公开(公告)号：US20140191751A1

公开(公告)日：2014-07-10

申请号：US14238958

申请日：2012-08-15

申请人： Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Makoto Sakamoto ,  Yoshiuki Oota

发明人： Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Makoto Sakamoto ,  Yoshiuki Oota

IPC分类号： G01N27/82

CPC分类号： G01N27/82 ,  G01N27/83 ,  G01N27/902

摘要： A magnetic testing method and apparatus can accurately detect a flaw by magnetizing a test object to such a degree that the object becomes magnetically saturated while solving the problems of a large magnetizing device is required when only a DC magnetic field is applied and that the test object generates heat when only an AC magnetic field is applied.A magnetic testing apparatus comprises a first magnetizing device for applying a DC bias magnetic field to a test object P in substantially parallel to the direction in which a flaw F to be detected extends, a second magnetizing device for applying an AC magnetic field to the test object P substantially perpendicularly to the direction in which the flaw F to be detected extends, and a detecting device for detecting leakage flux produced by the magnetization of the test object P accomplished by the first and second magnetizing devices.

摘要翻译： 磁性测试方法和装置可以通过将测试对象磁化以使物体变得磁饱和的程度来准确地检测缺陷，同时在仅施加DC磁场的同时解决大的磁化装置的问题，并且测试对象 仅在施加交流磁场时产生热量。 磁性测试装置包括：第一磁化装置，用于将大致平行于待检测的缺陷F的方向的测试对象P施加直流偏置磁场延伸的第二磁化装置，用于将AC磁场施加到测试的第二磁化装置 物体P大体上垂直于待检测的缺陷F的方向延伸;以及检测装置，用于检测由第一和第二磁化装置实现的被测试物体P的磁化产生的漏磁通。

公开(公告)号：US09291599B2

公开(公告)日：2016-03-22

申请号：US14238958

申请日：2012-08-15

申请人： Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Makoto Sakamoto ,  Yoshiyuki Oota

发明人： Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Makoto Sakamoto ,  Yoshiyuki Oota

IPC分类号： G01N27/82 ,  G01N27/83 ,  G01N27/90

CPC分类号： G01N27/82 ,  G01N27/83 ,  G01N27/902

摘要： A magnetic testing apparatus 100 according to the present invention comprises: a first magnetizing device 1 for applying a DC bias magnetic field to a test object P in substantially parallel to the direction in which a flaw F to be detected extends; a second magnetizing device 2 for applying an AC magnetic field to the test object P substantially perpendicularly to the direction in which the flaw F to be detected extends; and a detecting device 3 for detecting leakage flux produced by the magnetization of the test object P accomplished by the first magnetizing device 1 and the second magnetizing device 2.

摘要翻译： 根据本发明的磁性测试装置100包括：第一磁化装置1，用于将基本上平行于待检测的缺陷F的方向延伸的测试对象P施加直流偏置磁场; 第二磁化装置2，用于将大致垂直于待检测的缺陷F的方向延伸的测试对象P的交流磁场施加; 以及检测装置3，用于检测由第一磁化装置1和第二磁化装置2实现的被测试物体P的磁化产生的漏磁通。

公开(公告)号：US09121833B2

公开(公告)日：2015-09-01

申请号：US13551014

申请日：2012-07-17

申请人： Kazunori Anayama ,  Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Masami Ikeda ,  Kenta Sakai

发明人： Kazunori Anayama ,  Toshiyuki Suzuma ,  Yoshiyuki Nakao ,  Masami Ikeda ,  Kenta Sakai

IPC分类号： H04N7/18 ,  G01N21/952

CPC分类号： G01N21/952

摘要： A defect inspecting apparatus includes a first light source, a first image capture device that receives the reflection light emitted from the first light source and reflected by the outer peripheral surface of a lip part to grab the image of the outer peripheral surface of the lip part, a second light source, a second image capture device 8 that receives the reflection light emitted from the second light source and reflected by a load face to grab the image of the load face, a third light source, a third image capture device that receives the reflection light emitted from the third light source and reflected by a thread bottom face inspection zone 106 to grab the image of the thread bottom face inspection zone, and an inspection device for inspecting defects by processing the captured images grabbed by the first to third image capture devices.

