-
公开(公告)号：US11869791B2
公开(公告)日：2024-01-09
申请号：US17311872
申请日：2019-09-02
申请人： ULVAC, INC.
发明人： Dai Takagi , Yuu Mizushima , Toshiyuki Koizumi
IPC分类号： C23C14/50 , C23C14/56 , H01L21/677
CPC分类号： H01L21/6776 , C23C14/50 , C23C14/56 , H01L21/67715 , H01L21/677
摘要： The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2. A travel roller 54 of the anti-sag member 35 travels while being guided and supported by a guide unit 17 that is provided below a return-path-side conveying portion 33c positioned on a lower side of a substrate holder conveying mechanism 3 and extends in a second conveying direction P2, and the first drive part 36 is configured to come into contact with a first driven unit 12 of a substrate holder 11 and drive the substrate holder 11 along the conveying path in the second conveying direction P2.
-
公开(公告)号：US20190233938A1
公开(公告)日：2019-08-01
申请号：US16380416
申请日：2019-04-10
申请人： ULVAC, Inc.
CPC分类号： C23C14/562 , B65G49/00 , C23C14/34 , C23C14/50 , C23C14/56 , C23C14/564 , C23C14/568 , H01J37/34 , H01L21/677
摘要： In a vacuum chamber, there are first and second film formation regions, and a conveyance path having a projected shape on a vertical plane. The conveyance path has a continuous ring shape and passes through the first and second film formation regions. A substrate-holder conveyance mechanism has plural driving portions in contact with driven portions on the substrate holder and is configured to convey the substrate holder along the conveyance path such that the substrate holder remains horizontal. The driving portions convey a preceding substrate holder and a following substrate holder adjacent to each other through the respective film formation regions such that an end portion of an upstream side of a substrate holder at a downstream side in the moving direction and an end portion of a downstream side of a substrate holder at an upstream side in the moving direction are close to each other.
-
搜索结果
2 条记录 (耗时 0.012 秒)
