公开(公告)号：US08770025B2

公开(公告)日：2014-07-08

申请号：US13321980

申请日：2010-05-26

申请人： Tsutomu Nakanishi ,  Yasunobu Kobayashi ,  Koumei Hujita

发明人： Tsutomu Nakanishi ,  Yasunobu Kobayashi ,  Koumei Hujita

IPC分类号： G01H13/00 ,  G01P15/09

CPC分类号： G01L9/0016 ,  G01L1/162

摘要： A physical quantity sensor includes a beam-like vibrating body and a fixing part supporting both ends of the beam-like vibrating body. A driving element is formed on a central portion of the beam-like vibrating body, and feedback elements are formed on both ends. A physical quantity acting on the beam-like vibrating body is detected by causing natural vibration in the beam-like vibrating body and detecting a natural frequency of the vibrating body. This enables reliable detection of a physical quantity, such as a strain or load, acting on an object.

摘要翻译： 物理量传感器包括梁状振动体和支撑梁状振动体两端的固定部。 驱动元件形成在梁状振动体的中心部分上，反馈元件形成在两端。 通过在梁状振动体中引起固有振动并检测振动体的固有频率来检测作用在梁状振动体上的物理量。 这使得能够可靠地检测作用在物体上的物理量，例如应变或负载。