公开(公告)号：US11869791B2

公开(公告)日：2024-01-09

申请号：US17311872

申请日：2019-09-02

Applicant: ULVAC, INC.

Inventor： Dai Takagi ,  Yuu Mizushima ,  Toshiyuki Koizumi

IPC: C23C14/50 ,  C23C14/56 ,  H01L21/677

CPC classification number: H01L21/6776 ,  C23C14/50 ,  C23C14/56 ,  H01L21/67715 ,  H01L21/677

Abstract: The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2. A travel roller 54 of the anti-sag member 35 travels while being guided and supported by a guide unit 17 that is provided below a return-path-side conveying portion 33c positioned on a lower side of a substrate holder conveying mechanism 3 and extends in a second conveying direction P2, and the first drive part 36 is configured to come into contact with a first driven unit 12 of a substrate holder 11 and drive the substrate holder 11 along the conveying path in the second conveying direction P2.