PROTECTIVE TAPE JOINING METHOD AND PROTECTIVE TAPE USED THEREFOR
    2.
    发明申请
    PROTECTIVE TAPE JOINING METHOD AND PROTECTIVE TAPE USED THEREFOR 审中-公开
    保护带接合方法及其使用的保护带

    公开(公告)号:US20110275179A1

    公开(公告)日:2011-11-10

    申请号:US13144581

    申请日:2010-07-26

    IPC分类号: H01L21/56 C09J7/02

    CPC分类号: H01L21/67132 Y10T428/2848

    摘要: Provided is an improved method of joining a protective tape having one object to suppress generation of bending of a semiconductor wafer after a back-grinding process. The protective tape is supplied toward the semiconductor wafer suction-held on a chuck table, and an intermediate sheet is supplied along an upper side of the protective tape. Then, the intermediate sheet is interposed between a joining member and the protective tape along a surface of a base material in the protective tape so as to be movable. Under this state, the joining member and the semiconductor wafer move relative to each other in a horizontal direction, whereby the protective tape is joined to a surface of the semiconductor wafer.

    摘要翻译: 提供了一种改进的方法,其连接具有一个物体的保护带,以在后磨削过程之后抑制半导体晶片的弯曲产生。 将保护带供给到被夹持在卡盘台上的半导体晶片,沿着保护带的上侧供给中间片。 然后,中间片沿着保护带中的基材的表面介于接合构件和保护带之间,以便可移动。 在该状态下,接合部件和半导体晶片在水平方向上相对移动,由此将保护带接合到半导体晶片的表面。