公开(公告)号：US09778238B2

公开(公告)日：2017-10-03

申请号：US14480986

申请日：2014-09-09

申请人： ams International AG

发明人： Casper van der Avoort ,  Willem Besling

IPC分类号： G01N33/00 ,  G01N29/22 ,  G01N29/32 ,  G01N29/44 ,  G01L9/00 ,  G01N29/02 ,  G01N29/036 ,  G01N29/24

CPC分类号： G01N33/004 ,  G01L9/0016 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N29/2406 ,  G01N29/2431 ,  G01N29/323 ,  G01N29/4436 ,  G01N33/0031 ,  G01N2291/021 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02809 ,  G01N2291/02818 ,  Y02A50/244

摘要： Various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.

公开(公告)号：US09506827B2

公开(公告)日：2016-11-29

申请号：US14515470

申请日：2014-10-15

申请人： Microlux Technology

发明人： Tom Kwa

IPC分类号： G01L9/00 ,  G01L19/06 ,  G01L19/14

CPC分类号： G01L9/0042 ,  G01L9/0016 ,  G01L19/0609 ,  G01L19/0618 ,  G01L19/147

摘要： A pressure sensor assembly comprising: three stacked silicon wafers which form a support, a sensor and a cover wherein the sensor includes a cavity extending from the bottom of the sensor up towards the top of the sensor to form a cavity bottom and a diaphragm; a dielectric layer covering the bottom of the sensor and the cavity and wherein the support is coupled to the dielectric layer along the bottom of the sensor; a plurality of ports located on a top of the support within an area defined by the cavity, the plurality of ports extending through the support to its bottom and wherein the cover is coupled to the top of the sensor covering the diaphragm; and, a second cavity cut into a bottom of the cover wherein the second cavity is sized and positioned to surround the diaphragm.

公开(公告)号：US20140053651A1

公开(公告)日：2014-02-27

申请号：US13592570

申请日：2012-08-23

申请人： Willem Frederik Adrianus Besling ,  Peter Gerard STEENEKEN ,  Olaf Wunnicke

发明人： Willem Frederik Adrianus Besling ,  Peter Gerard STEENEKEN ,  Olaf Wunnicke

IPC分类号： G01L11/04

CPC分类号： G01L9/0016 ,  G01L9/0019 ,  G01L21/22

摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.

摘要翻译： 可以与本文所讨论的一个或多个实施例一致，集成电路设备包括悬挂在空腔上的膜，膜和空腔限定室。 膜在其中具有多个开口，其将气体进入和离开室。 当膜被致动时，室的体积变化以在室内产生不同于室外的压力的气体压力。 传感器响应于体积变化来检测膜的基于频率的特性，并且其中提供了室外的气体压力的指示。

公开(公告)号：US20130336095A1

公开(公告)日：2013-12-19

申请号：US13995527

申请日：2011-12-07

申请人： Heikki Seppa ,  Teuvo Sillanpaa ,  Ville Viikari

发明人： Heikki Seppa ,  Teuvo Sillanpaa ,  Ville Viikari

IPC分类号： H04B11/00 ,  B06B1/02

CPC分类号： H04B11/00 ,  B06B1/0292 ,  G01D21/00 ,  G01L9/0016 ,  G01L11/06 ,  G01L19/086 ,  G01P15/0802 ,  G01P15/125

摘要： The invention relates to a sensor and a system for measuring pressure, variation in sound pressure, a magnetic field, acceleration, vibration, or the composition of a gas. The sensor comprises an ultrasound transmitter, a cavity, and a passive sensor element. In accordance with the invention the sensor includes antenna means for receiving radio frequency signals (f1, f2), and connecting means connecting the antenna to the ultrasound transmitter for using the radio frequency signals for providing energy for driving the ultrasound transmitter.

