。 所述设备的组合以及使用两个激光束可以显着提高图像生产速度，而不会造成图像劣化。 本发明的一个或多个实施例公开了一种用于通过使用计算相位全息图在几个分开的中心产生击穿来产生激光诱发的损伤的系统，其计算相位全息图被计算为使得穿过全息图的激光束 ，集中在几个地方。 本发明的一个或多个实施例公开了一种用于通过在两个激光束相交的区域处产生击穿来产生激光诱发的损伤的系统。 这减少了通过使用偏转器调节的图像劣化，并允许为不同的方向产生具有不同亮度的蚀刻点。

公开(公告)号：US20030080100A1

公开(公告)日：2003-05-01

申请号：US10235942

申请日：2002-09-06

申请人： Semiconductor Energy Laboratory Co., Ltd.

发明人： Shunpei Yamazaki ,  Koichiro Tanaka ,  Hidekazu Miyairi ,  Aiko Shiga ,  Akihisa Shimomura

IPC分类号： B23K026/08 ,  B23K026/067

CPC分类号： B23K26/0823 ,  B23K2101/36

摘要： To provide a continuous oscillation laser apparatus, and a manufacturing method of a semiconductor device using the continuous oscillation laser apparatus, which can enhance processing efficiency. A laser apparatus according to the present invention includes: a laser oscillation apparatus; a unit for rotating an object to be processed; a unit for moving the object to be processed toward a center of the rotation or toward an outside from the center; and an optical system for processing a laser light outputted from the laser oscillation apparatus and irradiating the processed laser light to a definite region in a moving range of the object to be processed, in which, while the object to be processed is rotated, the object to be processed is moved toward the center of the rotation or toward the outside from the center to move a position where the definite region and the object to be processed overlap.

摘要翻译： 提供一种连续振荡激光装置，以及使用该连续振荡激光装置的半导体装置的制造方法，能够提高处理效率。 根据本发明的激光装置包括：激光振荡装置; 用于旋转待处理物体的单元; 用于从所述中心朝向所述旋转中心或朝向外部移动被处理物体的单元; 以及光学系统，用于处理从激光振荡装置输出的激光，并将经处理的激光照射到待处理物体的移动范围内的确定区域，其中，当被处理物体旋转时，物体 被处理的物体从中心朝向旋转的中心或朝向外部移动，以移动定影区域和被处理物体重叠的位置。

公开(公告)号：US20020153361A1

公开(公告)日：2002-10-24

申请号：US10111611

申请日：2002-04-26

发明人： Masahiko Sakamoto ,  Shozui Takeno ,  Yasuhiko Iwai ,  Toshiyuki Hokodate ,  Miki Kurosawa

IPC分类号： B23K026/06 ,  B23K026/067

CPC分类号： B23K26/0608 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/067 ,  B23K26/08 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/50

摘要： A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fnull lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Fnull lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Fnull lens, and an object is set to be not more than 0.08.

摘要翻译： 根据本发明的激光加工装置设置有用于产生激光束的激光振荡器，主偏转电流计镜，Ftheta透镜和布置在激光振荡器和主偏转电流计之间的光路中的副偏转装置 镜子。 提供了用于分割激光束的装置，并且将副偏转装置插入到一个分割激光束的光路中。 同时，分离的激光束都从相同的主偏转加速计反射镜入射到Ftheta透镜，并且由主偏转加速计镜，Ftheta透镜和物体构成的光学系统中的数值孔径被设置为 不超过0.08。

公开(公告)号：US20020086245A1

公开(公告)日：2002-07-04

申请号：US09950038

申请日：2001-09-10

发明人： Eitan Zait ,  Vladimir Dmitriev ,  Nikolay Guletsky ,  Sergei Oshemkov

IPC分类号： B23K026/067 ,  B23K026/08 ,  B23K026/18 ,  B23K026/40

CPC分类号： G03F1/76 ,  B23K26/009 ,  B23K26/0624 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/18 ,  Y10S430/146

摘要： A method and apparatus for manufacturing patterns on a reticle blank comprising a substrate made from material transparent to UV irradiation and having a first surface and a second opposite surface, the first surface coated with a chrome layer. The method comprises providing ultra-short pulsed laser beams, focusing means, relative displacement facilitator for facilitating relative displacement of the reticle blank relative to said at least one of a plurality of target locations, and a controller for controlling the synchronization and operation of the laser beam source, the focusing means and the relative displacement facilitator. Ultra-short pulsed laser beam is irradiated in a predetermined pattern directed at the second surface and passing through the substrate, focused on the chrome layer or on its proximity.

