公开(公告)号：US20020105250A1

公开(公告)日：2002-08-08

申请号：US09768564

申请日：2001-01-24

Applicant: U.S. PHILIPS CORPORATION

Inventor： Mareike Klee ,  Tilman Schlenker ,  Olaf Dannappel ,  Hans-Peter Loebl ,  Georg Schmitz ,  John Fraser

IPC: H02N002/00

CPC classification number: B06B1/0622 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/319

Abstract: The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.

Abstract translation: 本发明涉及一种超声波换能器阵列，每个超声换能器包括基底（1），膜（2），第一电极（4），压电层（5）和第二电极（6） 1）包括在一侧与膜（2）相邻的至少一个开口（3），而压电层（5）具有高压电耦合系数k并具有纹理。 本发明还涉及超声换能器和制造超声换能器阵列的方法。