摘要翻译： 缺陷检查装置包括第一光源，第一图像捕获装置，其接收从第一光源发射并被唇部的外周面反射的反射光，以抓住唇部的外周面的图像 ，第二光源，第二图像捕获装置8，其接收从第二光源发射并被负载面反射以吸收负载面的图像的反射光;第三光源;第三图像捕获装置，其接收 从第三光源发射并由线底面检查区域106反射的反射光，以抓取线底面检查区域的图像;以及检查装置，用于通过处理由第一至第三图像抓取的捕获图像来检查缺陷 捕获设备。

公开(公告)号：US20120092005A1

公开(公告)日：2012-04-19

申请号：US13286429

申请日：2011-11-01

申请人： Takashi HIBINO ,  Takashi Fujimoto ,  Shigeki Namekata ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

发明人： Takashi HIBINO ,  Takashi Fujimoto ,  Shigeki Namekata ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

IPC分类号： G01N27/90

CPC分类号： G01N27/902 ,  G01N27/904

摘要： A rotary eddy current flaw detection probe device has a plurality of Θ-shaped eddy current flaw detection probes attached in a rotating disc for detecting flaws in all directions regardless of the flaw direction. Four Θ-shaped eddy current testing probes P11 to P22 are arranged around the rotation center Ds1 of a rotating disc 111, and are embedded in the disc 111. The coil planes of detector coils Ds11 to Ds22 of the testing probes P11 to P22 are parallel with each other, and are perpendicular to the rotation plane of the rotating disc 111. The coil planes of the detector coils incline at an angle θ relative to a line Y passing through the centers Ps11 and Ps12 of the probes P11 and P12. The detector coils Dc11 and Dc12 are cumulatively connected to each other, and the detector coils Dc21 and Dc22 are differentially connected to each other.

摘要翻译： 旋转涡流探伤探针装置具有多个Θ形的涡流探伤探针，其安装在旋转盘中，用于检测各个方向的瑕疵，而不管瑕疵方向如何。 四个Θ形涡流测试探针P11至P22围绕旋转盘111的旋转中心Ds1布置，并被嵌入盘111中。测试探针P11至P22的检测器线圈Ds11至Ds22的线圈平面平行 彼此垂直于旋转盘111的旋转平面。检测器线圈的线圈平面以一定角度倾斜; 相对于穿过探针P11和P12的中心Ps11和Ps12的线Y。 检测器线圈Dc11和Dc12彼此累积连接，检测线圈Dc21和Dc22彼此差分连接。

公开(公告)号：US08803516B2

公开(公告)日：2014-08-12

申请号：US13140845

申请日：2009-12-14

申请人： Takashi Hibino ,  Takashi Fujimoto ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

发明人： Takashi Hibino ,  Takashi Fujimoto ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

IPC分类号： G01R33/12 ,  G01N27/90 ,  G01N27/82

CPC分类号： G01N27/902 ,  G01N27/82

摘要： In an eddy current testing method which involves using a rotatable eddy current testing probe in which a detection coil is arranged within an exciting coil, a change in detection sensitivity (a deviation of detection sensitivity) which changes depending on the rotational position of the detection coil is reduced. The eddy current testing probe includes an exciting coil EC1, a detection coil DC1, an exciting coil EC2 and a detection coil DC2, which are mounted on a disk DS. The eddy current testing probe is placed so as to face a circumferential surface of an object to be inspected T, which is in the shape of a circular cylinder, and the disk DS is rotated. Then, the distance (liftoff) between the detection coils DC1 and DC2 and an inspection surface changes. Therefore, also the detection sensitivity to a flaw signal changes. To reduce the change in detection sensitivity, the detection sensitivity is adjusted by detecting the rotational position (rotational angle) of the detection coils DC1 and DC2.

摘要翻译： 在涡电流测试方法中，涉及使用其中检测线圈布置在励磁线圈内的可旋转涡流测试探针，检测灵敏度的变化（检测灵敏度的偏差）根据检测线圈的旋转位置而变化 降低了。 涡电流测试探头包括安装在盘DS上的励磁线圈EC1，检测线圈DC1，励磁线圈EC2和检测线圈DC2。 将涡电流测试探针放置成面对被检查物体T的圆周表面，该圆形表面呈圆柱形，圆盘DS旋转。 然后，检测线圈DC1和DC2之间的距离（剥离）和检查面发生变化。 因此，对缺陷信号的检测灵敏度也会发生变化。 为了减小检测灵敏度的变化，通过检测检测线圈DC1和DC2的旋转位置（旋转角度）来调节检测灵敏度。

公开(公告)号：US08638091B2

公开(公告)日：2014-01-28

申请号：US13286429

申请日：2011-11-01

申请人： Takashi Hibino ,  Takashi Fujimoto ,  Shigeki Namekata ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

发明人： Takashi Hibino ,  Takashi Fujimoto ,  Shigeki Namekata ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

IPC分类号： G01N27/90

CPC分类号： G01N27/902 ,  G01N27/904

摘要： A rotary eddy current flaw detection probe device has a plurality of Θ-shaped eddy current flaw detection probes attached in a rotating disc for detecting flaws in all directions regardless of the flaw direction. Four Θ-shaped eddy current testing probes P11 to P22 are arranged around the rotation center Ds1 of a rotating disc 111 and are embedded in the disc 111. The coil planes of detector coils Ds11 to Ds22 of the testing probes P11 to P22 are parallel with each other, and are perpendicular to the rotation plane of the rotating disc 111. The coil planes of the detector coils incline at an angle θ relative to a line Y passing through the centers Ps11 and Ps12 of the probes P11 and P12. The detector coils Dc11 and Dc12 are cumulatively connected to each other and the detector coils Dc21 and Dc22 are differentially connected to each other.