摘要翻译： 一种用于在掩模版坯料上制造图案的方法和装置，包括由对UV照射透明的材料制成的基底，并且具有第一表面和第二相对表面，所述第一表面涂覆有铬层。 该方法包括提供超短脉冲激光束，聚焦装置，相对位移辅助器，用于促进标线片坯体相对于多个目标位置中的所述至少一个的相对位移;以及控制器，用于控制激光器的同步和操作 光束源，聚焦装置和相对位移辅助器。 超短脉冲激光束以指向第二表面的预定图案照射并穿过基板，聚焦在铬层上或其邻近处。

公开(公告)号：US20010045418A1

公开(公告)日：2001-11-29

申请号：US09865936

申请日：2001-05-25

发明人： Jay J. Brandinger ,  Brian D. Hoffman ,  Edward T. Polkowski

IPC分类号： B23K026/067

CPC分类号： B23K26/0608 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0732 ,  B23K26/702

摘要： A laser machining device is capable of simultaneously machining two- or three dimentional patterns on the surface of a workpiece. A micromirror array positioned within a laser cavity generates a patterned plurality of laser beamlets which can be homogenized and deflected by a second micromirror array onto the surface of a workpiece to create a two-dimensional pattern. Alternatively, the second micromirror array can deflect laser beamlets of unequal energy density to produce a three-dimensional pattern.

摘要翻译： 激光加工装置能够同时在工件表面上加工二维或三维图案。 定位在激光腔内的微镜阵列产生图案化的多个激光束，其可被均匀化并被第二微镜阵列偏转到工件的表面上以产生二维图案。 或者，第二微镜阵列可偏转不等能量密度的激光束以产生三维图案。

公开(公告)号：US20040155018A1

公开(公告)日：2004-08-12

申请号：US10764885

申请日：2004-01-26

申请人： SEIKO EPSON CORPORATION

发明人： Kazushige Umetsu ,  Jun Amako ,  Kenichi Honda

IPC分类号： B23K026/38 ,  B23K026/067

CPC分类号： B23K26/0673 ,  B23K26/067 ,  B23K2101/38 ,  G02F1/136204 ,  H05K3/027 ,  H05K3/225

摘要： An apparatus for cutting an electrical wiring line includes a laser generator for generating a laser beam, an optical beam branching element for branching a laser beam generated by the laser generator into a plurality of branch beams, and a condenser element for condensing the branch beams branched by the optical beam branching element (the optical beam branching element can also serve as the condenser element). The condenser element may be a condenser lens which is separate from the optical beam branching element. The power and the focal depth of the branch beam may be adjusted. When the substrate has a transparency to the laser beam, the branch beam is directed to the electrical wiring line formed on the substrate from the opposite side to the surface having the electrical wiring line.

摘要翻译： 一种用于切割电线的设备包括用于产生激光束的激光发生器，用于将由激光发生器产生的激光束分支成多个分支光束的光束分支元件，以及用于使分支光束分支 通过光束分支元件（光束分支元件也可以用作聚光元件）。 聚光元件可以是与光束分支元件分离的聚光透镜。 可以调整分支光束的光焦度和焦深。 当基板对激光束具有透明度时，分支光束从与具有电布线的表面相反的一侧被引向形成在基板上的电布线。

公开(公告)号：US20040104208A1

公开(公告)日：2004-06-03

申请号：US10432289

申请日：2003-05-20

发明人： Kenichi Ijima ,  Tadashi Kuriowa

IPC分类号： B23K026/067 ,  B23K026/06

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/082 ,  B23K26/382 ,  B23K2101/42 ,  B23K2103/50

摘要： In a laser machining apparatus in which one laser beam is split into two laser beams by first polarizing means, one of the laser beams propagates by way of a mirror, another laser beam is scanned in two axial directions by a first galvanoscanner, and the two laser beams are guided to second polarizing means and then scanned by a second galvanoscanner to process a workpiece, an optical path is configured so that the laser beam which is transmitted through the first polarizing means is reflected by the second polarizing means, and the laser beam which is reflected by the first polarizing means is transmitted through the second polarizing means.

摘要翻译： 在激光加工装置中，通过第一偏振装置将一个激光束分成两个激光束，其中一个激光束通过反射镜传播，另一个激光束通过第一电流扫描器沿两个轴向扫描， 激光束被引导到第二偏振装置，然后通过第二电扫描仪扫描以处理工件，光路被配置为使得透射通过第一偏振装置的激光束被第二偏振装置反射，并且激光束 由第一偏振装置反射的透射通过第二偏振装置。

公开(公告)号：US20030047546A1

公开(公告)日：2003-03-13

申请号：US10265425

申请日：2002-10-07

申请人： ORBOTECH LTD

发明人： Abraham Gross ,  Zvi Kotler ,  Eliezer Lipman

IPC分类号： B23K026/067

CPC分类号： B23K26/073 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/42 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  G02B26/0833 ,  G02B27/106 ,  G02B27/143 ,  G02B27/145 ,  H01S3/005 ,  H05K3/0026

摘要： A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

摘要翻译： 一种用于向衬底递送能量的系统，包括能够提供多个辐射束的动态可定向辐射能源，每个辐射束均以动态可选方向传播。 多个光束操纵元件中的独立定位的光束操纵元件可操作以接收光束并将其引导到基板上的可选位置。