摘要翻译： 本发明涉及用于测量压力，声压变化，磁场，加速度，振动或气体成分的传感器和系统。 传感器包括超声波发射器，空腔和无源传感器元件。 根据本发明，传感器包括用于接收射频信号（f1，f2）的天线装置和将天线连接到超声波发射器的连接装置，用于使用射频信号提供用于驱动超声波发射器的能量。

公开(公告)号：US08146437B2

公开(公告)日：2012-04-03

申请号：US12630179

申请日：2009-12-03

申请人： Yuichi Miyoshi ,  Yusuke Takeuchi ,  Tohru Yamaoka ,  Hiroshi Ogura

发明人： Yuichi Miyoshi ,  Yusuke Takeuchi ,  Tohru Yamaoka ,  Hiroshi Ogura

IPC分类号： G01L9/06

CPC分类号： G01L9/0016 ,  H04R19/005

摘要： A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the upper surface of the substrate so as to cover the through-hole. An opening shape of the through-hole in the upper surface of the substrate is substantially hexagonal.

摘要翻译： 用于MEMS器件的隔膜结构包括形成为从衬底的上表面到底表面穿透的通孔; 以及形成在基板的上表面上以覆盖通孔的振动电极膜。 基板的上表面中的通孔的开口形状基本上是六边形。

公开(公告)号：US20060150740A1

公开(公告)日：2006-07-13

申请号：US11030858

申请日：2005-01-07

申请人： Anthony Kurtz

发明人： Anthony Kurtz

IPC分类号： G01L11/00

CPC分类号： G01L9/0016

摘要： A resonating pressure transducer operable to measure an applied pressure by measuring changes in a resonant frequency is disclosed. The pressure transducer comprises a plurality of diaphragms formed in a wafer of semi-conducting material between two layers, wherein each of the diaphragms is divided into a plurality of electrically isolated sections; a cavity in one of the covering layers opposite a corresponding one of the diaphragms, a first via formed through a selected one of the layers enables application of a potential to selected ones of the diaphragm sections; and a second via formed through a selected one of the layers enables transmission of a measure from selected ones of the diaphragm sections.

摘要翻译： 公开了一种谐振压力传感器，其可操作以通过测量谐振频率的变化来测量施加的压力。 压力传感器包括形成在两层之间的半导体材料晶片中的多个隔膜，其中每个隔膜被分成多个电隔离部分; 与相应的一个膜片相对的一个覆盖层中的一个空腔，通过所选择的一个层形成的第一通孔使得能够对所选择的隔膜部分施加电位; 并且通过所选择的一个层形成的第二通孔使得能够从所选择的膜片部分中传输测量值。

公开(公告)号：US06182513B2

公开(公告)日：2001-02-06

申请号：US09219794

申请日：1998-12-23

申请人： Goeran Stemme ,  Edvard Kaelvesten

发明人： Goeran Stemme ,  Edvard Kaelvesten

IPC分类号： G01L1100

CPC分类号： G01L9/0016 ,  G01L9/0017 ,  G01L9/0042

摘要： A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.

摘要翻译： 公开了一种共振微束压力传感器，其包括通过悬架元件至少悬挂在隔膜中的微束。 施加到隔膜上的压力将导致梁的共振频率偏移。 这种变化是可检测的并且与压力成比例。 该器件通过表面微加工制造。

