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    CRYSTAL UNIT
    6.
    发明申请
    CRYSTAL UNIT 有权
    水晶单元

    公开(公告)号：US20160231368A1

    公开(公告)日：2016-08-11

    申请号：US14974434

    申请日：2015-12-18

    Applicant: FUJITSU LIMITED

    Inventor： Masakazu Kishi ,  Hajime Kubota ,  Masayuki ITOH

    IPC: G01R29/22 ,  H03H9/10 ,  H03B5/32 ,  H03H9/13

    CPC classification number: G01R29/22 ,  G01L1/10 ,  G01L1/162 ,  G01L9/008 ,  H03B5/32 ,  H03H9/1021 ,  H03H9/13

    Abstract: A crystal unit includes: a crystal blank; an excitation electrode formed on the crystal blank and excites a main vibration of the crystal blank; a housing that accommodates the crystal blank; and a sub-vibration electrode formed on the housing and excites a sub-vibration of the crystal blank.And a method for inspecting a crystal unit, the method includes: generating a sub-vibration in a crystal blank by applying an input signal to a sub-vibration electrode formed on a housing, which accommodates the crystal blank, via external electrodes which are electrically coupled to the sub-vibration electrode and formed on the outer surface of the housing; obtaining an output of the crystal unit via the external electrodes; obtaining frequency characteristics of impedance between the external electrodes based on the output; and comparing the obtained frequency characteristics with the reference frequency characteristics indicating the quality of the crystal unit.

    Abstract translation: 晶体单元包括：晶体空白; 形成在晶体坯上的激励电极，激发晶体坯的主振动; 容纳晶体空白的壳体; 以及形成在壳体上的辅助振动电极，并且激发晶体坯的亚振动。 以及一种用于检查晶体单元的方法，该方法包括：通过外部电极将形成在容纳晶体坯料的壳体上形成的辅助振动电极施加输入信号，从而在晶体坯体中产生亚振动 耦合到副振动电极并形成在壳体的外表面上; 通过外部电极获得晶体单元的输出; 基于输出获得外部电极之间的阻抗的频率特性; 并将获得的频率特性与表示晶体单元的质量的参考频率特性进行比较。

    Oscillation piece, oscillator, electronic device, electronic apparatus, and mobile object
    7.
    发明授权
    Oscillation piece, oscillator, electronic device, electronic apparatus, and mobile object 有权
    振荡器，振荡器，电子设备，电子设备和移动物体

    公开(公告)号：US09252350B2

    公开(公告)日：2016-02-02

    申请号：US13936570

    申请日：2013-07-08

    Applicant: Seiko Epson Corporation

    Inventor： Masayuki Kikushima

    IPC: H03H9/15 ,  H03H9/24 ,  H01L41/04 ,  G01L9/00 ,  G01L1/16

    CPC classification number: H01L41/04 ,  G01L1/162 ,  G01L9/0022 ,  H03H9/15 ,  H03H9/2473

    Abstract: An oscillation piece includes a first oscillation arm and a second oscillation arm, a first base that connects ends of the first oscillation arm and the second oscillation arm on one side to each other and a second base that connects ends of the first oscillation arm and the second oscillation arm on the other side to each other, and weight films provided on each of the first oscillation arm and the second oscillation arm. The drive electrodes are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is maximized, and the weight films are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is minimized. The oscillation frequency of the oscillation piece can be precisely adjusted by removing part of the weight films.

    Abstract translation: 振荡片包括第一振荡臂和第二振荡臂，将第一振荡臂和第二振荡臂的一端彼此一体地连接的第一基座和连接第一振荡臂的端部和第二振荡臂的第二基座 第二振荡臂彼此相对，并且配重膜设置在第一振荡臂和第二振荡臂中的每一个上。 驱动电极设置在第一振荡臂和第二振荡臂中产生的变形量最大的位置，并且配重膜设置在第一振荡臂和第二振荡臂中产生的变形量的位置 被最小化。 可以通过去除部分重量膜来精确地调节振动片的振荡频率。

    THICKNESS SHEAR MODE RESONATOR SENSORS AND METHODS OF FORMING A PLURALITY OF RESONATOR SENSORS
    8.
    发明申请
    THICKNESS SHEAR MODE RESONATOR SENSORS AND METHODS OF FORMING A PLURALITY OF RESONATOR SENSORS 审中-公开
    厚度切割模式谐振器传感器和形成多个谐振器传感器的方法

    公开(公告)号：US20150247771A1

    公开(公告)日：2015-09-03

    申请号：US14707251

    申请日：2015-05-08

    Applicant: Delaware Capital Formation, Inc.