摘要翻译： 旋转涡流探伤探针装置具有附接在旋转盘中的多个Theta形涡流探伤探针，用于检测各个方向的瑕疵，而不管瑕疵方向如何。 四个Theta形涡电流测试探针P11至P22围绕旋转盘111的旋转中心Ds1布置并嵌入到盘111中。测试探针P11至P22的检测器线圈Ds11至Ds22的线圈平面与 彼此垂直于旋转盘111的旋转平面。检测器线圈的线圈面相对于穿过探针P11和P12的中心Ps11和Ps12的线Y以一定角度倾斜。 检测器线圈Dc11和Dc12彼此累积连接，检测线圈Dc21和Dc22彼此差分地连接。

公开(公告)号：US20120161758A1

公开(公告)日：2012-06-28

申请号：US13140845

申请日：2009-12-14

申请人： Takashi Hibino ,  Takashi Fujimoto ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

发明人： Takashi Hibino ,  Takashi Fujimoto ,  Keisuke Komatsu ,  Yoshiyuki Nakao ,  Makoto Takata ,  Makoto Sakamoto

IPC分类号： G01R33/12

CPC分类号： G01N27/902 ,  G01N27/82

摘要： In an eddy current testing method which involves using a rotatable eddy current testing probe in which a detection coil is arranged within an exciting coil, a change in detection sensitivity (a deviation of detection sensitivity) which changes depending on the rotational position of the detection coil is reduced. The eddy current testing probe includes an exciting coil EC1, a detection coil DC1, an exciting coil EC2 and a detection coil DC2, which are mounted on a disk DS. The eddy current testing probe is placed so as to face a circumferential surface of an object to be inspected T, which is in the shape of a circular cylinder, and the disk DS is rotated. Then, the distance (liftoff) between the detection coils DC1 and DC2 and an inspection surface changes. Therefore, also the detection sensitivity to a flaw signal changes. To reduce the change in detection sensitivity, the detection sensitivity is adjusted by detecting the rotational position (rotational angle) of the detection coils DC1 and DC2.

摘要翻译： 在涡电流测试方法中，涉及使用其中检测线圈布置在励磁线圈内的可旋转涡流测试探针，检测灵敏度的变化（检测灵敏度的偏差）根据检测线圈的旋转位置而变化 降低了。 涡电流测试探头包括安装在盘DS上的励磁线圈EC1，检测线圈DC1，励磁线圈EC2和检测线圈DC2。 将涡电流测试探针放置成面对被检查物体T的圆周表面，该圆形表面呈圆柱形，圆盘DS旋转。 然后，检测线圈DC1和DC2之间的距离（剥离）和检查面发生变化。 因此，对缺陷信号的检测灵敏度也会发生变化。 为了减小检测灵敏度的变化，通过检测检测线圈DC1和DC2的旋转位置（旋转角度）来调节检测灵敏度。

公开(公告)号：US08552717B2

公开(公告)日：2013-10-08

申请号：US12531840

申请日：2008-03-17

申请人： Shigetoshi Hyodo ,  Yoshiyuki Nakao

发明人： Shigetoshi Hyodo ,  Yoshiyuki Nakao

IPC分类号： G01N27/82

CPC分类号： G01N27/9013

摘要： It is an object of the present invention to provide an eddy current testing apparatus capable of accurately detecting any flaws occurring in a columnar or cylindrical subject to be tested regardless of their extending directions, with the use of the same probe coil.The eddy current testing apparatus 100 according to the present invention comprises a spinning plate 1 and a probe coil 2 disposed on the spinning plate 1. The probe coil is a probe coil capable of obtaining a differential output about a scanning direction of a detection signal which corresponds to a detected eddy current induced in the subject to be tested. The spinning plate is disposed in such a position that a spinning center RC of the spinning plate faces with an axial center PC of the subject to be tested. A distance R between the spinning center of the spinning plate and a center of the probe coil is set so that a difference between a maximum amplitude of a differential output at an axially extending artificial flaw provided in the subject to be tested and a maximum amplitude of a differential output at a circumferentially extending artificial flaw provided in the subject to be tested falls within a predetermined range.