公开(公告)号：US4961345A

公开(公告)日：1990-10-09

申请号：US129521

申请日：1987-12-07

申请人： Michihiko Tsuruoka ,  Wataru Nakagawa ,  Masashi Machida ,  Naohiro Kounosu

发明人： Michihiko Tsuruoka ,  Wataru Nakagawa ,  Masashi Machida ,  Naohiro Kounosu

IPC分类号： G01L9/00 ,  G01N9/00

CPC分类号： G01L9/0022 ,  G01L9/0016 ,  G01N9/002

摘要： The apparatus of the present invention detects the resonant frequency of a vibratory member in contact with the fluid in order to determine the density or pressure of the fluid. The vibratory member is disposed in a housing to form a cavity with no flow communication between the side of the vibratory member facing into the cavity and the other side of the vibratory member. The vibratory member is vibrated by an annular piezoelectric device which may be attached to one or both sides of the vibratory member. An amplifier and feedback circuit regulate the frequency of oscillation of the piezoelectric device to that of the resonant frequency. The piezoelectric device may be comprised of several separate sections or several sections with partial interruptions in the piezoelectric material. Instead of the vibratory member and the piezoelectric transducer combination, the vibratory member may be constructed from a single fixed piezoelectric device with another piezoelectric disc mounted thereon. In this configuration one of the devices is used to mechanically excite the other and through a feedback circuit establish the resonant frequency of the two laminated piezoelectric devices.

摘要翻译： 本发明的装置检测与流体接触的振动构件的共振频率，以便确定流体的密度或压力。 振动构件设置在壳体中以在振动构件的面向腔体的一侧与振动构件的另一侧之间形成没有流动连通的空腔。 振动构件通过环形压电装置振动，环形压电装置可附接到振动构件的一侧或两侧。 放大器和反馈电路将压电器件的振荡频率调节到谐振频率的振荡频率。 压电装置可以由压电材料中的几个分开的部分或几个具有部分中断的部分组成。 代替振动构件和压电换能器组合，振动构件可以由安装有另一个压电盘的单个固定压电装置构成。 在该配置中，其中一个装置用于机械地激励另一个装置，并且通过反馈电路建立两个层压压电装置的谐振频率。

公开(公告)号：US4292850A

公开(公告)日：1981-10-06

申请号：US114614

申请日：1980-01-23

申请人： Christian Bachem

发明人： Christian Bachem

IPC分类号： G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0016

摘要： An air pressure transmitter for measuring air pressure having a circular diaphragm arranged in a measuring chamber, said diaphragm being surrounded on both sides by thin air layers and limited by rigid walls. The body of the air layers influences the natural frequency of the diaphragm. In order to achieve a high accuracy of measurement and to exclude calibrating instabilities, the diaphragm is configured as a plate of hard beaten material and clamped at its edge between the rigid walls with distance rings of such a thickness that the restoring force of the air layers located within the distance rings, at atmospheric pressure will become approximately three to ten times as high as the restoring force of the diaphragm. The diaphragm itself is inductively excited.

摘要翻译： 一种空气压力变送器，用于测量具有设置在测量室中的圆形隔膜的空气压力，所述隔膜在两侧被薄空气层包围并被刚性壁限制。 空气层的主体影响隔膜的固有频率。 为了实现高精度的测量并且排除校准不稳定性，隔膜被构造成硬质材料的板，并且在其刚性壁之间的边缘处被夹紧，其中距离环的厚度为空气层的恢复力 位于距离环内，大气压力将变为膜片恢复力的约三到十倍。 光阑本身感应激发。

公开(公告)号：US3842676A

公开(公告)日：1974-10-22

申请号：US35705673

申请日：1973-05-03

申请人： SPERRY RAND CORP

发明人： BROWN C ,  ROBINSON R

IPC分类号： G01L9/00 ,  G01L7/08 ,  G01L9/10

CPC分类号： G01L9/0016

摘要： An apparatus including a pressure sensing device in combination with a frequency converter, a displacement servo and a transducer in which the pressure sensing device incorporates a vibrating sensitive diaphragm in combination with an electrical drive circuit and a variable frequency oscillator for producing output voltages having frequencies which vary in a substantially linear manner with respect to pressure altitude. The frequency converter is coupled to the pressure sensing device and has a substantially linear transfer characteristic of variable frequency input with respect to amplitude of voltage output for transforming the variable frequency electrical output signal from the pressure sensing device into a variable amplitude output voltage that is applied to the displacement servo which provides an output shaft angle displacement. The transducer is coupled through appropriate gearing to the displacement servo which produces an output electrical signal in response to the output shaft angle displacement that is linearly proportional to the pressure altitude.