    Inventor： Derek W. Puccio ,  Errol P. EerNisse

    IPC: G01L9/00 ,  H01L41/18 ,  H01L41/113 ,  G01L1/16

    CPC classification number: G01L9/0022 ,  G01L1/162 ,  G01L9/0016 ,  H01L41/1132 ,  H01L41/18 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T29/4908

    Abstract: Arrays of resonator sensors include an active wafer array comprising a plurality of active wafers, a first end cap array coupled to a first side of the active wafer array, and a second end cap array coupled to a second side of the active wafer array. Thickness shear mode resonator sensors may include an active wafer coupled to a first end cap and a second end cap. Methods of forming a plurality of resonator sensors include forming a plurality of active wafer locations and separating the active wafer locations to form a plurality of discrete resonator sensors. Thickness shear mode resonator sensors may be produced by such methods.

    Abstract translation: 谐振器传感器的阵列包括主动晶片阵列，其包括多个有源晶片，耦合到有源晶片阵列的第一侧的第一端盖阵列和耦合到有源晶片阵列的第二侧的第二端盖阵列。 厚度剪切模式谐振器传感器可以包括联接到第一端盖和第二端盖的活动晶片。 形成多个谐振器传感器的方法包括形成多个有源晶片位置并分离有源晶片位置以形成多个分立的谐振器传感器。 可以通过这种方法制造厚度剪切模式谐振器传感器。

    External force detecting method and external force detecting device
    9.
    发明授权
    External force detecting method and external force detecting device 有权
    外力检测方法和外力检测装置

    公开(公告)号：US09016128B2

    公开(公告)日：2015-04-28

    申请号：US13374759

    申请日：2012-01-10

    Applicant: Mitsuaki Koyama ,  Takeru Mutoh ,  Hiroki Iwai

    Inventor： Mitsuaki Koyama ,  Takeru Mutoh ,  Hiroki Iwai

    IPC: G01H13/00 ,  G01P15/097 ,  G01P1/00 ,  G01P1/02 ,  G01P15/125 ,  G01L1/14 ,  G01L1/16 ,  G01P15/08

    CPC classification number: G01P15/097 ,  G01L1/142 ,  G01L1/162 ,  G01P1/00 ,  G01P1/006 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871

    Abstract: A technique for detecting external force applied to a piezoelectric plate is provided. A crystal plate is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively, of the crystal plate. A movable electrode is formed on the lower face side. A fixed electrode is provided on a bottom portion of the container facing the movable electrode. The excitation electrode on the upper face side and the fixed electrode are connected to an oscillation circuit. When the crystal plate bends by external force applied, capacitance between. A direction of the movable electrode along a length direction of the crystal plate is set to 30° to 60°, relative to a face orthogonal to an intended direction of the external force. The movable electrode and fixed electrode changes, and this capacitance change and a deformation of the crystal circuit.

    Abstract translation: 提供了一种用于检测施加到压电板的外力的技术。 水晶板悬臂支撑在容器中。 激励电极分别形成在晶体板的上表面和下表面上。 可动电极形成在下表面侧。 在面向可动电极的容器的底部设置固定电极。 上侧激励电极和固定电极连接到振荡电路。 当晶体板通过外力施加弯曲时，电容之间。 可移动电极沿着晶体板的长度方向的方向相对于与外力的预期方向正交的面设定为30°〜60°。 可动电极和固定电极发生变化，电容变化，晶体电路变形。

    Pressure sensor using MEMS resonator
    10.
    发明授权
    Pressure sensor using MEMS resonator 有权
    使用MEMS谐振器的压力传感器

    公开(公告)号：US08826742B2

    公开(公告)日：2014-09-09

    申请号：US14000673

    申请日：2013-02-12

    Applicant: Panasonic Corporation

    Inventor： Kunihiko Nakamura

    IPC: G01B7/16 ,  G01L1/16 ,  B81B3/00 ,  G01L1/10

    CPC classification number: G01L1/162 ,  B81B3/0021 ,  G01L9/0019 ,  G01L21/20

    Abstract: A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.

    Abstract translation: 一种压力传感器，包括：MEMS谐振器; 扫描单元，其在包括MEMS谐振器中的振动器的共振频率f0的预定频率范围内沿预定扫描方向扫描激励信号的频率，同时将激励信号输出到MEMS谐振器; 积分单元，其在扫描单元扫描频率时输入作为表示来自MEMS谐振器的振动器的振动状态的特征量的振动状态信息信号，将多个振动状态信息信号以不同频率 励磁信号，并输出积分值; 以及转换单元，其适于基于所述积分值来确定作用在所述MEMS谐振器上的压力。

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