公开(公告)号：US20190233224A1

公开(公告)日：2019-08-01

申请号：US16381644

申请日：2019-04-11

申请人： ULVAC, INC.

发明人： Hirofumi MINAMI ,  Takayuki SUZUKI ,  Kazuhiro MUSHA ,  Hirotoshi NAKAO ,  Seiichi SATOU

IPC分类号： B65G49/00

CPC分类号： B65G49/00 ,  B65G2207/06 ,  C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  H01L21/677

摘要： A vacuum processing apparatus having a small installation area is provided. A lifting plate is arranges inside a vacuum chamber, and a substrate holding device is arranged on the lifting plate to be able to be lifted up and down. An upper side processing device and a lower side processing device are provided in a processing region located beside a lifting region where the lifting plate moves up and down. An upper side moving device and a lower side moving device make the substrate holding device pass through the processing region, and a transfer device transfers the substrate holding device between the upper side moving device or the lower side moving device and the lifting plate. Because vacuum processing can be performed on the upper side and the lower side, the installation area of the vacuum processing apparatus is small.