摘要翻译： 本发明的目的是提供一种涡流测试装置，其能够使用相同的探针线圈来精确地检测在被测试的柱状或圆柱体中发生的任何缺陷，而不管其延伸方向如何。 根据本发明的涡流检测装置100包括设置在纺丝板1上的纺丝板1和探针线圈2.探针线圈是能够获得关于检测信号的扫描方向的差分输出的探针线圈， 对应于在待测试对象中感测的检测到的涡流。 纺丝板被设置在纺纱板的纺纱中心RC与待测试对象的轴心中心PC相对的位置。 将纺丝板的纺纱中心与探针线圈的中心之间的距离R设定为使被测试对象物中设置的轴向延伸的人造缺陷的差动输出的最大振幅与最大振幅 在待测试对象中设置的周向延伸的人造缺陷的差分输出落在预定范围内。

公开(公告)号：US20110003475A1

公开(公告)日：2011-01-06

申请号：US12883701

申请日：2010-09-16

申请人： Michie Sunayama ,  Yoshiyuki Nakao ,  Noriyoshi Shimizu

发明人： Michie Sunayama ,  Yoshiyuki Nakao ,  Noriyoshi Shimizu

IPC分类号： H01L21/768

CPC分类号： H01L23/53295 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76831 ,  H01L21/76843 ,  H01L21/76844 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  Y10S438/914 ,  H01L2924/00

摘要： A method for producing a semiconductor device including a first conductor disposed on a semiconductor substrate; an oxygen-containing insulation film disposed on the semiconductor substrate and on the first conductor, the insulation film having a contact hole which extends to the first conductor and a trench which is connected to an upper portion of the contact hole; a zirconium oxide film disposed on a side surface of the contact hole and a side surface and a bottom surface of the trench; a zirconium film disposed on the zirconium oxide film inside the contact hole and inside the trench; and a second conductor composed of Cu embedded into the contact hole and into the trench.

摘要翻译： 一种半导体器件的制造方法，包括设置在半导体衬底上的第一导体; 设置在所述半导体衬底上和所述第一导体上的含氧绝缘膜，所述绝缘膜具有延伸到所述第一导体的接触孔和与所述接触孔的上部连接的沟槽; 设置在所述接触孔的侧表面上的氧化锆膜和所述沟槽的侧表面和底表面; 在所述接触孔内部和所述沟槽内部设置在所述氧化锆膜上的锆膜; 以及由嵌入接触孔并进入沟槽的Cu构成的第二导体。

公开(公告)号：US20100178762A1

公开(公告)日：2010-07-15

申请号：US12731515

申请日：2010-03-25

申请人： Hideki Kitada ,  Nobuyuki Ohtsuka ,  Noriyoshi Shimizu ,  Yoshiyuki Nakao

发明人： Hideki Kitada ,  Nobuyuki Ohtsuka ,  Noriyoshi Shimizu ,  Yoshiyuki Nakao

IPC分类号： H01L21/768

CPC分类号： H01L23/53238 ,  H01L21/76831 ,  H01L21/76846 ,  H01L21/76855 ,  H01L21/76864 ,  H01L21/76867 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

摘要： An interlayer insulating film having a concave portion is formed on a semiconductor substrate. A tight adhesion film is formed on the inner surface of the concave portion and the upper surface of the insulating film. The surface of the adhesion layer is covered with an auxiliary film made of Cu alloy containing a first metal element. A conductive member containing a second metal element other than the first metal element is embedded in the concave portion, and deposited on the auxiliary film. Heat treatment is performed to make atoms of the first metal element in the auxiliary film segregate on the inner surface of the concave portion. The adhesion layer contains an element for enhancing tight adhesion of the auxiliary film more than if the auxiliary film is deposited directly on a surface of the interlayer insulating film. During the period until the barrier layer having also the function of enhancing tight adhesion, it becomes possible to retain sufficient tight adhesion of a wiring member and prevent peel-off of the wiring member.

摘要翻译： 在半导体基板上形成具有凹部的层间绝缘膜。 在凹部的内表面和绝缘膜的上表面上形成紧密粘合膜。 粘附层的表面覆盖有由含有第一金属元素的Cu合金制成的辅助膜。 包含除了第一金属元件之外的第二金属元件的导电构件被嵌入在凹部中，并且沉积在辅助膜上。 进行热处理，使辅助膜中的第一金属元素的原子在凹部的内表面分离。 如果辅助膜直接沉积在层间绝缘膜的表面上，则粘合层包含用于增强辅助膜的紧密粘附的元件。 在阻隔层也具有增强紧密附着力的时段期间，可以保持布线部件的足够的紧密粘合性并防止布线部件的剥离。